JPS626294Y2 - - Google Patents

Info

Publication number
JPS626294Y2
JPS626294Y2 JP4826182U JP4826182U JPS626294Y2 JP S626294 Y2 JPS626294 Y2 JP S626294Y2 JP 4826182 U JP4826182 U JP 4826182U JP 4826182 U JP4826182 U JP 4826182U JP S626294 Y2 JPS626294 Y2 JP S626294Y2
Authority
JP
Japan
Prior art keywords
negative pressure
diaphragm
pressure chamber
stopper
diaphragms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4826182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58151362U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4826182U priority Critical patent/JPS58151362U/ja
Publication of JPS58151362U publication Critical patent/JPS58151362U/ja
Application granted granted Critical
Publication of JPS626294Y2 publication Critical patent/JPS626294Y2/ja
Granted legal-status Critical Current

Links

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  • Actuator (AREA)
JP4826182U 1982-04-05 1982-04-05 負圧応動装置 Granted JPS58151362U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4826182U JPS58151362U (ja) 1982-04-05 1982-04-05 負圧応動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4826182U JPS58151362U (ja) 1982-04-05 1982-04-05 負圧応動装置

Publications (2)

Publication Number Publication Date
JPS58151362U JPS58151362U (ja) 1983-10-11
JPS626294Y2 true JPS626294Y2 (enrdf_load_stackoverflow) 1987-02-13

Family

ID=30059192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4826182U Granted JPS58151362U (ja) 1982-04-05 1982-04-05 負圧応動装置

Country Status (1)

Country Link
JP (1) JPS58151362U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS58151362U (ja) 1983-10-11

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