JPS6260749A - 可撓性支持体の除塵方法及び装置 - Google Patents
可撓性支持体の除塵方法及び装置Info
- Publication number
- JPS6260749A JPS6260749A JP60200662A JP20066285A JPS6260749A JP S6260749 A JPS6260749 A JP S6260749A JP 60200662 A JP60200662 A JP 60200662A JP 20066285 A JP20066285 A JP 20066285A JP S6260749 A JPS6260749 A JP S6260749A
- Authority
- JP
- Japan
- Prior art keywords
- support
- rod member
- rod
- slit
- deposits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims abstract description 25
- 239000000758 substrate Substances 0.000 title abstract 7
- 230000001681 protective effect Effects 0.000 title 1
- 239000002904 solvent Substances 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 238000012546 transfer Methods 0.000 claims description 5
- 230000003746 surface roughness Effects 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 abstract description 18
- 238000004140 cleaning Methods 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract 6
- 239000011248 coating agent Substances 0.000 description 14
- 238000000576 coating method Methods 0.000 description 14
- 238000005192 partition Methods 0.000 description 7
- 239000004745 nonwoven fabric Substances 0.000 description 5
- -1 polyethylene terephthalate Polymers 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 235000010724 Wisteria floribunda Nutrition 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- 229920001747 Cellulose diacetate Polymers 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 241000286209 Phasianidae Species 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60200662A JPS6260749A (ja) | 1985-09-12 | 1985-09-12 | 可撓性支持体の除塵方法及び装置 |
| US06/901,500 US4944808A (en) | 1985-09-12 | 1986-08-28 | Method of removing particles from a flexible support, and apparatus for practicing same |
| US07/068,294 US4887623A (en) | 1985-09-12 | 1987-07-01 | Apparatus for removing particles from a flexible support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60200662A JPS6260749A (ja) | 1985-09-12 | 1985-09-12 | 可撓性支持体の除塵方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6260749A true JPS6260749A (ja) | 1987-03-17 |
| JPH0550419B2 JPH0550419B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-29 |
Family
ID=16428135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60200662A Granted JPS6260749A (ja) | 1985-09-12 | 1985-09-12 | 可撓性支持体の除塵方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6260749A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5995318A (en) * | 1996-09-20 | 1999-11-30 | Fujitsu Limited | Head positioning control system for disk drives each formed by assembling disks after servo control information is written externally on respective disks and disk drive |
| US6496322B1 (en) | 1996-06-10 | 2002-12-17 | Fujitsu Limited | Head position control for a disk drive which performs recording about the rotational center even if the recorded servo information is eccentric |
| US6503332B1 (en) | 1999-07-29 | 2003-01-07 | Fuji Photo Film Co., Ltd. | Web particle removal method and apparatus |
| US6506442B2 (en) | 1998-08-11 | 2003-01-14 | Fuji Photo Film Co., Ltd. | Method for producing magnetic recording medium |
| CN109604195A (zh) * | 2018-12-12 | 2019-04-12 | 深圳市华星光电半导体显示技术有限公司 | 一种用于溅镀载具的清洁装置 |
| WO2024004473A1 (ja) | 2022-07-01 | 2024-01-04 | 東レ株式会社 | 被膜剥離機構および被膜剥離装置 |
-
1985
- 1985-09-12 JP JP60200662A patent/JPS6260749A/ja active Granted
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6496322B1 (en) | 1996-06-10 | 2002-12-17 | Fujitsu Limited | Head position control for a disk drive which performs recording about the rotational center even if the recorded servo information is eccentric |
| US5995318A (en) * | 1996-09-20 | 1999-11-30 | Fujitsu Limited | Head positioning control system for disk drives each formed by assembling disks after servo control information is written externally on respective disks and disk drive |
| US6506442B2 (en) | 1998-08-11 | 2003-01-14 | Fuji Photo Film Co., Ltd. | Method for producing magnetic recording medium |
| US6503332B1 (en) | 1999-07-29 | 2003-01-07 | Fuji Photo Film Co., Ltd. | Web particle removal method and apparatus |
| CN109604195A (zh) * | 2018-12-12 | 2019-04-12 | 深圳市华星光电半导体显示技术有限公司 | 一种用于溅镀载具的清洁装置 |
| WO2024004473A1 (ja) | 2022-07-01 | 2024-01-04 | 東レ株式会社 | 被膜剥離機構および被膜剥離装置 |
| KR20250026763A (ko) | 2022-07-01 | 2025-02-25 | 도레이 카부시키가이샤 | 피막 박리 기구 및 피막 박리 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0550419B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |