JPH03135781A - Production of magnetic sensor - Google Patents
Production of magnetic sensorInfo
- Publication number
- JPH03135781A JPH03135781A JP1274175A JP27417589A JPH03135781A JP H03135781 A JPH03135781 A JP H03135781A JP 1274175 A JP1274175 A JP 1274175A JP 27417589 A JP27417589 A JP 27417589A JP H03135781 A JPH03135781 A JP H03135781A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- sensor
- thin film
- substrate
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 239000011248 coating agent Substances 0.000 claims abstract description 12
- 238000000576 coating method Methods 0.000 claims abstract description 12
- 239000006247 magnetic powder Substances 0.000 claims abstract description 10
- 239000010409 thin film Substances 0.000 claims abstract description 10
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 abstract description 15
- 230000001070 adhesive effect Effects 0.000 abstract description 14
- 229920005989 resin Polymers 0.000 abstract description 4
- 239000011347 resin Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 abstract 1
- 239000005011 phenolic resin Substances 0.000 abstract 1
- 229920001568 phenolic resin Polymers 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 8
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical group N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000003973 paint Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910003266 NiCo Inorganic materials 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
- Magnetic Heads (AREA)
- Electromagnets (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、主にモータの回転速度、回転角の検知等に利
用される磁気センサーの製ノ方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method of manufacturing a magnetic sensor mainly used for detecting the rotation speed and rotation angle of a motor.
従来の技術
従来のｌ：８ ’Ｘセンサーの構造断面を第２図、第３
図に示す。Conventional technology Figures 2 and 3 show the structural cross-sections of a conventional l:8'X sensor.
As shown in the figure.
第２図に示すものは、強磁性薄膜からなるセンサーエレ
メント１を有する絶縁基板２の裏面に、接着剤３を塗布
し、固定のバイアス磁石４を前記絶縁基板２に接着、硬
化したものである。また、第３図に示すものけ、前記絶
縁基板２を樹脂成型してなるホルダー７に固着し、その
後、前記絶縁基板２の裏面に、接着剤３を塗布し、バイ
アス磁石４を接着、硬化したものである。In the device shown in FIG. 2, an adhesive 3 is applied to the back surface of an insulating substrate 2 having a sensor element 1 made of a ferromagnetic thin film, and a fixed bias magnet 4 is bonded to the insulating substrate 2 and hardened. . In addition, as shown in FIG. 3, the insulating substrate 2 is fixed to a holder 7 made of resin molding, and then an adhesive 3 is applied to the back surface of the insulating substrate 2, and a bias magnet 4 is bonded and hardened. This is what I did.
これらの磁気センサーは、強磁性薄膜の磁気抵抗効果を
利用した回転センサーであり、より検出精度のアップを
図る目的でバイアス磁石をつけているものである。These magnetic sensors are rotation sensors that utilize the magnetoresistive effect of ferromagnetic thin films, and are equipped with bias magnets to further improve detection accuracy.
発明が解決しようとする課題
第２図、第３図に示すものは、バイアス磁石４は接着剤
３により絶縁基板２に固着するが、この時充分な接着力
が必要であり、さらに出来る限り絶縁基板２に密着させ
て前述の通り、目的の精度アップ全図らなければならな
い。Problems to be Solved by the Invention In the case shown in FIGS. 2 and 3, the bias magnet 4 is fixed to the insulating substrate 2 by the adhesive 3, but sufficient adhesive force is required at this time, and the insulation is as much as possible. As mentioned above, it is necessary to bring it into close contact with the substrate 2 in order to fully improve the desired accuracy.
こういった背景にあって、接着力を増大させるために接
着剤３の塗布量増加、塗布膜厚増加が必要であり、逆に
、密着せしめるためには塗布膜厚を薄くする必要があり
、従って塗布量も少なくしなければならないという相反
する問題点があった。Against this background, in order to increase the adhesive strength, it is necessary to increase the amount of adhesive 3 applied and increase the coating film thickness, and conversely, in order to achieve close contact, it is necessary to reduce the coating film thickness. Therefore, there is a contradictory problem in that the amount of coating must also be reduced.
本発明は、このような問題を解決することを目的とする
。The present invention aims to solve such problems.
課題を解決するための手段
この目的を達成するために、木発明は、強磁性薄膜を形
成したセンサー基板の表面、又は裏面に磁性粉体を分散
させた塗料を塗布し、磁性粉体に着磁を施しつつ硬化さ
せたものである。Means for Solving the Problem In order to achieve this object, the present invention applies a paint in which magnetic powder is dispersed to the front or back surface of a sensor substrate on which a ferromagnetic thin film is formed, and the magnetic powder is attached to the surface. It is hardened while being magnetized.
作用
従来の方法では、接着剤の材料、塗布量、塗布膜厚、硬
化条件等によって接着力が変動し、さらに塗布量、塗布
膜厚等によって強磁性薄膜のセンサーエレメントにかけ
るバイアス磁界の大きさが変動していたが、本発明は、
こういった弊害を有した接着剤を用いることなく磁石と
基板とを一体化することができるので、これらの変動を
無くすことができるものである。In the conventional method, the adhesive force varies depending on the adhesive material, amount of coating, thickness of coating, curing conditions, etc. Furthermore, the magnitude of the bias magnetic field applied to the ferromagnetic thin film sensor element varies depending on the amount of coating, thickness of coating, etc. had fluctuated, but the present invention
Since the magnet and the substrate can be integrated without using adhesives that have these disadvantages, these fluctuations can be eliminated.
実施例
（実施例１）
第１図人に本発明の第１の実施例を示す。第１図人は、
本発明による磁気センサーの基板構造を示した斜視図で
ある。強磁性薄膜（ＮｉＣｏ 、ＮｉＦｅからなる）に
より形成したセンサーエレメント１を有する絶縁基板（
ガラス、セラミックからなる）２の裏面に、磁性粉体（
５ｒＦｅ 、ＢａＦｅ 、人ＩＮｉ、Ｇｏ 。Embodiment (Example 1) FIG. 1 shows a first embodiment of the present invention. Figure 1: People are
1 is a perspective view showing a substrate structure of a magnetic sensor according to the present invention. An insulating substrate (with a sensor element 1 formed of a ferromagnetic thin film (made of NiCo, NiFe))
Magnetic powder (made of glass and ceramic) 2 is coated on the back side of the
5rFe, BaFe, INi, Go.
ＳｍＣｏＢａ等からなる）を有機系塗料（フェノール１
＠脂等からなる）に所望の配分（約３０％〜９０％）を
配合し、充分に混線０分散を行った後、スクリーン印刷
にて所領の膜厚を形成する。その後、非常に強力な磁場
中に置いた状態のまま樹脂硬化を完了させる。第１図Ｂ
は、強力な磁場中で樹脂硬化している１着磁ヘッド部の
を示した説明図である。この結果、センサーエレメント
にかけるバイアス磁界を所望通り、約３００ｅ〜約１６
００６を得る事が可能となった。(consisting of SmCoBa, etc.) and an organic paint (phenol 1
After blending the desired proportion (approximately 30% to 90%) of the mixture (consisting of fat, etc.) and thoroughly dispersing the crosstalk to eliminate crosstalk, the desired film thickness is formed by screen printing. Thereafter, the resin is cured while remaining in a very strong magnetic field. Figure 1B
FIG. 1 is an explanatory diagram showing one magnetized head portion in which resin is hardened in a strong magnetic field. As a result, the bias magnetic field applied to the sensor element can be adjusted as desired from about 300e to about 16
It became possible to obtain 006.
（実施例２）
第１図Ｑ、Ｄは、多数個センサー素子を配列したセンサ
ー基板の裏面に、前記の磁性粉体入り有機系塗料を全面
塗布し、着磁しつつ硬化した基板の裏面を示した図であ
る。第１図Ｃは表面のセンサーパターンｔｙ軸に並行に
形成し、かつ着磁方向もこのｙ軸に並行に施しだもので
ある。第１図りは、菱形のパターン形成を行った表面セ
ンサーパターンに対して、４５度の着磁方向で着磁を施
したものである。そして、この基板を各センサー素子ご
とに分割し、磁気センサーを得る。第１図Ｅ、Ｆは、＠
１図Ｃで着磁した磁気センサーの磁気抵抗変化率を描い
た特性図、第１図Ｇ、Ｈは従来の接着剤を用いて磁石を
接着していた磁気センサーのものである。特性図からも
分かるように、磁気抵抗変化カーブ（ヒヌテリシスカー
ブ）のピークポイントが２箇所現れていた従来のものに
対し、本発明品はきれいな１箇所のピークポイントにお
さ１す、安定した出力かえられるようになった。(Example 2) Figure 1 Q and D show that the organic paint containing magnetic powder is applied to the entire surface of the back surface of a sensor substrate on which a large number of sensor elements are arranged, and the back surface of the substrate is hardened while being magnetized. FIG. In FIG. 1C, the sensor pattern on the front surface is formed parallel to the ty-axis, and the magnetization direction is also parallel to the y-axis. In the first diagram, a surface sensor pattern formed with a rhombus pattern is magnetized in a magnetization direction of 45 degrees. Then, this substrate is divided into each sensor element to obtain a magnetic sensor. Figure 1 E and F are @
Figure 1C is a characteristic diagram depicting the magnetoresistance change rate of the magnetized magnetic sensor, and Figures 1G and H are those of a magnetic sensor in which the magnet was bonded using a conventional adhesive. As can be seen from the characteristic diagram, compared to the conventional product where the peak points of the magnetoresistance change curve (hynuthesis curve) appeared at two locations, the product of the present invention has a stable peak point that appears at one location. The output can now be changed.
発明の効果
以上のよって木発明によれば、接着剤をなくすことによ
って接着剤に起因するバイアス磁界の変動が無くなり、
さらに信号出力を最大にすることができ、しかも安定し
た信号出力が可能となる。Effects of the Invention According to the invention, by eliminating the adhesive, fluctuations in the bias magnetic field caused by the adhesive are eliminated.
Furthermore, the signal output can be maximized, and moreover, stable signal output can be achieved.
また、接着剤の配合作業、塗布作業、マグネット接着作
業等が廃止されるため、工程合理化が可能となり、安価
な磁気センサーを提供する仁とができるものである。Furthermore, since the work of blending adhesives, coating work, magnet bonding work, etc., is eliminated, process rationalization becomes possible, and it is possible to provide inexpensive magnetic sensors.
第１図人は、本発明の一実施例により得られる磁気セン
サーの斜視図、第１図Ｂは、本発明の一実施例の磁気セ
ンサーを着磁する様子を示す説明図、第１図Ｃ，Ｄは本
発明の一実施例の磁気センサーの製造方法の説明図、第
１図Ｅ、Ｆは本発明の一実施例の磁気センサーの特性図
、第１図Ｇ。
Ｈは従来の磁気センサーの特性図、第２図、第３図は従
来の磁気センサーの断面図である。
１・・・・・・センサーエレメント、２・・・・・・絶
縁基板、４・・・・・磁石、８・・・・・・着磁ヘッド
。FIG. 1 is a perspective view of a magnetic sensor obtained according to an embodiment of the present invention, FIG. 1B is an explanatory diagram showing how the magnetic sensor according to an embodiment of the present invention is magnetized, and FIG. 1C , D are explanatory diagrams of a method for manufacturing a magnetic sensor according to an embodiment of the present invention, FIGS. 1E and F are characteristic diagrams of a magnetic sensor according to an embodiment of the present invention, and FIG. 1G. H is a characteristic diagram of a conventional magnetic sensor, and FIGS. 2 and 3 are cross-sectional views of the conventional magnetic sensor. 1... Sensor element, 2... Insulating substrate, 4... Magnet, 8... Magnetizing head.
Claims (2)
裏面に磁性粉体を分散させた塗料を塗布し、磁性粉体に
着磁を施しつつ硬化させた磁気センサーの製造方法。(1) A method for producing a magnetic sensor, in which a coating material in which magnetic powder is dispersed is applied to the front or back surface of a sensor substrate on which a ferromagnetic thin film is formed, and the magnetic powder is magnetized and cured.
るセンサー基板の表面、又は裏面に磁性粉体を塗布し、
磁性粉体に着磁を施しつつ硬化させた後、センサー基板
を個々のセンサー要素ごとに分割する磁気センサーの製
造方法。(2) Applying magnetic powder to the front or back surface of a sensor substrate having a plurality of sensor elements formed with a ferromagnetic thin film,
A method of manufacturing a magnetic sensor in which magnetic powder is magnetized and cured, and then the sensor substrate is divided into individual sensor elements.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1274175A JPH03135781A (en) | 1989-10-20 | 1989-10-20 | Production of magnetic sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1274175A JPH03135781A (en) | 1989-10-20 | 1989-10-20 | Production of magnetic sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03135781A true JPH03135781A (en) | 1991-06-10 |
Family
ID=17538080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1274175A Pending JPH03135781A (en) | 1989-10-20 | 1989-10-20 | Production of magnetic sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03135781A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004317446A (en) * | 2003-04-18 | 2004-11-11 | Asahi Kasei Electronics Co Ltd | Magnetic sensor |
| JP2008205435A (en) * | 2007-01-24 | 2008-09-04 | Fujikura Ltd | Magnetic impedance effect element |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5735565A (en) * | 1980-06-19 | 1982-02-26 | Bayer Ag | Isoindolenine derivative, synthesis thereof and use as intermediate product for dye synthesis |
| JPS5940874B2 (en) * | 1981-06-26 | 1984-10-03 | 工業技術院長 | Coal and heavy oil slurry preparation tank |
| JPS6161481A (en) * | 1984-08-31 | 1986-03-29 | Sharp Corp | Magnetoelectric converter |
| JPS6260281A (en) * | 1985-09-10 | 1987-03-16 | Sankyo Seiki Mfg Co Ltd | Magnetoresistance effect element |
| JPS6290987A (en) * | 1985-10-17 | 1987-04-25 | Matsushita Electric Ind Co Ltd | Magnetic sensor |
-
1989
- 1989-10-20 JP JP1274175A patent/JPH03135781A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5735565A (en) * | 1980-06-19 | 1982-02-26 | Bayer Ag | Isoindolenine derivative, synthesis thereof and use as intermediate product for dye synthesis |
| JPS5940874B2 (en) * | 1981-06-26 | 1984-10-03 | 工業技術院長 | Coal and heavy oil slurry preparation tank |
| JPS6161481A (en) * | 1984-08-31 | 1986-03-29 | Sharp Corp | Magnetoelectric converter |
| JPS6260281A (en) * | 1985-09-10 | 1987-03-16 | Sankyo Seiki Mfg Co Ltd | Magnetoresistance effect element |
| JPS6290987A (en) * | 1985-10-17 | 1987-04-25 | Matsushita Electric Ind Co Ltd | Magnetic sensor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004317446A (en) * | 2003-04-18 | 2004-11-11 | Asahi Kasei Electronics Co Ltd | Magnetic sensor |
| JP2008205435A (en) * | 2007-01-24 | 2008-09-04 | Fujikura Ltd | Magnetic impedance effect element |
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