JPS625995B2 - - Google Patents

Info

Publication number
JPS625995B2
JPS625995B2 JP56113621A JP11362181A JPS625995B2 JP S625995 B2 JPS625995 B2 JP S625995B2 JP 56113621 A JP56113621 A JP 56113621A JP 11362181 A JP11362181 A JP 11362181A JP S625995 B2 JPS625995 B2 JP S625995B2
Authority
JP
Japan
Prior art keywords
susceptor
reaction
induction heating
heating coil
substrate wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56113621A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5814945A (ja
Inventor
Seinosuke Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimada Rika Kogyo KK
Original Assignee
Shimada Rika Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimada Rika Kogyo KK filed Critical Shimada Rika Kogyo KK
Priority to JP11362181A priority Critical patent/JPS5814945A/ja
Publication of JPS5814945A publication Critical patent/JPS5814945A/ja
Publication of JPS625995B2 publication Critical patent/JPS625995B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP11362181A 1981-07-22 1981-07-22 気相成長装置 Granted JPS5814945A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11362181A JPS5814945A (ja) 1981-07-22 1981-07-22 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11362181A JPS5814945A (ja) 1981-07-22 1981-07-22 気相成長装置

Publications (2)

Publication Number Publication Date
JPS5814945A JPS5814945A (ja) 1983-01-28
JPS625995B2 true JPS625995B2 (enrdf_load_html_response) 1987-02-07

Family

ID=14616850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11362181A Granted JPS5814945A (ja) 1981-07-22 1981-07-22 気相成長装置

Country Status (1)

Country Link
JP (1) JPS5814945A (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61246370A (ja) * 1985-04-23 1986-11-01 Sakaguchi Dennetsu Kk 気相化学反応炉
JPS6347364A (ja) * 1986-08-15 1988-02-29 Nippon Telegr & Teleph Corp <Ntt> 化学的気相成長法およびその装置
JP4366979B2 (ja) * 2003-04-18 2009-11-18 株式会社デンソー Ｃｖｄ装置
JP2005294606A (ja) * 2004-04-01 2005-10-20 Ngk Insulators Ltd ウエハー加熱装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57110665A (en) * 1980-12-26 1982-07-09 Seiko Epson Corp Heating mechanism for vacuum apparatus

Also Published As

Publication number Publication date
JPS5814945A (ja) 1983-01-28

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