JPS6262300B2 - - Google Patents
Info
- Publication number
- JPS6262300B2 JPS6262300B2 JP54137462A JP13746279A JPS6262300B2 JP S6262300 B2 JPS6262300 B2 JP S6262300B2 JP 54137462 A JP54137462 A JP 54137462A JP 13746279 A JP13746279 A JP 13746279A JP S6262300 B2 JPS6262300 B2 JP S6262300B2
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- sample
- pass
- samples
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012360 testing method Methods 0.000 claims description 19
- 238000001514 detection method Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000011156 evaluation Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13746279A JPS5661659A (en) | 1979-10-24 | 1979-10-24 | Device for testing and evaluation of semiconductor integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13746279A JPS5661659A (en) | 1979-10-24 | 1979-10-24 | Device for testing and evaluation of semiconductor integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5661659A JPS5661659A (en) | 1981-05-27 |
| JPS6262300B2 true JPS6262300B2 (en, 2012) | 1987-12-25 |
Family
ID=15199163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13746279A Granted JPS5661659A (en) | 1979-10-24 | 1979-10-24 | Device for testing and evaluation of semiconductor integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5661659A (en, 2012) |
-
1979
- 1979-10-24 JP JP13746279A patent/JPS5661659A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5661659A (en) | 1981-05-27 |
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