JPS6260281A - Magnetoresistance effect element - Google Patents
Magnetoresistance effect elementInfo
- Publication number
- JPS6260281A JPS6260281A JP60200138A JP20013885A JPS6260281A JP S6260281 A JPS6260281 A JP S6260281A JP 60200138 A JP60200138 A JP 60200138A JP 20013885 A JP20013885 A JP 20013885A JP S6260281 A JPS6260281 A JP S6260281A
- Authority
- JP
- Japan
- Prior art keywords
- coating film
- film
- meniscus
- ferromagnetic thin
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000694 effects Effects 0.000 title description 7
- 239000010408 film Substances 0.000 claims abstract description 75
- 239000011248 coating agent Substances 0.000 claims abstract description 55
- 238000000576 coating method Methods 0.000 claims abstract description 55
- 239000010409 thin film Substances 0.000 claims abstract description 29
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 27
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 239000011368 organic material Substances 0.000 claims abstract description 8
- 230000001681 protective effect Effects 0.000 claims description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000001514 detection method Methods 0.000 abstract description 8
- 229910010272 inorganic material Inorganic materials 0.000 abstract description 6
- 239000011147 inorganic material Substances 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 229920001721 polyimide Polymers 0.000 abstract description 3
- 239000002966 varnish Substances 0.000 abstract description 3
- 238000009751 slip forming Methods 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000004642 Polyimide Substances 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 229920000728 polyester Polymers 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 230000005499 meniscus Effects 0.000 description 13
- 230000005291 magnetic effect Effects 0.000 description 10
- 239000000696 magnetic material Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 6
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Hall/Mr Elements (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、例えば、モータのロータ位置検出等に用いら
れる磁気抵抗効果素子に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetoresistive element used, for example, in detecting the rotor position of a motor.
（従来の技術）
例えば、モータにおいては、ロータの回転位置を検出す
るために、ロータの回転位置情報を磁気的に記録した磁
性体をロータに配置し、この磁性体に磁気抵抗効果素子
を対向配置してこの磁気抵抗効果素子の出力からロータ
の回転位置信号を取り出すようにしたものがある。(Prior art) For example, in a motor, in order to detect the rotational position of the rotor, a magnetic body that magnetically records rotor rotational position information is placed on the rotor, and a magnetoresistive element is placed opposite to this magnetic body. There is a device in which a rotor rotational position signal is extracted from the output of this magnetoresistive effect element.
上記磁気抵抗効果素子の従来例として第９図に示されて
いるようなものがある。第９図において、ガラス等によ
って作られた基板１上には強磁性薄膜２でなる感受部２
ａと端子部２ｂが形成され、その上に端子部２ｂを残し
感受部２ａを覆うようにして、ＳｉＯ又は５ｉ０２等の
無機材料でなる保護膜３が形成されている。この保護膜
３の上にはさらにポリエステル系又はポリイミド系樹脂
のフェス等の有機材料でなる塗膜４が形成されている。A conventional example of the above-mentioned magnetoresistive element is shown in FIG. In FIG. 9, a sensing section 2 made of a ferromagnetic thin film 2 is placed on a substrate 1 made of glass or the like.
A and a terminal portion 2b are formed, and a protective film 3 made of an inorganic material such as SiO or 5i02 is formed thereon so as to leave the terminal portion 2b and cover the sensing portion 2a. A coating film 4 made of an organic material such as a polyester or polyimide resin face is further formed on the protective film 3.
上記強磁性薄膜２の端子部２ｂにはリード線５の端部の
導線が半田付けされ、この半田付は部６は樹脂７によっ
て固定され封止されている。A conductive wire at the end of a lead wire 5 is soldered to the terminal portion 2b of the ferromagnetic thin film 2, and the soldered portion 6 is fixed and sealed with a resin 7.
特開昭５７−９５６８７号公報記載のものは上記従来例
に該当するものであり、無機材料でなる保護膜３にピン
ホール等が発生しても、その部分を流動性に富む有機材
料でなる塗膜４が補うため、内部の強磁性薄膜を外部環
境から有効に保護することができるという効果を奏する
。The device described in JP-A No. 57-95687 corresponds to the above-mentioned conventional example, and even if a pinhole or the like occurs in the protective film 3 made of an inorganic material, that part is made of an organic material with high fluidity. Since the coating film 4 compensates for this, it is possible to effectively protect the internal ferromagnetic thin film from the external environment.
（発明が解決しようとする問題点）
上記の如き従来の磁気抵抗効果素子における有機塗膜は
、一般に印刷又は塗布によって形成されるが、印刷又は
塗布によって有機塗膜が形成される際に、第９図に示さ
れているように、有機塗膜４の周囲のエツジ部分が表面
張力により盛り上がってメニスカス部４ａを生ずる。(Problems to be Solved by the Invention) The organic coating film in the conventional magnetoresistive element as described above is generally formed by printing or coating. As shown in FIG. 9, the peripheral edge portion of the organic coating film 4 bulges due to surface tension to form a meniscus portion 4a.
一方、磁気抵抗効果素子によｊっで磁性体を感度良く検
出するためには、磁気抵抗効果素子と磁性体とのギヤツ
ブを例えば０．１ｍｍ以下というように極めて小さくす
る必要がある。On the other hand, in order to detect a magnetic body with high sensitivity using a magnetoresistive element, it is necessary to make the gear between the magnetoresistive element and the magnetic body extremely small, for example, 0.1 mm or less.
しかし、上記従来の磁気抵抗効果素子のように有機塗膜
４の周囲にメニスカス部４ａがあると、モータのロータ
等に取付けられた磁性体に対して磁気抵抗効果素子を対
向配置しようとする場合に、上記メニスカス部４ａと磁
性体との間にギャップを形成しなければならず、磁性体
と磁気抵抗効果素子とのギャップが実質的に大きくなっ
てしまい、磁気抵抗効果素子による磁性体の検出感度が
低下するという不具合を生ずる。However, if there is a meniscus portion 4a around the organic coating film 4 as in the conventional magnetoresistive element described above, when the magnetoresistive element is placed opposite to a magnetic body attached to a motor rotor, etc. In addition, a gap must be formed between the meniscus portion 4a and the magnetic material, and the gap between the magnetic material and the magnetoresistive element becomes substantially large, making it difficult for the magnetoresistive element to detect the magnetic material. This results in a problem of decreased sensitivity.
本発明の目的は、有機材料でなる塗膜を無機材料でなる
保護膜と共に重層した磁気抵抗効果素子において、磁性
体との間のギャップを、例えば、０．１ｍｍ以下という
ように極めて小さくすることが可能な磁気抵抗効果素子
を提供することにある。It is an object of the present invention to provide a magnetoresistive element in which a coating film made of an organic material is layered with a protective film made of an inorganic material, in which the gap between the film and the magnetic material is extremely small, for example, 0.1 mm or less. The object of the present invention is to provide a magnetoresistive element capable of
（問題点を解決するための手段）
本発明は、基板に強磁性薄膜でなる感受部と端子部を形
成し、上記感受部に保護膜を被着すると共に、この保護
膜上に有機材料でなる塗膜を重層してなる磁気抵抗効果
素子において、塗膜形成時における塗膜のエツジ部を上
記端子部側に配置すると共に、上記塗膜の各エツジ部の
うち上記端子部側に配置されたエツジ部を除く他のエツ
ジ部は、塗膜形成時におけるエツジ部を切除して形成し
たことを特徴とする
（作用）
保護膜上に有機材料で重層して形成された塗膜の同塗膜
形成時におけるメニスカス状のエツジ部は、強磁性薄膜
でなる端子部においてのみ残され、他は切除されている
ため、強磁性薄膜でなる感受部の膜厚はメニスカス部が
ない分だけ薄くなり、上記感受部を磁性体に近接させて
配置することができる。(Means for Solving the Problems) The present invention forms a sensing part and a terminal part made of a ferromagnetic thin film on a substrate, covers the sensing part with a protective film, and coats the protective film with an organic material. In a magnetoresistive element formed by layering coating films, an edge portion of the coating film at the time of coating film formation is placed on the terminal portion side, and each edge portion of the coating film is placed on the terminal portion side. The other edge parts except for the edge part are characterized by being formed by cutting out the edge part at the time of coating film formation (function). The meniscus-shaped edge part during film formation is left only in the terminal part made of the ferromagnetic thin film, and is removed in the other parts, so the film thickness of the sensing part made of the ferromagnetic thin film is thinned by the absence of the meniscus part. , the sensing section can be placed close to the magnetic material.
（実施例）
第１図において、ガラス等で作られた基板１１上には強
磁性薄膜１２によって感受部１２ａと端子部１２ｂが連
続して形成されている。強磁性薄膜１２の上には、端子
部１２ｂを除き、感受部１２ａを覆うようにしてＳｉＯ
又はＳ＋０２等の無機材料でなる保護膜１３が形成され
ている。この保護膜１３の上にはさらにポリエステル系
又はポリイミド系樹脂のワニス等の有機材料でなる塗膜
１４が形成されている。塗膜１４の周囲のエツジ部は表
面張力によりメニスカス部１４ａが出来て他の部分より
も膜厚が厚くなっているが、塗膜１４の塗膜形成時にお
ける周囲のエツジ部は、強磁性薄膜１２でなる端子部１
２ｂ側のエツジ部を除く他のエツジ部が切除され、感受
部１２ａ上の塗膜１４の膜厚は薄くなっている。(Example) In FIG. 1, a sensing part 12a and a terminal part 12b are continuously formed by a ferromagnetic thin film 12 on a substrate 11 made of glass or the like. SiO is deposited on the ferromagnetic thin film 12 so as to cover the sensing part 12a except for the terminal part 12b.
Alternatively, a protective film 13 made of an inorganic material such as S+02 is formed. A coating film 14 made of an organic material such as polyester or polyimide resin varnish is further formed on the protective film 13. The peripheral edges of the coating film 14 form meniscus parts 14a due to surface tension, and are thicker than other parts, but when the coating film 14 is formed, the peripheral edges are formed by a ferromagnetic thin film. Terminal part 1 consisting of 12
The edge portions other than the edge portion on the side 2b are removed, and the thickness of the coating film 14 on the sensing portion 12a is reduced.
強磁性薄膜１２でなる端子部１２ｂにはリード線１５の
端部の導線が半田付けされてリード線１５を介し検出信
号が出力されるようになっている。リード線１５の半田
付は部１６は樹脂１７によって固定されると共に封止さ
れている。A conductive wire at the end of a lead wire 15 is soldered to the terminal portion 12b made of the ferromagnetic thin film 12, so that a detection signal is outputted via the lead wire 15. The soldered portion 16 of the lead wire 15 is fixed and sealed with a resin 17.
上記の如き磁気抵抗効果素子によれば、有機塗膜１４の
膜厚は、強磁性薄膜１２でなる端子部１２ｂ側のエツジ
部のみがメニスカス部１４ａによって厚くなっており、
このメニスカス部１４ａを除（他の部分、即ち強磁性薄
膜１２でなる感受部１２ａを覆う部分１４ｂは薄くなっ
ているため、例えば、第７図に示されているように、モ
ータのロータ１８の周面に配置された磁性体に対して感
受部のみを対向させ、端子部のメニスカス部１４ａを上
記磁性体の位置からずらして配置することにより、上記
感受部を磁性体に近接して配置することが可能になり、
もって、磁気抵抗効果素子による磁性体の検出感度及び
検出精度を向上させることができる。According to the magnetoresistive element as described above, the thickness of the organic coating film 14 is thickened only at the edge portion on the terminal portion 12b side made of the ferromagnetic thin film 12 due to the meniscus portion 14a,
Except for this meniscus portion 14a (other portions, that is, the portion 14b that covers the sensing portion 12a made of the ferromagnetic thin film 12) is thin, for example, as shown in FIG. By arranging only the sensing portion to face the magnetic material arranged on the circumferential surface and arranging the meniscus portion 14a of the terminal portion offset from the position of the magnetic material, the sensing portion is placed close to the magnetic material. It becomes possible to
Accordingly, the detection sensitivity and detection accuracy of a magnetic body by the magnetoresistive element can be improved.
なお、例えば、モータのロータの平面周縁部に磁性体が
配置されているときは、第８図に示されているように、
磁気抵抗効果素子の感受部のみをロータ１８の平面周縁
部の磁性体に対向配置して、端子部側のメニスカス部１
４ａを上記磁性体からずらすごとにより、第７図の場合
と同様の効果をｉ与ることができる。Note that, for example, when a magnetic material is arranged on the planar peripheral edge of the rotor of the motor, as shown in FIG.
Only the sensing part of the magnetoresistive element is arranged to face the magnetic material on the flat peripheral part of the rotor 18, and the meniscus part 1 on the terminal part side is
By shifting 4a from the magnetic body, the same effect as in the case of FIG. 7 can be obtained.
次に、本発明に係る磁気抵抗効果素子の製造方法の例に
ついて説明する。Next, an example of a method for manufacturing a magnetoresistive element according to the present invention will be described.
第２図及び第３図に示されているように、ガラス等で作
られた基板１１の一方の面に、まず、Ｆｅ−Ｎｉ又はＮ
ｉ−Ｃｏ等でなる強磁性薄膜１２を所定のパターンで蒸
着等により多数形成する。強磁性薄膜１２は感受部１２
ａと端子部］、２ｂからなり、一つの列をなす強磁性薄
膜群とこれに隣り合う別の列をなず強磁性薄膜群とを対
にし、この対をなす強磁性薄膜群は感受部１２ａを互い
に対向させて背中合わせ状に配置する。上記対をなす強
磁性薄膜群の上には端子部１２ｂ側を残してＳｉＯ又は
５ｉ０２等の無機材料でなる保護膜１３を蒸着等によっ
て形成する。従って、対をなす強磁性薄膜群の感受部１
２ａは保護膜１３によって完全に覆われる。As shown in FIGS. 2 and 3, Fe-Ni or N is first applied to one surface of a substrate 11 made of glass or the like.
A large number of ferromagnetic thin films 12 made of i-Co or the like are formed in a predetermined pattern by vapor deposition or the like. The ferromagnetic thin film 12 is the sensing part 12
a and the terminal part], and 2b, one row of ferromagnetic thin film groups and another row of adjacent ferromagnetic thin film groups are paired, and this pair of ferromagnetic thin film groups is the sensing part. 12a are arranged back to back, facing each other. A protective film 13 made of an inorganic material such as SiO or 5i02 is formed by vapor deposition on the pair of ferromagnetic thin films, leaving the terminal portion 12b side intact. Therefore, the sensing portion 1 of the paired ferromagnetic thin film group
2a is completely covered with the protective film 13.
次に、第４図及び第５図に示されているように保護膜１
３の上にエポキシ樹脂塗料等の有機材料でなる塗膜１４
を印刷又は塗布等によって形成する。Next, as shown in FIGS. 4 and 5, the protective film 1 is
A coating film 14 made of an organic material such as epoxy resin paint is applied on top of 3.
is formed by printing or coating.
塗膜１４の厚さは５μｍ以上とする。塗膜１４を印刷で
形成する場合は、印刷板のスクリーン部分の大きさ及び
形状は保護膜１３よりやや小さいが又は同じとする。塗
膜１４を形成したのちこれを乾燥硬化させるが、その間
に塗膜１４の周囲のエツジ部に表面張力によりメニスカ
ス部が出来る。The thickness of the coating film 14 is 5 μm or more. When the coating film 14 is formed by printing, the size and shape of the screen portion of the printing plate are slightly smaller than or the same as the protective film 13. After the coating film 14 is formed, it is dried and cured, during which time a meniscus portion is formed around the edges of the coating film 14 due to surface tension.
塗膜１４が硬化したのち、基板１１諸共ダイシング等に
より切断して一つ一つの磁気抵抗効果素子とする。第４
図及び第５図の一点鎖線は切断線を示しており、第６図
は切断時の様子を示す。切断に当たっては、まず、基板
１１の第４図における左右両側縁部を切断し、塗膜形成
時における塗膜１４のエツジ部のうち端子部１２ｂ側に
対し直角をなす側部のエツジ部を除去して、同エツジ部
に出来ていたメニスカス部を除去する。次に、第４図に
おける左右方向の線に沿って一つの強磁性薄膜列ごとに
切断分離する。これにより、第６図に示されているよう
に、端子部１２ｂに対し反対側のエツジ部における塗膜
１４が平坦状になって塗膜１４形成時におけるメニスカ
ス状のエツジ部が除去された形になる。次に、各強磁性
薄膜１２の両側方の線に沿って切断し個々の強磁性薄膜
１２ごとに切断分離する。After the coating film 14 is cured, the substrate 11 is cut into individual magnetoresistive elements by dicing or the like. Fourth
The dashed-dotted line in the figures and FIG. 5 shows the cutting line, and FIG. 6 shows the state at the time of cutting. When cutting, first cut the left and right edges of the substrate 11 in FIG. 4, and remove the edge portions of the coating film 14 at right angles to the terminal portion 12b side during coating film formation. Then, remove the meniscus formed at the edge. Next, each ferromagnetic thin film row is cut and separated along the horizontal line in FIG. As a result, as shown in FIG. 6, the coating film 14 at the edge portion on the opposite side to the terminal portion 12b becomes flat, and the meniscus-shaped edge portion when the coating film 14 was formed is removed. become. Next, each ferromagnetic thin film 12 is cut along lines on both sides to separate each ferromagnetic thin film 12.
これにより強磁性薄膜１２の両側方のエツジ部における
塗膜１４も平坦状になって塗膜１４形成時におけるメニ
スカス状のエツジ部が除去された形になる。As a result, the coating film 14 at the edge portions on both sides of the ferromagnetic thin film 12 also becomes flat, and the meniscus-shaped edge portions formed when the coating film 14 was formed are removed.
上記の如き方法によって製造された磁気抵抗効果素子に
よれば、第１図及び第６図に示されているように、塗膜
１４形成時における塗膜１４のメニスカス状のエツジ部
１４ａは、強磁性薄膜１２による端子部１２ｂにのみ残
存し、強磁性薄膜１２の感受部１２ａに対応する塗膜１
４の部分１４ｂのエツジ部には塗膜１４形成時における
メニスカス状のエツジ部は存在せず、前述の如き効果を
奏する磁気抵抗効果素子かえられる。According to the magnetoresistive element manufactured by the method described above, as shown in FIGS. 1 and 6, the meniscus-shaped edge portion 14a of the coating film 14 when the coating film 14 is formed is strong. The coating film 1 remains only on the terminal portion 12b of the magnetic thin film 12 and corresponds to the sensing portion 12a of the ferromagnetic thin film 12.
In the edge portion of the portion 14b of No. 4, there is no meniscus-shaped edge portion when the coating film 14 is formed, and a magnetoresistive effect element having the above-mentioned effect is replaced.
塗膜１４を形成する場合、ディップ又は刷毛塗り等によ
って形成しようとすると膜厚を均一にすることが困難で
あり、素子取付は時のギャップ精度を高めることが困難
である。その点、印刷によって塗膜１４を形成すれば、
膜厚を均一にすることが容易であり、素子取付は時のギ
ャップ精度を向上させることができるし、印刷形成され
た塗膜１４のエツジ部にメニスカス部が出来ても、上記
の如く感受部における塗膜のエツジ部のメニスカス部を
除去して感受部の塗膜の膜厚を均一にすることができる
から、高いギャップ精度をうろことができる。また、有
機塗膜１４を形成することにより、リード線１５の端部
の封止のための樹脂の塗布位置が明確になって有効態受
部寸法を大きくすることができ、さらに、塗膜１４の端
子部１２ｂ側のメニスカス部１４ａがあるため、封止剤
の感受部への流出を防止することができる。When forming the coating film 14 by dipping or brush coating, it is difficult to make the film thickness uniform, and it is difficult to improve the gap accuracy when mounting the elements. On the other hand, if the coating film 14 is formed by printing,
It is easy to make the film thickness uniform, and it is possible to improve the gap accuracy when mounting the element. Since the meniscus portion at the edge of the coating film can be removed to make the thickness of the coating film on the sensitive area uniform, high gap accuracy can be achieved. In addition, by forming the organic coating film 14, the position of applying the resin for sealing the end of the lead wire 15 becomes clear, and the size of the effective receiving part can be increased.Furthermore, the coating film 14 Since there is a meniscus portion 14a on the side of the terminal portion 12b, it is possible to prevent the sealant from flowing out to the sensing portion.
なお、第２図乃至第６図に示した製造方法は一つの例で
あって、最終的に特許請求の範囲記載の如き磁気抵抗効
果素子が得られる方法であれば、他の製造方法であって
も差支えなく、例えば、当初から一つ一つの磁気抵抗効
果素子ごとに製造工程を進行し、最後に端子部側の塗膜
のメニスカス状エツジ部を残して塗膜の他のメニスカス
状エツジ部を切除するようにしてもよい。また、本発明
に係る磁気抵抗効果素子は、モータのローフ位置検出の
みでなく、その他の磁気検出用として用いることができ
る。Note that the manufacturing method shown in FIGS. 2 to 6 is one example, and other manufacturing methods may be used as long as the method ultimately yields the magnetoresistive element as described in the claims. For example, the manufacturing process is carried out for each magnetoresistive element one by one from the beginning, and at the end, the meniscus-shaped edge part of the coating film on the terminal side is left and the other meniscus-shaped edge parts of the coating film are processed. You may also remove it. Further, the magnetoresistive element according to the present invention can be used not only for detecting the loaf position of a motor but also for other magnetic detection purposes.
（発明の効果）
効果素子において、上記塗膜形成時におけるメニスカス
状のエツジ部を上記端子部側にのみ残して他のメニスカ
ス状のエツジ部を切除したため、検出しようとする磁性
体に対して感受部を、例えば０．１ｍｍ以下の極めて小
さなギヤツブをおいて配置することが可能になり、検出
感度及び検出精度を高めることが可能な磁気抵抗効果素
子を提供することができる。(Effects of the Invention) In the effect element, the meniscus-shaped edge portion formed during the coating film formation was left only on the terminal portion side, and the other meniscus-shaped edge portions were removed, making it less sensitive to the magnetic substance to be detected. It becomes possible to arrange the parts with extremely small gears of, for example, 0.1 mm or less, and it is possible to provide a magnetoresistive element that can improve detection sensitivity and detection accuracy.
第１図は本発明に係る磁気抵抗効果素子の実施例を示す
縦断面図、第２図は本発明にかかる磁気抵抗効果素子の
製造方法の一工程の例を示す平面図、第３図は同上拡大
断面図、第４図は上記製造方法の別の工程の例を示す平
面図、第５図は同上拡大断面図、第６図は上記製造方法
のさらに別の工程の例を示す拡大断面図、第７図は本発
明に係る磁気抵抗効果素子の使用例を示す側面図、第８
図は同じ（別の使用例を示す側面図、第９図は従来の磁
気抵抗効果素子の例を示す縦断面図である。
１１一基板、 １２−強磁性薄膜、 １２ａ −感受部
、１２ｂ 一端子部、 １３−保護膜、 １４−塗膜、
１４ａ −塗膜形成時におけるエツジ部。FIG. 1 is a longitudinal cross-sectional view showing an embodiment of the magnetoresistive element according to the present invention, FIG. 4 is a plan view showing an example of another step in the above manufacturing method; FIG. 5 is an enlarged sectional view same as the above; FIG. 6 is an enlarged sectional view showing an example of still another step in the above manufacturing method. FIG. 7 is a side view showing an example of use of the magnetoresistive element according to the present invention, and FIG.
The figures are the same (a side view showing another usage example, and FIG. 9 is a vertical cross-sectional view showing an example of a conventional magnetoresistive element. 11-substrate, 12-ferromagnetic thin film, 12a-sensing section, 12b- Terminal part, 13-protective film, 14-coating film,
14a - Edge portion during coating film formation.
Claims (1)
感受部に保護膜を被着すると共に、この保護膜上に有機
材料でなる塗膜を重層してなる磁気抵抗効果素子におい
て、塗膜形成時における塗膜のエッジ部を上記端子部側
に配置すると共に、上記塗膜の各エッジ部のうち上記端
子部側に配置されたエッジ部を除く他のエッジ部は、塗
膜形成時におけるエッジ部を切除して形成したことを特
徴とする磁気抵抗効果素子。In a magnetoresistive element, a sensing part and a terminal part made of a ferromagnetic thin film are formed on a substrate, a protective film is applied to the sensing part, and a coating film made of an organic material is layered on the protective film, The edge portion of the coating film at the time of coating film formation is placed on the terminal portion side, and the other edge portions of each edge portion of the coating film other than the edge portion placed on the terminal portion side are 1. A magnetoresistive element characterized in that it is formed by cutting out an edge portion at the time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60200138A JPS6260281A (en) | 1985-09-10 | 1985-09-10 | Magnetoresistance effect element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60200138A JPS6260281A (en) | 1985-09-10 | 1985-09-10 | Magnetoresistance effect element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6260281A true JPS6260281A (en) | 1987-03-16 |
| JPH0319715B2 JPH0319715B2 (en) | 1991-03-15 |
Family
ID=16419423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60200138A Granted JPS6260281A (en) | 1985-09-10 | 1985-09-10 | Magnetoresistance effect element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6260281A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03135781A (en) * | 1989-10-20 | 1991-06-10 | Matsushita Electric Ind Co Ltd | Production of magnetic sensor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5917290A (en) * | 1982-07-20 | 1984-01-28 | Canon Inc | Magnetic sensor |
-
1985
- 1985-09-10 JP JP60200138A patent/JPS6260281A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5917290A (en) * | 1982-07-20 | 1984-01-28 | Canon Inc | Magnetic sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03135781A (en) * | 1989-10-20 | 1991-06-10 | Matsushita Electric Ind Co Ltd | Production of magnetic sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0319715B2 (en) | 1991-03-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4418372A (en) | Magnetic rotary encoder | |
| JPS6260281A (en) | Magnetoresistance effect element | |
| JP3122712B2 (en) | Magnetic encoder and method of manufacturing the same | |
| WO1998041980A3 (en) | Improved magnetoresistive read sensor and method of fabricating a magnetoresistive read sensor | |
| JPS6311672Y2 (en) | ||
| JPS562675A (en) | Solid state color image sensor chip | |
| US4801881A (en) | Magnetoresistive sensor having protective dummy elements | |
| JP2651808B2 (en) | Magnetic sensor | |
| JPS61201486A (en) | Magnetic sensor | |
| JPH03282368A (en) | Magnetic sensor | |
| JPS5637507A (en) | Revolution sensor | |
| JPH02174277A (en) | Magnetic sensor and its manufacture | |
| JPH02125679A (en) | Magnetoresistance element | |
| JPS593716A (en) | Thin film magnetic head | |
| JPH02239675A (en) | Magnetic sensor and manufacture thereof | |
| JPS60102780A (en) | Magneto-resistance element | |
| JPS5933891A (en) | Magneto-resistance effect type magnetic sensor | |
| JPS62263680A (en) | Magnetic sensor | |
| KR100207653B1 (en) | Pyroelectric infrared sensor and fabricating method of the same | |
| JP2586915B2 (en) | Magnetic detector | |
| JPH03240203A (en) | Magnetoresistance element | |
| JPS6373114A (en) | Magnetic sensor | |
| JPH08236835A (en) | Magnetoelectric conversion element and its manufacture | |
| JPH04276670A (en) | Magnetic sensor | |
| JPH09159485A (en) | Magnetic encoder |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |