JPS6373114A - Magnetic sensor - Google Patents
Magnetic sensorInfo
- Publication number
- JPS6373114A JPS6373114A JP21857086A JP21857086A JPS6373114A JP S6373114 A JPS6373114 A JP S6373114A JP 21857086 A JP21857086 A JP 21857086A JP 21857086 A JP21857086 A JP 21857086A JP S6373114 A JPS6373114 A JP S6373114A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- pattern
- protective film
- magnetic sensor
- sensor according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 45
- 239000000463 material Substances 0.000 claims abstract description 11
- 239000003302 ferromagnetic material Substances 0.000 claims abstract description 6
- 229910010272 inorganic material Inorganic materials 0.000 claims abstract description 6
- 239000011147 inorganic material Substances 0.000 claims abstract description 6
- 239000012811 non-conductive material Substances 0.000 claims abstract description 5
- 230000001681 protective effect Effects 0.000 claims description 29
- 239000011521 glass Substances 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims description 2
- 229910018106 Ni—C Inorganic materials 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 28
- 238000001514 detection method Methods 0.000 abstract description 9
- 239000000758 substrate Substances 0.000 abstract description 7
- 239000010409 thin film Substances 0.000 abstract description 4
- 230000002093 peripheral effect Effects 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 230000005389 magnetism Effects 0.000 abstract 2
- 230000001012 protector Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 7
- 239000011888 foil Substances 0.000 description 3
- 229910000889 permalloy Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910017709 Ni Co Inorganic materials 0.000 description 1
- 229910003267 Ni-Co Inorganic materials 0.000 description 1
- 229910003262 Ni‐Co Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分輝〕
本発明は磁界中において電気抵抗が変化する所謂磁気抵
抗効果を利用して電気信号に変換し1位置検出等を行う
磁気センサの改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Applications] The present invention relates to an improvement in a magnetic sensor that utilizes the so-called magnetoresistive effect in which electrical resistance changes in a magnetic field to convert it into an electrical signal and detect a single position. It is something.
近年OA、FAの分野においては、高精度の位置センサ
若しくは回転センサが必要であり。In recent years, highly accurate position sensors or rotation sensors have become necessary in the fields of OA and FA.
NC工作機械、ロボット等の位置検出、OA機器。Position detection of NC machine tools, robots, etc., OA equipment.
VTR等に使用する各種のサーボモータ、ロータリーエ
ンコーダ等に通用されている。またOA。It is commonly used in various servo motors, rotary encoders, etc. used in VTRs, etc. Also OA.
FA技術の進展に伴い、上記センサにも高速化。With the advancement of FA technology, the speed of the above sensors has also increased.
高信頌性化の要請が高まってきている。このような状況
下において9例えば回転センサとしては従来は大半が光
学式のものを使用しているが、ホトセル、LED等の半
導体素子を構成要素としているため、温度変化に対する
安定性が不充分であると共に、構成部品数が多く、構造
が複雑であるという欠点がある。このため磁気抵抗効果
を利用した磁気式のものが開発され、検出精度が高く、
温度変化に対しても安定であるため2次第に各方面に適
用されつつある。There is a growing demand for high confidence. Under these circumstances, 9 For example, conventionally, most rotation sensors have been optical, but since they use semiconductor elements such as photocells and LEDs as components, they have insufficient stability against temperature changes. However, it also has the drawbacks of a large number of component parts and a complicated structure. For this reason, a magnetic type that utilizes the magnetoresistive effect was developed, and has high detection accuracy.
Since it is stable against temperature changes, it is gradually being applied in various fields.
第3図は上記回転センサの一例を模式的に示す斜視図で
ある。同図において1は回転ドラムであり9回転軸2の
回りに矢印方向に回転すると共に。FIG. 3 is a perspective view schematically showing an example of the rotation sensor. In the same figure, reference numeral 1 denotes a rotating drum which rotates around a rotating shaft 2 in the direction of the arrow.
回転ドラム1の外周面には例えばγ鉄等の磁性塗膜を設
けて、NS磁極が交互に出現するように着磁をする。着
磁磁極数は検出精度に対応させて数百以上を適宜選定す
る。従って磁極ピッチが極めて狭小な微小磁石を形成す
る。次に3は感磁素子であり、複数個の磁気抵抗効果素
子を表面に設け。A magnetic coating film, such as γ iron, is provided on the outer peripheral surface of the rotating drum 1, and magnetized so that NS magnetic poles appear alternately. The number of magnetized magnetic poles is appropriately selected to be several hundred or more depending on the detection accuracy. Therefore, a minute magnet with an extremely narrow magnetic pole pitch is formed. Next, 3 is a magnetic sensing element, and a plurality of magnetoresistive elements are provided on the surface.
前記回転ドラム1の磁極面と対向させ、かつ前記微小磁
石の磁界が作用する範囲内に所定の間隙を介して配設す
る。以上の構成により1回転ドラム10回転により、磁
気抵抗効果素子を設けた感磁素子3から電気信号を発す
るから2回転速度1位置の検出等を行い得るのである。It is arranged to face the magnetic pole surface of the rotary drum 1 and within a range where the magnetic field of the micromagnet acts, with a predetermined gap therebetween. With the above configuration, an electric signal is generated from the magneto-sensitive element 3 provided with the magnetoresistive element by 10 rotations of the drum, so that it is possible to detect 2 rotation speeds and 1 position.
C発明が解決しようとする問題点〕
第2図は前記第3図における感磁素子3の要部拡大断面
図であり、同一部分は第3図と同一の参照符号で示す。C Problems to be Solved by the Invention] FIG. 2 is an enlarged sectional view of a main part of the magnetic sensing element 3 in FIG. 3, and the same parts are designated by the same reference numerals as in FIG. 3.
同図においてガラス基板4上に例えばパーマロイ等の強
磁性材料の薄膜からなるパターン5を設け、その上方に
5iftからなる保護膜6およびPIQ樹脂からなる他
の保護膜7を設ける。保護膜6および7は各々パターン
5の外力による損傷および水分の浸入を防止する作用が
ある。なお磁気信号の検出精度を向上させるために、磁
極面と感磁素子との間隔を極力小さくする必要があり、
特に高分解能を要求されるものにおいてはこの間隔が特
に小さい。一般に前記間隔が100μm以下であるため
、取付位置の調整作業中に不本意に回転ドラム1と感磁
素子3とを当接させた場合には、保護膜6.7を損傷、
剥離させるのみならず、甚だしい場合には内部のパター
ン5をも損傷、断線させることがある。このため上記保
護膜6.7の上方に例えばステンレス鋼やNbなどの非
磁性材料からなる箔8を接着剤9によって貼付してパタ
ーン5の損傷を防止している。In the figure, a pattern 5 made of a thin film of a ferromagnetic material such as permalloy is provided on a glass substrate 4, and above it a protective film 6 made of 5ift and another protective film 7 made of PIQ resin are provided. The protective films 6 and 7 each have the function of preventing damage to the pattern 5 due to external forces and infiltration of moisture. In order to improve the detection accuracy of magnetic signals, it is necessary to minimize the distance between the magnetic pole surface and the magnetic sensing element.
In particular, this interval is particularly small in those requiring high resolution. Generally, the distance is 100 μm or less, so if the rotating drum 1 and the magnetic sensing element 3 are brought into contact with each other inadvertently during adjustment of the mounting position, the protective film 6.7 may be damaged.
Not only will it peel off, but in extreme cases, the internal pattern 5 may also be damaged or disconnected. For this reason, a foil 8 made of a non-magnetic material such as stainless steel or Nb is pasted with an adhesive 9 above the protective film 6.7 to prevent damage to the pattern 5.
しかしながら前記保護膜6.7の形成には長時間を要す
ると共に、更にその外方に箔8を接着剤9によって貼付
する作業は極めて煩雑であるため。However, it takes a long time to form the protective film 6.7, and furthermore, the work of pasting the foil 8 on the outside of the protective film 6.7 with the adhesive 9 is extremely complicated.
作業効率を著しく低下させるという問題点がある。There is a problem that work efficiency is significantly reduced.
また上記保護膜6,7上に更に箔8を形成していスナ+
跳Jマ々−ソζJ−M鮮Vニア1ハγ汁慌而L^閂隙が
大となり、感磁素子3の検出精度を低下させる原因とな
るという問題点がある。Further, a foil 8 is further formed on the protective films 6 and 7.
There is a problem in that the gap becomes large and causes a decrease in the detection accuracy of the magnetic sensing element 3.
本発明は上記のような従来技術に存在する問題点を解消
し9品質および検出精度が裔く、かつ構造が簡単であり
製作が極めて容易である磁気センサを提供することを目
的とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide a magnetic sensor that solves the problems existing in the prior art as described above, has high quality and detection accuracy, has a simple structure, and is extremely easy to manufacture.
上記問題点を解決するため1本発明においては。 In order to solve the above problems, one aspect of the present invention is as follows.
A9表面にNS磁極が交互に出現するように形成した磁
石体の磁界が作用する範囲内に、前記磁石体の磁極面と
対向しかつ所定の間隙を介して相対移動自在にrf!!
、硼素子を配設した磁気センサにおいて。Within the range in which the magnetic field of a magnet body formed so that NS magnetic poles appear alternately on the surface of A9 acts, the rf! !
, in a magnetic sensor equipped with a boron element.
B、非導電性材料からなる基板上に強磁性材料の薄膜か
らなるパターンを設ける。B. A pattern made of a thin film of ferromagnetic material is provided on a substrate made of non-conductive material.
C1このパターンの周縁部に非磁性無機材料からなる保
護膜を部分的に設ける。C1 A protective film made of a non-magnetic inorganic material is partially provided on the periphery of this pattern.
D、前記パターンおよび前記保護膜の上方に非透水性材
料からなる他の保護膜を設ける。D. Another protective film made of a water-impermeable material is provided above the pattern and the protective film.
という技術的手段を採用したのである。This technical method was adopted.
上記のように構成することにより、比較的機械的強度の
大なる保護膜によって1例えば回転ドラム等の接触若し
くは当接があってもパターンを保護することができる。With the above structure, the pattern can be protected by the protective film having relatively high mechanical strength even if it comes into contact with, for example, a rotating drum.
また水分の浸入に対しては。Also against moisture intrusion.
非透水性材料からなる保護膜によって完全に保護される
のである。It is completely protected by a protective membrane made of water-impermeable material.
第1図は本発明の実施例を示す要部拡大断面図であり、
同一部分は前記第2図と同一の参照符号で示す。同図に
おいて、6aはStO□からなる保護膜であり、パター
ン5の周縁部に部分的に設ける。この保護膜6aの形成
に際しては9例えばパターン5の中間部にマスキングを
施すと好都合である。また保護膜6aの厚さは、従来の
ものより若干厚く形成するのが好ましいが、あまり厚く
すると磁石体(例えば第2図における回転ドラム1)と
の間隙を大にするため好ましくなく、0.5〜20μm
とするのがよく、好ましくは3〜10μmとするのがよ
い、上記保護膜6aの厚さが0.5μm未満であると2
例えば第3図に示す回転ドラム1等の接触若しくは当接
からパターン5を保護する作用が不充分であり、一方2
0μmを越えると、磁石体との間隙を大にするため、感
度を低下させるため好ましくない。次にパターン5およ
び保護膜6aの上方には、PIQ樹脂からなる他の保護
膜7を設けて、防湿作用を付与する。FIG. 1 is an enlarged sectional view of main parts showing an embodiment of the present invention,
Identical parts are designated by the same reference numerals as in FIG. 2 above. In the figure, 6a is a protective film made of StO□, which is partially provided at the periphery of the pattern 5. When forming the protective film 6a, it is convenient to mask the middle part of the pattern 5, for example. The thickness of the protective film 6a is preferably formed slightly thicker than the conventional one, but if it is too thick, the gap between the protective film 6a and the magnet body (for example, the rotating drum 1 in FIG. 2) becomes large, which is undesirable. 5-20μm
The thickness of the protective film 6a is preferably less than 0.5 μm, preferably 3 to 10 μm.
For example, the effect of protecting the pattern 5 from contact or abutment with the rotating drum 1 etc. shown in FIG.
If it exceeds 0 μm, it is not preferable because it increases the gap with the magnet and lowers the sensitivity. Next, another protective film 7 made of PIQ resin is provided above the pattern 5 and the protective film 6a to provide a moisture-proofing effect.
次に上記構成材料の厚さ寸法を下記に示す。Next, the thickness dimensions of the above constituent materials are shown below.
ガラス基板 700μm
パーマロイパターン 0.05μm
5in、保護膜 4μm
PIQ樹脂保護膜 3μm
以上の構成により1例えば13 mX5.5 t*の外
形寸法の素子を製作し、30nφ×10fiの回転ドラ
ムと50μmの間隙を介して回転センサを組立てた結果
1作業能率が従来のものより格段に向上した。またギャ
ップ調整作業中におけるパターン5の損傷は全く発生し
なかった。Glass substrate 700μm Permalloy pattern 0.05μm 5in, protective film 4μm PIQ resin protective film 3μm With the above configuration, an element with external dimensions of, for example, 13 m x 5.5 t* is manufactured, and a gap of 50 μm is formed between it and a rotating drum of 30 nφ x 10 fi. As a result of assembling the rotation sensor through the machine, the work efficiency was significantly improved compared to the conventional one. Moreover, no damage occurred to pattern 5 during the gap adjustment work.
本実施例においては磁石体が回転ドラムである例を示し
たが、T61石体が平板状のものであってもよく、怒磁
素子と相対移動自在に配設すればよい。In this embodiment, an example is shown in which the magnet body is a rotating drum, but the T61 stone body may be in the form of a flat plate, and may be disposed so as to be movable relative to the angry magnetic element.
また基板を形成する材料はガラスのみに限定されず他の
非導電性材料若しくは電気絶縁材料であってもよい。な
お保護膜を形成する非磁性無機材料としては、SiO,
(7)他に’s i N、 A lt 03等が使用で
きる。更にパターンを形成する材料は。Further, the material forming the substrate is not limited to glass, but may be other non-conductive materials or electrically insulating materials. The non-magnetic inorganic materials forming the protective film include SiO,
(7) In addition, 's i N, Alt 03, etc. can be used. What is the material that forms the pattern?
パーマロイのようなFe−Ni系合金の他にNi−Co
系合金のような強磁性材料を使用することができる。ま
た更に防湿の目的で使用する保護膜を形成する材料は、
PIQ樹脂以外の非透水性材料が使用できることは勿論
である。In addition to Fe-Ni alloys such as permalloy, Ni-Co
Ferromagnetic materials such as alloys can be used. Furthermore, the materials forming the protective film used for the purpose of moisture proofing are:
Of course, water-impermeable materials other than PIQ resin can be used.
本発明は以上記述のような構成および作用であるから、
下記の効果を期待できる。Since the present invention has the structure and operation as described above,
You can expect the following effects.
+11 磁石体と感磁素子との間隙を大幅に縮小でき
るため、検出精度を飛躍的に向上させることができる。+11 Since the gap between the magnet body and the magnetic sensing element can be significantly reduced, detection accuracy can be dramatically improved.
(2)構造が簡単であるため1作業能率が従来のちると
比較して大幅に向上する。(2) Since the structure is simple, one-work efficiency is greatly improved compared to conventional chisels.
(3)調整作業中における断線不良等を皆無とすること
ができるため1品質および歩留共に大幅に向上する。(3) It is possible to completely eliminate defects such as wire breakage during adjustment work, so both quality and yield are significantly improved.
第1図は本発明の実施例を示す要部拡大断面図。
第2図は従来のものを示す要部拡大断面図、第3図は回
転センサの一例を模式的に示す斜視図である。
に回転ドラム、3:感磁素子、4ニガラス基板、5:パ
ターン、6. 6a、7:保護膜。FIG. 1 is an enlarged sectional view of main parts showing an embodiment of the present invention. FIG. 2 is an enlarged sectional view of a main part of a conventional sensor, and FIG. 3 is a perspective view schematically showing an example of a rotation sensor. rotating drum, 3: magnetic sensing element, 4 glass substrate, 5: pattern, 6. 6a, 7: Protective film.
Claims (7)
磁石体の磁界が作用する範囲内に、前記磁石体の磁極面
と対向しかつ所定の間隙を介して相対移動自在に感磁素
子を配設した磁気センサにおいて、非導電性材料からな
る基板上に強磁性材料の薄膜からなるパターンを設け、
このパターンの周縁部に非磁性無機材料からなる保護膜
を部分的に設けると共に、前記パターンおよび前記保護
膜の上方に非透水性材料からなる他の保護膜を設けたこ
とを特徴とする磁気センサ。(1) Within the range in which the magnetic field of a magnet body formed such that NS magnetic poles appear alternately on its surface acts, a magnetic sensing element is provided that faces the magnetic pole surface of the magnet body and is movable relative to the magnetic pole face of the magnet body through a predetermined gap. In a magnetic sensor equipped with
A magnetic sensor characterized in that a protective film made of a non-magnetic inorganic material is partially provided on the periphery of the pattern, and another protective film made of a water-impermeable material is provided above the pattern and the protective film. .
記載の磁気センサ。(2) The magnetic sensor according to claim 1, wherein the magnet is a rotating magnet.
項若しくは第2項記載の磁気センサ。(3) Claim 1 in which the non-conductive material is glass
The magnetic sensor according to item 1 or 2.
o系合金である特許請求の範囲第1項ないし第3項何れ
かに記載の磁気センサ。(4) Ferromagnetic material is Fe-Ni alloy or Ni-C
The magnetic sensor according to any one of claims 1 to 3, which is an o-based alloy.
20μmである特許請求の範囲第1項ないし第4項何れ
かに記載の磁気センサ。(5) The thickness of the protective film made of non-magnetic inorganic material is 0.5~
The magnetic sensor according to any one of claims 1 to 4, which has a diameter of 20 μm.
囲第1項ないし第5項何れかに記載の磁気センサ。(6) The magnetic sensor according to any one of claims 1 to 5, wherein the nonmagnetic inorganic material is SiO_2.
第1項ないし第6項何れかに記載の磁気センサ。(7) The magnetic sensor according to any one of claims 1 to 6, wherein the water-impermeable material is a PIQ resin.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21857086A JPS6373114A (en) | 1986-09-17 | 1986-09-17 | Magnetic sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21857086A JPS6373114A (en) | 1986-09-17 | 1986-09-17 | Magnetic sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6373114A true JPS6373114A (en) | 1988-04-02 |
Family
ID=16722014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21857086A Pending JPS6373114A (en) | 1986-09-17 | 1986-09-17 | Magnetic sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6373114A (en) |
-
1986
- 1986-09-17 JP JP21857086A patent/JPS6373114A/en active Pending
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