JPS6258829B2 - - Google Patents
Info
- Publication number
- JPS6258829B2 JPS6258829B2 JP57139084A JP13908482A JPS6258829B2 JP S6258829 B2 JPS6258829 B2 JP S6258829B2 JP 57139084 A JP57139084 A JP 57139084A JP 13908482 A JP13908482 A JP 13908482A JP S6258829 B2 JPS6258829 B2 JP S6258829B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- rectangular
- frames
- rigid
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Particle Accelerators (AREA)
- Surgical Instruments (AREA)
- Actuator (AREA)
- Massaging Devices (AREA)
- Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8115671A FR2511265A1 (fr) | 1981-08-13 | 1981-08-13 | Chambre a vide modulaire extensible |
| FR8115671 | 1981-08-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5838684A JPS5838684A (ja) | 1983-03-07 |
| JPS6258829B2 true JPS6258829B2 (enExample) | 1987-12-08 |
Family
ID=9261448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57139084A Granted JPS5838684A (ja) | 1981-08-13 | 1982-08-10 | 伸長可能なモジュ−ル式真空室 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4454407A (enExample) |
| EP (1) | EP0072740B1 (enExample) |
| JP (1) | JPS5838684A (enExample) |
| AT (1) | ATE12438T1 (enExample) |
| DE (1) | DE3262794D1 (enExample) |
| FR (1) | FR2511265A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0705642A1 (de) * | 1994-10-05 | 1996-04-10 | GRETAG Aktiengesellschaft | Vakuumkammersystem |
| US5753161A (en) * | 1996-08-14 | 1998-05-19 | Owens-Corning Fiberglas Technology, Inc. | Vacuum extrusion system and method |
| US8557884B2 (en) | 2002-05-31 | 2013-10-15 | Owens Corning Intellectual Capital, Llc | To enhance the thermal insulation of polymeric foam by reducing cell anisotropic ratio and the method for production thereof |
| JP2004335743A (ja) * | 2003-05-08 | 2004-11-25 | Ulvac Japan Ltd | 真空処理装置用真空チャンバー |
| JP4838661B2 (ja) * | 2005-09-30 | 2011-12-14 | Nke株式会社 | ピッキングシステム |
| DE102019208435A1 (de) | 2019-06-11 | 2020-12-17 | Christof-Herbert Diener | Erweiterbare Vakuumkammer und Verfahren zur Herstellung einer erweiterbaren Vakuumkammer |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2950029A (en) * | 1956-10-29 | 1960-08-23 | Hedwin Corp | Container |
| US3497665A (en) * | 1966-12-29 | 1970-02-24 | Rohr Corp | Apply type electron beam welding apparatus |
| US3493711A (en) * | 1967-06-01 | 1970-02-03 | Nasa | Split welding chamber |
| US3925959A (en) * | 1967-09-22 | 1975-12-16 | Gen Foods Corp | Tetrahedral packaging means and method of making same |
| US3610872A (en) * | 1968-10-07 | 1971-10-05 | Welding Research Inc | Electron beam welding machine of clamshell construction |
| FR2063958A1 (enExample) * | 1969-10-10 | 1971-07-16 | Secasi |
-
1981
- 1981-08-13 FR FR8115671A patent/FR2511265A1/fr active Granted
-
1982
- 1982-07-06 US US06/395,377 patent/US4454407A/en not_active Expired - Fee Related
- 1982-08-06 DE DE8282401493T patent/DE3262794D1/de not_active Expired
- 1982-08-06 EP EP82401493A patent/EP0072740B1/fr not_active Expired
- 1982-08-06 AT AT82401493T patent/ATE12438T1/de not_active IP Right Cessation
- 1982-08-10 JP JP57139084A patent/JPS5838684A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| ATE12438T1 (de) | 1985-04-15 |
| FR2511265B1 (enExample) | 1983-11-10 |
| FR2511265A1 (fr) | 1983-02-18 |
| US4454407A (en) | 1984-06-12 |
| EP0072740A1 (fr) | 1983-02-23 |
| EP0072740B1 (fr) | 1985-03-27 |
| DE3262794D1 (en) | 1985-05-02 |
| JPS5838684A (ja) | 1983-03-07 |
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