JPS6259063B2 - - Google Patents
Info
- Publication number
- JPS6259063B2 JPS6259063B2 JP54130791A JP13079179A JPS6259063B2 JP S6259063 B2 JPS6259063 B2 JP S6259063B2 JP 54130791 A JP54130791 A JP 54130791A JP 13079179 A JP13079179 A JP 13079179A JP S6259063 B2 JPS6259063 B2 JP S6259063B2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- burner
- gas
- optical fiber
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 42
- 239000011521 glass Substances 0.000 claims description 20
- 239000013307 optical fiber Substances 0.000 claims description 20
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 14
- 229910052739 hydrogen Inorganic materials 0.000 claims description 14
- 239000001257 hydrogen Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 14
- 239000011261 inert gas Substances 0.000 claims description 11
- 239000002994 raw material Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 230000001590 oxidative effect Effects 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 5
- 239000000835 fiber Substances 0.000 claims 1
- 150000002431 hydrogen Chemical class 0.000 claims 1
- 239000007858 starting material Substances 0.000 claims 1
- 239000002019 doping agent Substances 0.000 description 19
- 238000009826 distribution Methods 0.000 description 12
- 229910003902 SiCl 4 Inorganic materials 0.000 description 4
- 238000002485 combustion reaction Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005253 cladding Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 150000003377 silicon compounds Chemical class 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000005373 porous glass Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
- C03B2207/26—Multiple ports for glass precursor
- C03B2207/28—Multiple ports for glass precursor for different glass precursors, reactants or modifiers
Description
【発明の詳細な説明】
従来の同心円状の多重管バーナを用いて集束型
光フアイバ母材を作成する方法には第１図に示す
方法が用いられている。この方法はバーナ１の各
管内にそれぞれ不活性ガス、酸化性ガス、可燃性
ガス、および不活性または酸化性ガスで搬送され
たドーパント濃度の異なる２種以上の原料ガスを
供給し、燃焼および火炎加水分解によつてガラス
微粒子を合成させ、これを軸方向に堆積、成長さ
せる方法である。この方法について実験的に検討
したが、バーナに次のような問題点があることが
判明した。DETAILED DESCRIPTION OF THE INVENTION The method shown in FIG. 1 is used for producing a convergent optical fiber preform using a conventional concentric multi-tube burner. In this method, two or more raw material gases with different concentrations of dopant, such as an inert gas, an oxidizing gas, a combustible gas, and an inert or oxidizing gas, are supplied into each tube of the burner 1, and combustion and flame are generated. This is a method of synthesizing glass particles through hydrolysis, and depositing and growing them in the axial direction. An experimental study of this method revealed the following problems with the burner.
なお、２はターゲツト、３はターゲツトの回転
方向、４はターゲツトの軸方向の移動方向、５は
火炎、６はガラス多孔質母材である。 In addition, 2 is a target, 3 is a rotating direction of a target, 4 is a moving direction of an axial direction of a target, 5 is a flame, and 6 is a glass porous base material.
(1) 酸化性ガスO2と可燃性ガスH2を隣接して供
給する構成になつているので、バーナの出口部
でH2とO2が燃焼し、長時間使用していると出
口部が損焼し変形してしまい、使用できなくな
つてしまう。またO2およびH2の吹出し出口部
にガラス微粒子が付着し目づまりを生ずる。(1) Since the oxidizing gas O 2 and combustible gas H 2 are supplied adjacent to each other, H 2 and O 2 will burn at the outlet of the burner, and if the burner is used for a long time, the outlet will burn. was damaged and deformed, making it unusable. Furthermore, glass particles adhere to the O 2 and H 2 outlet, causing clogging.
(2) 集束型光フアイバ母材を作るには、最低５重
管構造にし、各々の管の外径、内径、管と管の
間のギヤツプの寸法を高精度におさえなければ
ならない。そのためには金属で作ればよいが、
(1)のような理由によりバーナ出口部の損焼を生
じ、金属がガラス母材中に混入して光フアイバ
損失を増大させる原因となる。石英ガラス製で
は(1)のような問題ばかりでなく、寸法精度良く
作ることに問題がある。(2) In order to make a focusing optical fiber base material, it is necessary to have at least a five-ply tube structure, and the outer diameter and inner diameter of each tube, as well as the dimensions of the gap between the tubes, must be controlled with high precision. For that purpose, it can be made of metal,
Due to reasons like (1), the burner outlet part is damaged, and metal gets mixed into the glass base material, causing increased optical fiber loss. In addition to the problems mentioned in (1) with quartz glass, there are also problems in manufacturing with high dimensional accuracy.
(3) (1)の対策としてO2とH2との間に不活性ガス
を流し、H2とO2の混合をバーナ出口部の前方
の空間部で行なう方法が考えられるが、この場
合には管を一つ増やして６重管構造にしなけれ
ばならず、複雑で増々寸法精度良く作ることが
困難である。(3) A possible solution to (1) is to flow inert gas between O 2 and H 2 and mix H 2 and O 2 in the space in front of the burner outlet, but in this case In order to do this, it is necessary to add one tube to create a six-ply tube structure, which is complicated and increasingly difficult to manufacture with high dimensional accuracy.
以上のような問題点があるために、作成した光
フアイバの伝送帯域特性、損失特性のバラツキが
大きく、かつ高品質のものを作ることが困難であ
つた。 Due to the above-mentioned problems, the transmission band characteristics and loss characteristics of the manufactured optical fibers vary widely, and it has been difficult to manufacture high-quality optical fibers.
本発明は上記問題点を解決するバーナを提供す
るものである。すなわち、簡易構造であり、バー
ナ出口部の損焼、熱変形、目づまりがなく長寿命
のバーナを提供するものである。従来のバーナ構
成と異なる点は、(1)ガラスの原料ガスを水素を含
むガスで搬送してバーナに供給（ただし、屈折率
を高めるガラス原料を供給する方の水素の量を屈
折率を低めるガラス原料を供給する方の水素の量
よりも少なくする）し、かつ(2)水素を含むガスと
酸化性ガスとの間に不活性ガスを流して水素と酸
化性ガスの混合をバーナ出口部の前方の空間部で
行ない、しかも(3)従来の多重管バーナよりも少な
くとも管が１つ少ない簡易のバーナである。 The present invention provides a burner that solves the above problems. That is, the present invention provides a burner that has a simple structure and has a long life without burning out, thermal deformation, or clogging at the burner outlet. The difference from the conventional burner configuration is that (1) the raw material gas for the glass is transported as a gas containing hydrogen and supplied to the burner (however, the amount of hydrogen used to supply the glass raw material, which increases the refractive index, is used to lower the refractive index); (2) Inert gas is flowed between the hydrogen-containing gas and the oxidizing gas to mix the hydrogen and oxidizing gas at the burner outlet. (3) It is a simple burner with at least one less tube than the conventional multi-tube burner.
以下に本発明の実施例を図面を用いて説明す
る。 Embodiments of the present invention will be described below with reference to the drawings.
第２図は本発明の集束型光フアイバ母材製造方
法の一実施例を説明するための概略図である。 FIG. 2 is a schematic diagram for explaining an embodiment of the method for manufacturing a convergent optical fiber preform of the present invention.
１１は円心状の４重管からなるバーナであり、
中心管７、第１中間管８、第２中間管９、外側管
１０で構成されている。第１図の場合よりも管が
１つ少なく４重管で簡単な構造である。中心管７
にはSiCl4以外に屈折率を高めるドーパント、
GeCl4，POCl3の蒸気を水素を含むガス（たとえ
ばH2と不活性ガスの混合ガス）で搬送して供給
し、第１中間管８にはSiCl4以外に屈折率を低め
るドーパントBBr3の蒸気を水素を含むガスで搬
送して供給する。そして第２中間管９に不活性ガ
ス（たとえばAr，N2，He，Neなど）を流して外
側管１０に供給するO2ガスと中心管、第１中間
管に流している水素ガスをしやへいし、O2とH2
の混合をバーナ出口部の前方ｌの位置の空間部で
行なうようにしてある。このｌの位置は第２中間
管に流す不活性ガスの流量値で調節できる。ｌは
大きくとることによつてバーナ出口部の損焼、熱
変形、目づまりを防止できる。中心管７に流す水
素の量を第１中間管８に流す水素の量よりも少な
くすれば、中心部での燃焼温度が低く、その外周
部の燃焼温度が高くなるのでターゲツト２上に堆
積されたガラス多孔質母材６の半径方向のドーパ
ント濃度分布は第３図ａに示すような半径方向に
ドーパント濃度分布を有するようになる。そして
このガラス多孔質母材を焼結することによつて第
３図ｂに示すごとく集束型屈折率分布を得ること
ができる。ここで中心管の水素の量Ａと第１中間
管の水素の量ＢとはＡ／Ｂ＝0.2〜0.6が好ましい。 11 is a burner consisting of four circular tubes,
It is composed of a central tube 7, a first intermediate tube 8, a second intermediate tube 9, and an outer tube 10. It has a simpler structure with four pipes, one less than the case in Figure 1. center tube 7
In addition to SiCl 4 , there is a dopant that increases the refractive index,
The vapors of GeCl 4 and POCl 3 are transported and supplied with a hydrogen-containing gas (for example, a mixed gas of H 2 and an inert gas), and the first intermediate tube 8 contains, in addition to SiCl 4 , a dopant BBr 3 that lowers the refractive index. Steam is transported and supplied using a gas containing hydrogen. Then, an inert gas (for example, Ar, N 2 , He, Ne, etc.) is passed through the second intermediate pipe 9, and O 2 gas is supplied to the outer pipe 10, and hydrogen gas is supplied to the center pipe and the first intermediate pipe. Yaheishi, O 2 and H 2
The mixing is performed in a space located at a position l in front of the burner outlet. The position of l can be adjusted by adjusting the flow rate of the inert gas flowing into the second intermediate pipe. By setting l large, it is possible to prevent burnout, thermal deformation, and clogging at the burner outlet. If the amount of hydrogen flowing into the center pipe 7 is smaller than the amount of hydrogen flowing into the first intermediate pipe 8, the combustion temperature at the center will be lower and the combustion temperature at the outer periphery will be higher, so that no hydrogen will be deposited on the target 2. The dopant concentration distribution in the radial direction of the glass porous preform 6 becomes as shown in FIG. 3a. By sintering this glass porous base material, a focused refractive index distribution as shown in FIG. 3b can be obtained. Here, the amount A of hydrogen in the center tube and the amount B of hydrogen in the first intermediate tube are preferably A/B=0.2 to 0.6.
第３図において、２１は中心管からのドーパン
トの濃度分布を示す曲線、２２は第１中間管から
のドーパントの濃度分布を示す曲線、２３は中心
管からのドーパントによる屈折率変化を示す曲
線、２４は第１中間管からのドーパントによる屈
折率変化を示す曲線、２５は総合的な屈折率分布
を示す曲線である。 In FIG. 3, 21 is a curve showing the dopant concentration distribution from the central tube, 22 is a curve showing the dopant concentration distribution from the first intermediate tube, 23 is a curve showing the refractive index change due to the dopant from the central tube, 24 is a curve showing the refractive index change due to the dopant from the first intermediate tube, and 25 is a curve showing the overall refractive index distribution.
第４図は本発明の集束型光フアイバ母材製造用
バーナの別の実施例であり、ａは上面図、ｂは断
面面である。このバーナ１１′は中心管７′をバー
ナ出口部からＬだけ引つ込ませてある。このＬを
変えることによつて中心管７′から噴出するドー
パントのガスと第１中間管８′から噴出するドー
パントのガスの径方向拡散量を制御できる。この
ように、ガス状態で両方のドーパントのガスを混
合させるので、均一に拡散し易い。これに対し
て、従来のように燃焼させてから両方のドーパン
トを混合させる方法では両方のドーパントガスの
線速度の変化、温度分布特性など複雑な状態をも
つて混合、拡散するので不均な拡散になり易いと
いう欠点をもつ。第１図のバーナ１ではガス流
量、多重管の内、外径、ギヤツプ、バーナとガラ
ス母材の成長端との間隔を調節することによつて
屈折率を制御するのに対して、第４図のバーナは
上記プロセス変量以外にＬが加わるので屈折率の
制御性を上げることが可能である。またＬの範囲
のガス状態でドーパントを混合した後、燃焼雰囲
気中（バーナと成長端面との間隔）でドーパント
の拡散を行なわせるので半径方向の屈折率分布を
より連続的に変化させることが可能となる。 FIG. 4 shows another embodiment of the burner for producing a focusing type optical fiber preform of the present invention, in which a is a top view and b is a cross-sectional view. In this burner 11', the central tube 7' is retracted by an amount L from the burner outlet. By changing this L, the amount of radial diffusion of the dopant gas ejected from the central tube 7' and the dopant gas ejected from the first intermediate tube 8' can be controlled. In this way, since the gases of both dopants are mixed in a gaseous state, it is easy to diffuse them uniformly. On the other hand, in the conventional method of burning and then mixing both dopants, both dopant gases mix and diffuse under complex conditions such as changes in linear velocity and temperature distribution characteristics, resulting in non-uniform diffusion. It has the disadvantage that it can easily become In the burner 1 shown in Fig. 1, the refractive index is controlled by adjusting the gas flow rate, the inner and outer diameters of the multiple tubes, the gap, and the distance between the burner and the growth end of the glass base material. In the burner shown in the figure, since L is added in addition to the above process variables, it is possible to improve the controllability of the refractive index. In addition, after dopants are mixed in a gas state within the range of L, the dopants are diffused in the combustion atmosphere (distance between the burner and the growth end face), making it possible to change the refractive index distribution in the radial direction more continuously. becomes.
第５図は第４図の変形であり、バーナ１１″の
中心管７″、第１中間管８″がバーナ出口部から
L′だけ中に引つ込んだ構造のものである。 Fig. 5 is a modification of Fig. 4, in which the central pipe 7'' and the first intermediate pipe 8'' of the burner 11'' are connected from the burner outlet.
It has a structure in which only L' is recessed inside.
第４図、第５図において、９′と９″は第２中間
管、１０′と１０″は外側管である。 In FIGS. 4 and 5, 9' and 9'' are second intermediate tubes, and 10' and 10'' are outer tubes.
次に本発明の実施例の具体例について述べる。 Next, specific examples of embodiments of the present invention will be described.
第２図において、中心管７にSiCl4，GeCl4，
POCl3の蒸気をArでそれぞれ300c.c.／min，150
c.c.／min，80c.c.／minバブルさせ、途中で1.5／
minのH2ガスと混合して供給した。第１中間管８
にSiCl4，BBr3の蒸気をArでそれぞれ300c.c.／
min，130c.c.／minバブルさせ、途中で3.5／min
のH2ガスと混合して供給した。第２中間管９に
は2.5／minのArガスを供給し、外側管１０に
は10／minのO2ガスを供給した。そしてバーナ
出口部で点火してガラス微粒子を含んだ火炎５を
発生させ、矢印３方向に30rpmで回転させながら
矢印４方向に５mm／minの速度で引上げるターゲ
ツト（外径13mmの石英ムク棒）にガラス多孔質母
材６（外径75mm）を成長させた。約８時間連続し
て母材を成長させたが、バーナの出口部はまつた
く損焼、熱変形、ガラス微粒子の目づまりがなか
つた。またこの多孔質母材を電気炉（温度1300
℃）内に入れ、He雰囲気中（４／min）にてゾ
ーンメルト法により焼結しガラス化した。このガ
ラスロツドを石英管内に入れて融着しプリフオー
ムとした。次いでこのプリフオームを線引きして
光フアイバを得た。この光フアイバのベースバン
ド周波数帯域を測定した結果、８Kmの光フアイバ
長に対し、860MHz・Km（6dB低下）の広帯域特
性を得ることができた。さらに副次的効果とし
て、バーナの中心部の温度が低く、外側部の温度
が高いので、作成中に多孔質ガラス母材が落下し
たり、クラツクが入つたりするなどのトラブルを
生ぜず、安定して作成できるということもも明ら
かとなつた。 In FIG. 2, SiCl 4 , GeCl 4 ,
POCl 3 vapor with Ar at 300 c.c./min, 150
cc/min, 80c.c./min bubble, 1.5/min in the middle
It was supplied mixed with min H2 gas. First intermediate pipe 8
The vapors of SiCl 4 and BBr 3 were heated to 300c.c./each with Ar.
min, 130c.c./min bubble, 3.5/min in the middle
of H2 gas was supplied. Ar gas was supplied to the second intermediate tube 9 at a rate of 2.5/min, and O 2 gas was supplied to the outer tube 10 at a rate of 10/min. Then, the target is ignited at the burner outlet to generate a flame 5 containing glass particles, and pulled up at a speed of 5 mm/min in the direction of arrow 4 while rotating at 30 rpm in the direction of arrow 3 (a solid quartz rod with an outer diameter of 13 mm). A glass porous base material 6 (outer diameter 75 mm) was grown. Although the base material was grown continuously for about 8 hours, there was no burnout, thermal deformation, or clogging of glass particles at the outlet of the burner. In addition, this porous base material was heated in an electric furnace (temperature 1300
℃), and was sintered and vitrified by the zone melt method in a He atmosphere (4/min). This glass rod was placed in a quartz tube and fused to form a preform. This preform was then drawn to obtain an optical fiber. As a result of measuring the baseband frequency band of this optical fiber, we were able to obtain a broadband characteristic of 860MHz·Km (6dB reduction) for an optical fiber length of 8Km. Furthermore, as a side effect, the temperature at the center of the burner is low and the temperature at the outside is high, so there are no problems such as the porous glass base material falling or cracking during production. It has also become clear that it can be produced stably.
本発明は上記実施例に限定されない。ガラス原
料ガスはハロゲン化物、水素化物、アルキル化物
からなるシリコン化合物、あるいは屈折率制御用
化合物を含んだシリコン化合物を用いることがで
きる。バーナは３重管以上の多重管で構成され
る。集束型光フアイバ母材ばかりでなく、ステツ
プインデツクス型光フアイバ母材も作成可能であ
る。ステツプインデツクス型光フアイバ母材を作
成する場合には５重管とし中心管にコア用原料ガ
スを流し、第１中間管に不活性ガスを、第２中間
管にクラツド用原料ガスを、第３中間管に不活性
ガスを、そして外側管にO2ガスを流せばよい。
ただし原料ガスは水素を含むガスで搬送させる。
あるいは３重管でもステツプインデツクス型光フ
アイバ母材を作ることも可能である。この場合に
は中心管にコア用原料ガスをH2を含むガスで供
給し、中間管に不活性ガスを供給し、そして外側
管にクラツド用原料ガスをO2を含むガスで搬送
して供給する。バーナの材質はガラス、金属、磁
器を用いることができる。バーナの配置はターゲ
ツトの軸方向延長上、あるいは軸方向から半径方
向にずれた位置、さらには軸方向とある角度をも
たせた斜方向においてもよい。矢印４方向は天井
方向あるいは地下方向のいずれでもよい。バーナ
のノズル出口部は管径をテーパ状（減少方向ある
いは増大方向）にしてノズル部出口部から流出さ
れたガスの線速度が急激に減少するのを抑制する
ようにしてもよい。 The invention is not limited to the above embodiments. As the glass raw material gas, a silicon compound consisting of a halide, a hydride, or an alkylated compound, or a silicon compound containing a refractive index controlling compound can be used. The burner is composed of multiple tubes including triple tubes or more. It is possible to produce not only convergent optical fiber preforms but also step-index optical fiber preforms. When producing a step-index type optical fiber base material, a five-layer tube is used, with the core raw material gas flowing through the central tube, the inert gas flowing through the first intermediate tube, the cladding raw material gas flowing through the second intermediate tube, and the cladding gas flowing through the first intermediate tube. 3. All you need to do is to flow inert gas into the middle tube and O 2 gas into the outer tube.
However, the raw material gas is transported using a gas containing hydrogen.
Alternatively, it is also possible to make a step index type optical fiber base material using a triple tube. In this case, the raw material gas for the core is supplied to the central tube as a gas containing H2 , the inert gas is supplied to the intermediate tube, and the raw material gas for the cladding is conveyed and supplied to the outer tube as a gas containing O2 . do. The material of the burner can be glass, metal, or porcelain. The burner may be placed on the axial extension of the target, radially offset from the axial direction, or even diagonally at an angle with the axial direction. The four directions of the arrows may be either toward the ceiling or toward the basement. The nozzle outlet of the burner may have a tapered tube diameter (in a decreasing direction or an increasing direction) to suppress a sudden decrease in the linear velocity of the gas flowing out from the nozzle outlet.
第１図は従来技術による光フアイバ母材の製造
法を説明する概略断面図、第２図は本発明の一実
施例における光フアイバ母材の製造法を説明する
概略断面図、第３図ａは本発明の一実施例におい
て得られたガラス多孔質母材のドーパント濃度分
布を示すグラフ、第３図ｂは本発明の一実施例に
おいて得られた光フアイバ母材の屈折率分布を示
すグラフ、第４図と第５図はそれぞれ本発明の他
の実施例で用いたバーナの構造を示す平面図と断
面図である。
各図において、１，１１，１１′および１１″は
バーナ、２はターゲツト、３はターゲツトの回転
方向、４はターゲツトの軸方向の移動方向、５は
火炎、６はガラス多孔質母材、７，７′および
７″はバーナの中心管、８，８′および８″は第１
中間管、９，９′および９″は第２中間管、１０，
１０′および１０″は外側管、２１は中心からのド
ーパントの濃度分布を示す曲線、２２は第１中間
管からのドーパントの濃度分布を示す曲線、２３
は中間管からのドーパントによる屈折率変化を示
す曲線、２４は第１中間管からのドーパントによ
る屈折率変化を示す曲線、２５は総合的な屈折率
分布を示す曲線である。
FIG. 1 is a schematic sectional view illustrating a method of manufacturing an optical fiber preform according to the prior art, FIG. 2 is a schematic sectional view illustrating a method of manufacturing an optical fiber preform according to an embodiment of the present invention, and FIG. 3 a is a graph showing the dopant concentration distribution of the glass porous preform obtained in one example of the present invention, and FIG. 3b is a graph showing the refractive index distribution of the optical fiber preform obtained in one example of the present invention. , 4 and 5 are a plan view and a sectional view, respectively, showing the structure of a burner used in another embodiment of the present invention. In each figure, 1, 11, 11' and 11'' are burners, 2 is a target, 3 is the rotational direction of the target, 4 is the axial movement direction of the target, 5 is the flame, 6 is the glass porous base material, and 7 is the target. , 7' and 7'' are the center tube of the burner, 8, 8' and 8'' are the first
The intermediate tubes 9, 9' and 9'' are the second intermediate tubes, 10,
10' and 10'' are outer tubes, 21 is a curve showing the dopant concentration distribution from the center, 22 is a curve showing the dopant concentration distribution from the first intermediate tube, 23
24 is a curve showing the refractive index change due to the dopant from the first intermediate tube, and 25 is a curve showing the overall refractive index distribution.
Claims (1)
を用いて出発材上に光フアイバ母材を成長させる
方法において、上記バーナの中心から外側に向つ
て各管内に供給するガスをそれぞれ、ガラス原料
と水素を含むガス、不活性ガス、酸化性ガスと
し、前記ガラス原料と水素を含むガスを流す中心
管を他の管に比べて引つ込ませたことを特徴とす
る光フアイバ母材の製造方法。 ２ 特許請求の範囲第１項において、前記不活性
ガスを流す中間管を前記酸化性ガスを流す外側管
に比べて引つ込ませたことを特徴とする光フアイ
バ母材の製造方法。[Scope of Claims] 1. In a method for growing an optical fiber preform on a starting material using a circular multi-tube burner for generating glass particles, supplying the fiber into each tube from the center of the burner outwards. The gases are respectively a gas containing a glass raw material and hydrogen, an inert gas, and an oxidizing gas, and the central pipe through which the glass raw material and the gas containing hydrogen flow is recessed compared to other pipes. A method for manufacturing an optical fiber base material. 2. The method of manufacturing an optical fiber preform according to claim 1, characterized in that the intermediate tube through which the inert gas flows is recessed compared to the outer tube through which the oxidizing gas flows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13079179A JPS5654244A (en) | 1979-10-12 | 1979-10-12 | Preparation of optical fiber matrix |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13079179A JPS5654244A (en) | 1979-10-12 | 1979-10-12 | Preparation of optical fiber matrix |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5654244A JPS5654244A (en) | 1981-05-14 |
| JPS6259063B2 true JPS6259063B2 (en) | 1987-12-09 |
Family
ID=15042765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13079179A Granted JPS5654244A (en) | 1979-10-12 | 1979-10-12 | Preparation of optical fiber matrix |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5654244A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59232933A (en) * | 1983-06-15 | 1984-12-27 | Sumitomo Electric Ind Ltd | Production of preform for optical fiber |
| JPS61202944A (en) * | 1985-03-06 | 1986-09-08 | Kyokuto Kaihatsu Kogyo Co Ltd | Container handling vehicle |
| JPS61202943A (en) * | 1985-03-06 | 1986-09-08 | Kyokuto Kaihatsu Kogyo Co Ltd | Container handling vehicle |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5327607A (en) * | 1976-08-27 | 1978-03-15 | Sumitomo Electric Industries | Nozzle for use in synthesizing oxide particles |
| JPS5387245A (en) * | 1977-01-10 | 1978-08-01 | Nippon Telegr & Teleph Corp <Ntt> | Optical fiber parent material production apparatus |
| JPS54131044A (en) * | 1978-04-04 | 1979-10-11 | Nippon Telegr & Teleph Corp <Ntt> | Production of parent material for optical communication fiber |
| JPS5595635A (en) * | 1979-01-08 | 1980-07-21 | Nippon Telegr & Teleph Corp <Ntt> | Production of glass base material for optical fiber |
| JPS5719059A (en) * | 1980-07-05 | 1982-02-01 | Matsushita Electric Works Ltd | Painting of inorganic hardening body |
-
1979
- 1979-10-12 JP JP13079179A patent/JPS5654244A/en active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5327607A (en) * | 1976-08-27 | 1978-03-15 | Sumitomo Electric Industries | Nozzle for use in synthesizing oxide particles |
| JPS5387245A (en) * | 1977-01-10 | 1978-08-01 | Nippon Telegr & Teleph Corp <Ntt> | Optical fiber parent material production apparatus |
| JPS54131044A (en) * | 1978-04-04 | 1979-10-11 | Nippon Telegr & Teleph Corp <Ntt> | Production of parent material for optical communication fiber |
| JPS5595635A (en) * | 1979-01-08 | 1980-07-21 | Nippon Telegr & Teleph Corp <Ntt> | Production of glass base material for optical fiber |
| JPS5719059A (en) * | 1980-07-05 | 1982-02-01 | Matsushita Electric Works Ltd | Painting of inorganic hardening body |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5654244A (en) | 1981-05-14 |
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