JPS60162919A - Magnetic scale signal detector - Google Patents
Magnetic scale signal detectorInfo
- Publication number
- JPS60162919A JPS60162919A JP1790484A JP1790484A JPS60162919A JP S60162919 A JPS60162919 A JP S60162919A JP 1790484 A JP1790484 A JP 1790484A JP 1790484 A JP1790484 A JP 1790484A JP S60162919 A JPS60162919 A JP S60162919A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- signal
- magnetic
- scale
- drum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2451—Incremental encoders
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は磁気スケールと、薄膜磁気抵抗素子から成る検
出ヘッドとの相対運動量に対応する信号を検出する方式
１％に磁気スケール測長装置等において、バイアス磁場
を付与する構成の改良に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a 1% method for detecting a signal corresponding to the relative momentum between a magnetic scale and a detection head consisting of a thin film magnetoresistive element. This invention relates to improvements in the configuration for applying a bias magnetic field.
背景技術とその間踊点
磁気スケールを用いた従来の測長装置は、第１図に示す
ように、一定周期で磁化した磁気格子を有する磁気スケ
ール■に対する相対運動量に対応する信号を所定のヘッ
ドにより検出することは周知の通りであるが、このヘッ
ドとしては薄膜磁気抵抗素子２を用いる場合がある。そ
してこの種のヘッドを用いる場合５例えは特開昭５５−
５９３１４号に示す如く薄膜磁気抵抗素子２は磁気スケ
ールｌに対し面対向に配置され５かつバイアス磁場をか
ける必要上永久磁石３が用いられる。図中、永久磁石３
の上に記された２重矢印はバイアス磁界の方向を示す。BACKGROUND TECHNOLOGY AND INTERIOR A conventional length measuring device using a dot magnetic scale, as shown in Fig. 1, uses a predetermined head to send a signal corresponding to the relative momentum to a magnetic scale having a magnetic grating magnetized at a constant period. Although the detection is well known, a thin film magnetoresistive element 2 may be used as this head. When using this type of head, five examples are JP-A-55-
As shown in No. 59314, a thin film magnetoresistive element 2 is disposed face-to-face with respect to a magnetic scale l, and a permanent magnet 3 is used to apply a bias magnetic field. In the figure, permanent magnet 3
The double arrow marked above indicates the direction of the bias magnetic field.
第２因は薄膜磁気抵抗素子と磁界の方向の関係を示す図
で、４，５および６はそれぞれ相対運動に応じて磁気ス
ケール１により与えられるＳ ｓｉｎ （２πＸ／λ）
の形で表わされる信号磁界、バイアス磁界および合成磁
界を表わし、ヘッドはこの合成磁界の変化を検出する。The second factor is a diagram showing the relationship between the thin film magnetoresistive element and the direction of the magnetic field, where 4, 5 and 6 are S sin (2πX/λ) given by the magnetic scale 1 according to the relative motion, respectively.
represents a signal magnetic field, a bias magnetic field, and a composite magnetic field expressed in the form , and the head detects changes in this composite magnetic field.
従って従来の方式によるとバイアス磁界を与えるための
永久磁石３が必要で、これは、例えば図示のように５素
子２の裏面、或いは磁気スケールｌの両側に設けられて
いた。この構成では、永久磁石を必要とするので、構造
、組立及びコストの点で問題があつ几。また薄膜磁気抵
抗素子２にかかるバイアス磁界の方向は永久磁石の磁界
方向となるが、磁石の磁界方向にはばらつきがあり、検
出信号の波形が歪む原因の一つになっていた。Therefore, according to the conventional system, a permanent magnet 3 is required for applying a bias magnetic field, and this is provided, for example, on the back surface of the five elements 2 or on both sides of the magnetic scale l, as shown in the figure. This configuration requires permanent magnets, which presents problems in terms of construction, assembly, and cost. Further, the direction of the bias magnetic field applied to the thin film magnetoresistive element 2 is the direction of the magnetic field of the permanent magnet, but there is variation in the direction of the magnetic field of the magnet, which is one of the causes of distortion of the waveform of the detection signal.
発明の目的 本発明の目的は永久磁石を用いることなしに。purpose of invention The aim of the invention is to avoid using permanent magnets.
薄膜磁気抵抗素子により磁界スケール信号を検出する方
式を提供するにある。The present invention provides a method for detecting a magnetic field scale signal using a thin film magnetoresistive element.
発明の概要
上記目的を達成する茫めに１本発明はバイアス磁界成分
と信号ｉ界成分の両方を磁気記録した磁気スケールと、
該スケールに対する相対運動に厄じてそれらの合成磁界
を検出し５信号を出力する薄膜磁気抵抗素子とを含むこ
とを擬旨とする。SUMMARY OF THE INVENTION To achieve the above object, the present invention provides a magnetic scale that magnetically records both a bias magnetic field component and a signal i-field component;
The purpose of the present invention is to include a thin film magnetoresistive element which detects the combined magnetic field of the scale and outputs five signals despite the relative movement with respect to the scale.
実施例
第３図は本発明をロータリ・エンコーダに適用し一実施
例を模式的に示すが、本発明が直線状の副長装置にも同
様に適用できることは勿論である。Embodiment FIG. 3 schematically shows an embodiment in which the present invention is applied to a rotary encoder, but it goes without saying that the present invention can be similarly applied to a linear sub-length device.
信号磁場を光生させる回転型磁気スケールとして、例え
はプラスチック・マグネットからなる磁気ドラム７を用
い、第４図（ａｌおよび（ｂ）に示すように、これにバ
イアス磁界と信号磁界の両方を磁気記録する。すなわち
、まず第４図（ａｌに示すように、このプラスチック・
マグネットから成る磁気ドラム７に矢印で示す磁化方向
に全体に亘って均一なＮ磁を施し、バイアス磁場を形成
し、その後、第４図（ｂＪに示すように、磁気ドラム７
を回転させ、着磁器１−１によりその外周に沼って信号
磁場（磁気格子）の記録を施す。As a rotating magnetic scale that optically generates a signal magnetic field, a magnetic drum 7 made of, for example, a plastic magnet is used, and both a bias magnetic field and a signal magnetic field are magnetically recorded on it, as shown in FIGS. That is, first, as shown in Figure 4 (al), this plastic
A uniform N magnetism is applied over the entire magnetic drum 7 made of a magnet in the magnetization direction shown by the arrow to form a bias magnetic field, and then, as shown in FIG. 4 (bJ), the magnetic drum 7 is
is rotated, and a signal magnetic field (magnetic grating) is recorded on its outer periphery by a magnetizer 1-1.
以上のようにバイアス、信号の両磁界を記録した磁気ド
ラム７に対向して、第３図に示すように、薄膜磁気抵抗
素子２を配置し、該ドラムの回転量に応じて信号を検出
する。As shown in FIG. 3, the thin film magnetoresistive element 2 is placed opposite the magnetic drum 7 on which both the bias and signal magnetic fields have been recorded as described above, and the signal is detected according to the amount of rotation of the drum. .
発明の詳細
な説明した通り、本発明によれば、永久磁石な使用する
ことなしに、バイアス磁界を印加して薄膜磁気抵抗素子
により安定した磁気スケール信号の検出を行なうことが
でき、永久磁石が不要となるので、部品点数の削減、組
立の簡易化、コスト低下を計ることができる。As described in detail, according to the present invention, it is possible to apply a bias magnetic field and stably detect a magnetic scale signal using a thin film magnetoresistive element without using a permanent magnet. Since this is not necessary, the number of parts can be reduced, assembly can be simplified, and costs can be reduced.
第１図は従来の６１θ長装置の構成を模式的に示す斜視
図、第２図は薄膜磁気抵抗素子と磁界の方向の関係を示
す図、第３図は本発明による測長装置の構成を模式的に
示す斜視図、第４図（ａ）および（ｂＪは本発明による
測長装置の中で使用される磁気ドラムの製造工程を模式
的に表わす斜視図である。
ｌ・・・磁気スケール、２・・・薄膜磁気抵抗素子、３
・・・永久磁石、４・・・信号磁界、５・・・バイアス
磁界、６・・・合成磁界、７・・・磁気ドラム。FIG. 1 is a perspective view schematically showing the configuration of a conventional 61θ length device, FIG. 2 is a diagram showing the relationship between the thin film magnetoresistive element and the direction of the magnetic field, and FIG. 3 is a diagram showing the configuration of the length measuring device according to the present invention. FIGS. 4A and 4B are perspective views schematically showing the manufacturing process of the magnetic drum used in the length measuring device according to the present invention. l...Magnetic scale , 2... thin film magnetoresistive element, 3
...Permanent magnet, 4...Signal magnetic field, 5...Bias magnetic field, 6...Synthetic magnetic field, 7...Magnetic drum.
Claims (1)
スケールと、該スケールに対する相対運動量に応じたス
ケール信号を検出する薄膜磁気抵抗素子とを含むことを
特徴とする磁気スケール信号検出装置。A magnetic scale signal detection device comprising: a magnetic scale on which a bias magnetic field component and a signal magnetic field component are magnetically recorded; and a thin film magnetoresistive element that detects a scale signal according to a relative momentum with respect to the scale.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790484A JPS60162919A (en) | 1984-02-03 | 1984-02-03 | Magnetic scale signal detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790484A JPS60162919A (en) | 1984-02-03 | 1984-02-03 | Magnetic scale signal detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60162919A true JPS60162919A (en) | 1985-08-24 |
Family
ID=11956727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1790484A Pending JPS60162919A (en) | 1984-02-03 | 1984-02-03 | Magnetic scale signal detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60162919A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63270032A (en) * | 1987-04-30 | 1988-11-08 | Olympus Optical Co Ltd | Ultrasonic endoscope |
| JP2014029312A (en) * | 2012-07-31 | 2014-02-13 | Hitachi Metals Ltd | Magnetic medium and magnetic sensor device |
| EP2865997A1 (en) | 2013-10-28 | 2015-04-29 | Hitachi Metals, Ltd. | Magnetic medium for magnetic encoder, magnetic encoder and method for manufacturing magnetic medium |
-
1984
- 1984-02-03 JP JP1790484A patent/JPS60162919A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63270032A (en) * | 1987-04-30 | 1988-11-08 | Olympus Optical Co Ltd | Ultrasonic endoscope |
| JP2014029312A (en) * | 2012-07-31 | 2014-02-13 | Hitachi Metals Ltd | Magnetic medium and magnetic sensor device |
| EP2865997A1 (en) | 2013-10-28 | 2015-04-29 | Hitachi Metals, Ltd. | Magnetic medium for magnetic encoder, magnetic encoder and method for manufacturing magnetic medium |
| US9574906B2 (en) | 2013-10-28 | 2017-02-21 | Hitachi Metals, Ltd. | Magnetic medium for magnetic encoder, magnetic encoder and method for manufacturing magnetic medium |
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