GB2120141A - Vacuum workpiece holder - Google Patents

Vacuum workpiece holder Download PDF

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Publication number
GB2120141A
GB2120141A GB08313405A GB8313405A GB2120141A GB 2120141 A GB2120141 A GB 2120141A GB 08313405 A GB08313405 A GB 08313405A GB 8313405 A GB8313405 A GB 8313405A GB 2120141 A GB2120141 A GB 2120141A
Authority
GB
United Kingdom
Prior art keywords
cavity
workpiece
bearing surface
cavities
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB08313405A
Other versions
GB8313405D0 (en
Inventor
Kenneth O Wood
Thomas A Gordon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gerber Scientific Products Inc
Original Assignee
Gerber Scientific Products Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gerber Scientific Products Inc filed Critical Gerber Scientific Products Inc
Publication of GB8313405D0 publication Critical patent/GB8313405D0/en
Publication of GB2120141A publication Critical patent/GB2120141A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005Vacuum work holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
  • Physical Vapour Deposition (AREA)
  • Jigs For Machine Tools (AREA)

Abstract

A workpiece holder includes an air-impermeable flexible sheet 14 for engaging a workpiece w and a means for pulling a portion of the sheet away from the workpiece to create a vacuum space or pocket which holds the workpiece to the holder. The workpiece holder may have a relatively large workpiece bearing surface 24 covered by the sheet 14 together with the ability to create a large number of vacuum spaces dispersed over the area of the bearing surface to allow the holder to be used with a wide range of workpiece sizes. The means for pulling the sheet away from the workpiece may be a vacuum source or a system of cranks and pull rods. <IMAGE>

Description

SPECIFICATION Vacuum workpiece holder This invention relates generally to a vacuum chuck or similar device for holding workpieces, and deals more particularly with a chuck having a workpiece engageable surface and which, at the will of an operator, creates a holding vacuum between a portion of the workpiece engageable surface and a workpiece in contact with the surface.
The general type of vacuum workpiece holder to which this invention may be compared is well known. Examples of such holders are disclosed in a pending application having the same assignee as the present invention (Serial no. 304,152) and prior U.S. Patents No.
1,198,402; No. 3,156,462 and No.
4,221,356. In such prior art devices, a workpiece support surface is provided by an airpermeable member overlying a vacuum chamber or other vacuum space. When a workpiece is placed on the support surface, vacuum pressure passing through the air-permeable member from the vacuum space is applied to the bottom surface of the workpiece causing, in conjunction with atmospheric pressure, a force to be applied to the workpiece pushing it tightly against the support surface.
Noteworthy, however, in the prior art devices, is that the air-permeable member provides air flow paths between the workpiece and the vacuum space. Such air flow paths are provided in the air-permeable member of the above-referenced patents by at least one clearly defined hole passing through the member or by the pores of porous material comprising the member. The primary advantage associated with any airflow paths in the support member is that if the holder operates with a vacuum pump, the holder possesses continuous holding capacity as the space beneath the air-permeable member is continually evacuated by the vacuum pump.Typically, however, if there exists in the air-permeable member a plurality of airflow paths and if the workpiece to be held is of such size so as not to cover all of the airflow paths, the air leaks through the exposed paths severely limit the holding effectiveness of the device due to the lowering of the vacuum pressure in the vacuum space. To overcome this vacuum-negating effect of the air moving through the member into the space, the holding device generally requires a high-capacity vacuum pump or the uncovered air paths must be sealed or masked to avoid air leaks.
It is a general object of this invention to provide a vacuum chuck or workpiece holder which employs a workpiece engaging member through which no air is permitted to flow and which therefore obviates the aforementioned limitations associated with prior art vacuum holding devices.
A more particular object of the invention is to provide a vacuum chuck or workpiece holder capable of accommodating a broad range of workpiece sizes without requiring any masking or sealing of air leaks of the support member. That is, the workpiece holder of the invention will accept and satisfactorily hold any workpiece placed in engagement with it and falling within a wide size range, providing only that the workpiece is relatively non-porous and has a holder-engaging surface generally conforming or capable of conforming to the shape of the holder surface.
Other objects and advantages of the invention will be apparent from the following detailed description and from the accompanying drawings and claims.
This invention resides in a workpiece holder having air-impermeable means defining a bearing surface and a cavity within the bearing surface. The defined cavity is flush with and completely surrounded by the bearing surface. A sheet of air-impermeable flexible material is spread over the bearing surface and cavity and forms a seal with the bearing surface around the cavity. Means are included for drawing, at the will of an operator, the airimpermeable flexible material which covers the cavity into the cavity so that if a workpiece is placed against the sheet of air-impermeable material in overlying relation to the cavity and the cavity-covering portion of the material is then drawn into the cavity, the workpiece and holder will be held together by a vacuum space created between the workpiece and the portion of material which is drawn into the cavity.
The invention resides in a workpiece holder capable of creating at least one vacuum space between the workpiece and the air-impermeable flexible material. It also resides in a workpiece holder having a relatively large workpiece supporting surface and able to create a plurality of such vacuum spaces. Such a workpiece holder with a relatively large supporting surface and the ability to create a plurality of vacuum spaces obviates the aforementioned limitations associated with prior art holders having a plurality of airflow paths and which are used to hold workpieces falling within a wide size range.With no airflow paths in the workpiece holder, there is no need to mask or seal air paths left uncovered by a workpiece, and the workpiece holder is capable of handling a wide variety of workpiece sizes without requiring any masking or sealing of the support member when switching from one workpiece to another regardless of whether the successive workpieces are of the same or different size.
Figure 1 is a perspective view showing a vacuum workpiece holder or chuck embodying the present invention.
Figure 2 is a vertical cross-sectional view taken along the line 2-2 of Fig. 1.
Figure 3 is an enlarged view of one of the vacuum cavities of Fig. 2.
Figure 4 is a view similar to Fig. 2 but shows an alternative embodiment of the invention and illustrates the condition of the flexible sheet material before being pulled at various locations into the holder cavities.
Figure 5 is a view of the Fig. 4 work holder illustrating the condition of the flexible material after being pulled at various locations into the holder cavities.
Fig. 1 illustrates a workpiece holder, generally designated 10, incorporating the present invention. The work holder includes a support means in the form of a broad, flat support member shown generally at 12, a flexible sheet of air-impermeable material 14 overlying the upper surface of the support member, and a vacuum pump 16. A workpiece W which is substantially non-porous and has a relatively smooth bottom surface is positioned on the sheet of flexible material 1 4.
Referring to Fig. 2, the support member 14 consists in part of a cup-shaped frame 1 8 and a thick plate 20 which overlies the frame 1 8 and forms an air-tight seal with the upper edges of the frame. A plurality of legs 22, 22 is attached to the underside of the frame 1 8 and support the weight of the support member 1 2 and a workpiece W placed thereon.
The thick plate 20 is a rigid body of airimpermeable material such as metal or plastic and has an upper bearing surface 24.
As shown in Figs. 1-3, the bearing surface 24 is flat and particularly well adapted to support workpieces having flat bottom surfaces. However, if a workpiece desired to be held has a curved bottom surface, a workpiece holder in accordance with this invention should have a curved bearing surface conforming to the shape of the workpiece. It will be understood, therefore, that although the bearing surface 24 of the support member is shown to be flat, such flatness is not essential to the invention and has been chosen for illustration purposes only.
Defined in the plate 20 of the support member 1 2 is a plurality of cavities 26, 26 dispersed over the area of the bearing surface 24. Each cavity 26 is flush with and completely surrounded by the bearing surface so as to be isolated from adjacent cavities along lines located in the surface 24. Each cavity is partly in the form of a concave recess 30 in the bearing surface and partly in the form of a smaller cylindrical bore 32 extending from the center of the recess 30 through the plate 20.
Spread over the bearing surface and the cavities is a flexible sheet of air-impermeable elastomeric material 14 such as rubber or neoprene. Referring to Fig. 3, the portion of sheet material engaging the support surface, indicated at 34, and encircling the cavities forms a seal with the bearing surface around the cavities and prevents air from entering the cavities from the bearing surface side of the plate 20. The portion of sheet material covering each cavity, indicated at 36, provides each cavity with a resilient membrane cover.
In its undeformed condition, each portion 36 of material 14 which overlies a cavity 26 lies in a plane, its planar condition illustrated by the broken lines in Fig. 3. The flexibility of the sheet material 14 permits a cavity-covering portion 36 of material to be drawn into its respective cavity, as illustrated in solid lines in Fig. 3, when a vacuum is drawn therein, as will be described hereinafter. When the cavity vacuum is relieved, the portion 36 springs back to its undeformed condition.
Referring to Fig. 1, the vacuum pump 1 6 is connected to the support member 12 through a vacuum hose 38. The vacuum hose 38 is received through a hole in a side of the frame 1 8 of the support member allowing a vacuum to be drawn within the interior space of the frame 18 when the pump 16 is energized. As best shown in Fig. 2, the cavity spaces of the support member plate 20 communicate with one another through the interior space of the frame 1 8 and therefore will be evacuated simultaneously by the pump 1 6 as the frame interior is evacuated. The pump 1 6 includes an ON/OFF switch 40 so that the pump operation may be controlled at the will of an operator.
To utilize the workpiece holder 10 of this invention, a workpiece W is placed, while the vacuum pump 1 6 is OFF, on the upper surface of the sheet of air-impermeable material 14 so as to overlie at least one cavity 26.
When the workpiece is in place, the pump 1 6 is switched ON. The vacuum drawn by the pump in the interior of the support member frame 1 8 and the cavities 26, 26 draw the cavity-covering portions 36, 36 of material into their respective cavities. The workpiece W is thereby held against the support member 1 2 by the vacuum spaces 42, 42 shown in Fig. 2, created between the bottom surface of the workpiece and the material portions 36, 36 drawn into the cavities. As long as the bottom surface of the workpiece completely overlies at least one cavity, the workpiece may be of any size that is supportable by the support member 14.
Figs. 4 and 5 show a workpiece holder 44 comprising another embodiment of this invention. The holder 44 includes a support member 46 having an upper plate 50, a lower plate 54, and a cup-shaped frame 56 secured together in a layered arrangement as shown.
The upper plate defines a bearing surface 48 and contains a plurality of cylindrical cavitydefining through bores 52, 52 of uniform size distributed over the bearing surface 48. The lower plate 54 contains a plurality of cylindrical cavity-defining through bores 58, 58 of substantially smaller diameter than the bores 52, 52 of the upper plate 50. When the upper and lower plates are secured together, each bore 52 of the upper plate is in coaxial alignment with a bore 58 of the lower plate.
Spread over the workpiece bearing surface 48 and the cavities defined by the bores 52, 52 is a flexible sheet of air-impermeable material 59.
In the workpiece holder 44, the portions of material overlying the bores 52, 52 are connected by suitable means, such as glue, to the upper ends of mechanical pull-rods 60, 60.
Each pull rod 60 extends from the underside of the sheet material 59 through the coaxially aligned bores of the upper and lower plates and is connected at its lower end to a linkage assembly 80. The linkage assembly includes a crankshaft 62 and several pairs of parallel linkage bars 82, 82. Each linkage bar is arranged adjacent and parallel to the other bar in its respective pair and is pivotally connected at one end to a portion 84 of the crankshaft 62 passing through a hole defined in the one end of each bar. The lower end of each pull-rod 60 is positioned between the bars of a respective pair of linkage bars and pivotally connected thereto by a pivot pin received in co-aligning holes defined in the pull-rod and linkage bars.The crankshaft 62 is supported at its opposite ends by bearings mounted in opposite sides of the frame 56 and at various locations along its length by support pedestals 64, 64 mounted in the support frame 56. One end of the crankshaft 62 extends through a side of the frame 56 where a handle 66 is fixed to it. The handle 66 allows an operator to turn the crankshaft 62 to thereby raise and lower the portions of material 59 disposed over the upper plate bores 52, 52 as the pull-rods slide up and down in the small bores 58, 58 of lower plate 54.
To utilize the workpiece holder 44, a workpiece is placed on the upper surface of the airimpermeable sheet material so as to overlie at least one cavity while the pull-rods 60, 60 are positioned in their uppermost positions in the support member 46, as shown in Fig. 4.
When the workpiece is in place, the handle 66 is turned by an operator to move the pull rods 60, 60 toward their lowermost position in the support member, as shown in Fig. 5, so that the cavity covering portions of material are drawn into their respective cavities. The workpiece then becomes held to the support member 46 by vacuum spaces 68, 68 created between the bottom surface of the workpiece X and the material portions drawn into the cavities.
It will be understood that modifications may be made to the embodiments described herein without departing from the spirit of the invention. For example, although the embodiments described herein have been shown to be of a generally stationary character, the stationary character of the holder is not essential to the invention. The work holder may be stationary relative to the earth or some support and used with a tool or instrument moved by hand or machine, or the holder may be movable by hand or machine and used with a stationary tool or instrument. Furthermore, although the cavity openings flush with the bearing surface have been shown to be circular in shape, the circular shape is not essential to the invention.
It may be advantageous in some workpiece holding applications that a single cavity opening resembles the bottom shape of the workpiece, so it will be understood that any cavity opening in the bearing surface may resemble any geometric shape and still be in accordance with the broader aspects of the invention.
The embodiment of Figs. 4 and 5 illustrate a crankcase linkage assembly for mechanically pulling the cavity-covering portions of the sheet material into the associated cavities, but such a linkage assembly is not essential to the invention. Means for mechanically pulling the material into the cavities may be provided by a linkage assembly including toggle joints.
Accordingly, the embodiments are intended as illustration and not as limitation.

Claims (11)

1. A workpiece holder comprising: support means consisting of an air-impermeable material defining a bearing surface and a cavity within said bearing surface, said cavity being flush with and completely surrounded by said bearing surface; a flexible sheet of air-impermeable material spread over said bearing surface and cavity, a portion of said material covering said cavity and another portion of said material encircling said cavity and forming a seal with said bearing surface around said cavity; and means for drawing at the will of an operator said portion of material covering said cavity into said cavity so that if a workpiece is placed against said sheet material in overlying relation to said cavity and said cavity-covering portion of sheet material is then drawn into said cavity, said workpiece and holder will be held together by a vacuum space created between said workpiece and said portion of said air-impermeable flexible material which is drawn into said cavity.
2. A workpiece holder as defined in claim 1 wherein said means for drawing said portion of material covering said cavity includes: a vacuum pump, and an air conduit connected between said bearing surface defining means and said vacuum pump permitting said pump to communicate with said cavity.
3. A workpiece holder as defined in claim 1 wherein said means for drawing said portion of material covering said cavity includes: a mechanical means operatively connected to said portion of sheet material covering said cavity.
4. A workpiece holder as defined in claim 3 wherein said mechanical means includes: a rod connected at one end to said portion of said sheet material covering said cavity and axially slidable relative to said support means between a first position at which said portion of sheet material covering said cavity is flush with said bearing surface and a second position at which said portion of sheet material covering said cavity is drawn into said cavity.
5. A workpiece holder as defined in claim 1 wherein said support means includes: a plate having a flat face and a recess in said face, said flat face comprising said bearing surface and said recess comprising said cavity in said surface.
6. A workpiece holder as defined in claim 1 wherein said flexible sheet of air-impermeable material is a sheet of elastomeric material.
7. The workpiece holder as defined in claim 1 wherein: said cavity is a first cavity and said support means includes at least a second cavity within said bearing surface, said second cavity being flush with and completely surrounded by said bearing surface so that said cavities are isolated from one another along lines located in said bearing surface; said flexible sheet of air-impermeable material is also spread over said second cavity, a portion of said material covering said second cavity and another portion of said material encircling said second cavity and forming a seal with said bearing surface around said second cavity; and said means for drawing said portion of sheet material into said cavity includes means for simultaneously drawing said portions of sheet material covering both of said cavities into both of said cavities so that when a workpiece is placed against said sheet of air-impermeable material in overlying relation to both of said cavities and said cavity-covering portions of air-impermeable material are then drawn into their respective cavities, said workpiece and holder will be held to one another by the vacuum spaces created between said workpiece and both of said portions of air-impermeable flexible material drawn into said two cavities.
8. A workpiece holder as defined in claim 7 wherein said means for drawing said cavitycovering portion of air-impermeable material in said cavity is: a single vacuum pump; and two air conduits connected between said bearing surface defining means and said vacuum pump permitting said pump to simultaneously communicate with each of said two cavities.
9. A workpiece holder as defined in claim 7 wherein said means for drawing said cavitycovering portion of air-impermeable material into said cavity is: a mechanical means operatively connected to each of said two cavitycovering portions of air-impermeable material.
10. A workpiece holder as defined in claim 9 wherein said mechanical means for drawing includes: two rods each of which is connected at one of its ends to a respective one of said two cavity-covering portions of sheet material, each of said two rods being axially slidable relative to said support means between a first position at which the associated one of said cavity-covering portions of sheet material is flush with said bearing surface and a second position at which said associated one of said cavity-covering portions is drawn into its associated one of said cavities, and means operable at the will of an operator for selectively moving said rods simultaneously between said first and second positions.
11. A workpiece holder comprising: support means consisting of an air-impermeable material defining a bearing surface and a plurality of cavities within said bearing surface, each of said cavities being flush with and completely surrounded by said bearing surface so that each of said cavities is isolated from the others along lines located in said bearing surface; a flexible sheet of air-impermeable material spread over said bearing surface and said cavities, a portion of said sheet covering each cavity and another portion of said sheet encircling each of said cavities and forming a seal with said bearing surface around each of said cavities; and means for drawing at the will of an operator all of said portions of said sheet covering said cavities simultaneously into their respective cavities so that when a workpiece is placed against said sheet in overlying relation to at least one of said cavities and said cavity-covering portions of sheet are drawn into their respective cavities, said workpiece and holder will be held to one another by the vacuum space created between said workpiece and the portion of said sheet covering said at least one cavity.
1 2. A workpiece holder substantially as herein described and shown in the accompanying drawings.
GB08313405A 1982-05-18 1983-05-16 Vacuum workpiece holder Withdrawn GB2120141A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US37928682A 1982-05-18 1982-05-18

Publications (2)

Publication Number Publication Date
GB8313405D0 GB8313405D0 (en) 1983-06-22
GB2120141A true GB2120141A (en) 1983-11-30

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ID=23496624

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08313405A Withdrawn GB2120141A (en) 1982-05-18 1983-05-16 Vacuum workpiece holder

Country Status (4)

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JP (1) JPS58206335A (en)
DE (1) DE3318277A1 (en)
FR (1) FR2527124A1 (en)
GB (1) GB2120141A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4667944A (en) * 1985-08-29 1987-05-26 Vichem Corporation Means for handling semiconductor die and the like
US4711014A (en) * 1985-08-29 1987-12-08 Vichem Corporation Method for handling semiconductor die and the like
US4778326A (en) * 1983-05-24 1988-10-18 Vichem Corporation Method and means for handling semiconductor and similar electronic devices
US5660380A (en) * 1995-08-15 1997-08-26 W. L. Gore & Associates, Inc. Vacuum fixture and method for dimensioning and manipulating materials
US5749614A (en) * 1995-12-04 1998-05-12 Motorola, Inc. Vacuum pickup tool for placing balls in a customized pattern
US6139079A (en) * 1997-10-20 2000-10-31 Motorola, Inc. Universal transport apparatus
EP1109207A1 (en) * 1999-12-14 2001-06-20 Esec SA Sucking device for holding down a substrat
EP1109205A1 (en) * 1999-12-14 2001-06-20 Esec Trading S.A. Die bonder and/or wire bonder with a suction device for pulling flat and holding down a curved substrate
US6435492B1 (en) 1999-12-14 2002-08-20 Esec Trading Sa Die bonder and/or wire bonder with a suction device for pulling flat and holding down a curved substrate
US6764258B1 (en) * 2002-10-25 2004-07-20 Brian Akre Positionable vacuum clamp system
US6792878B2 (en) * 2002-05-21 2004-09-21 Meng-Chieh Cheng Work table with a sawdust collecting mechanism
US6802266B2 (en) * 2002-05-21 2004-10-12 Meng-Chieh Cheng Work table with a sawdust collecting mechanism
JP2010013189A (en) * 2009-08-25 2010-01-21 Mitsubishi Electric Corp Tray for semiconductor element
US8272630B2 (en) 2004-07-01 2012-09-25 Airbus Operations Gmbh Device for fixing especially surface-like workpieces having an attachment surface
CN105288967A (en) * 2015-12-02 2016-02-03 苏州聚慧体育用品有限公司 Table tennis ball jig
CN107234462A (en) * 2017-06-30 2017-10-10 广东长盈精密技术有限公司 Workpiece locating mechanism

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JPS6097676A (en) * 1983-11-01 1985-05-31 Sumitomo Electric Ind Ltd Semiconductor pressure sensor and manufacture thereof
DE3532020C1 (en) * 1985-09-07 1987-02-05 Witte Entwicklungs-Und V Horst Device for clamping workpieces with a basic body and a coating with permanent adhesive effect as a clamping device
JPH0516084U (en) * 1991-03-14 1993-03-02 株式会社エフエスケー Vacuum check
CN102642142B (en) * 2012-04-27 2015-05-06 浙江西子航空工业有限公司 Fixing clamp and method for manufacturing aluminum honeycomb machinery
CN106862955A (en) * 2015-12-11 2017-06-20 焱智精密机械(上海)有限公司 For the fixture of thin plate processing
CN108789226A (en) * 2018-08-07 2018-11-13 浙江舜宇光学有限公司 A kind of vacuum suction jig
CN112476295B (en) * 2020-12-15 2023-04-28 霸州市云谷电子科技有限公司 Vacuum adsorption device
CN113799477A (en) * 2021-10-09 2021-12-17 山东芯恒光科技有限公司 Vacuum suction equipment

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Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4778326A (en) * 1983-05-24 1988-10-18 Vichem Corporation Method and means for handling semiconductor and similar electronic devices
US4667944A (en) * 1985-08-29 1987-05-26 Vichem Corporation Means for handling semiconductor die and the like
US4711014A (en) * 1985-08-29 1987-12-08 Vichem Corporation Method for handling semiconductor die and the like
US5660380A (en) * 1995-08-15 1997-08-26 W. L. Gore & Associates, Inc. Vacuum fixture and method for dimensioning and manipulating materials
US5782152A (en) * 1995-08-15 1998-07-21 W. L. Gore & Associates, Inc. Vacuum fixture and method for dimensioning and manipulating materials
US5800661A (en) * 1995-08-15 1998-09-01 W. L. Gore & Associates, Inc. Vacuum fixture and method for dimensioning and manipulating materials
US5870937A (en) * 1995-08-15 1999-02-16 W. L. Gore & Associates, Inc. Vacuum fixture and method for dimensioning and manipulating materials
US5906363A (en) * 1995-08-15 1999-05-25 W. L. Gore & Associates, Inc. Vacuum fixture and method for dimensioning and manipulating materials
US5749614A (en) * 1995-12-04 1998-05-12 Motorola, Inc. Vacuum pickup tool for placing balls in a customized pattern
US6139079A (en) * 1997-10-20 2000-10-31 Motorola, Inc. Universal transport apparatus
EP1109207A1 (en) * 1999-12-14 2001-06-20 Esec SA Sucking device for holding down a substrat
EP1109205A1 (en) * 1999-12-14 2001-06-20 Esec Trading S.A. Die bonder and/or wire bonder with a suction device for pulling flat and holding down a curved substrate
US6435492B1 (en) 1999-12-14 2002-08-20 Esec Trading Sa Die bonder and/or wire bonder with a suction device for pulling flat and holding down a curved substrate
US6792878B2 (en) * 2002-05-21 2004-09-21 Meng-Chieh Cheng Work table with a sawdust collecting mechanism
US6802266B2 (en) * 2002-05-21 2004-10-12 Meng-Chieh Cheng Work table with a sawdust collecting mechanism
US6764258B1 (en) * 2002-10-25 2004-07-20 Brian Akre Positionable vacuum clamp system
US8272630B2 (en) 2004-07-01 2012-09-25 Airbus Operations Gmbh Device for fixing especially surface-like workpieces having an attachment surface
JP2010013189A (en) * 2009-08-25 2010-01-21 Mitsubishi Electric Corp Tray for semiconductor element
CN105288967A (en) * 2015-12-02 2016-02-03 苏州聚慧体育用品有限公司 Table tennis ball jig
CN107234462A (en) * 2017-06-30 2017-10-10 广东长盈精密技术有限公司 Workpiece locating mechanism

Also Published As

Publication number Publication date
JPS58206335A (en) 1983-12-01
DE3318277A1 (en) 1983-11-24
GB8313405D0 (en) 1983-06-22
FR2527124A1 (en) 1983-11-25

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WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)