CN108789226A - A kind of vacuum suction jig - Google Patents
A kind of vacuum suction jig Download PDFInfo
- Publication number
- CN108789226A CN108789226A CN201810890878.5A CN201810890878A CN108789226A CN 108789226 A CN108789226 A CN 108789226A CN 201810890878 A CN201810890878 A CN 201810890878A CN 108789226 A CN108789226 A CN 108789226A
- Authority
- CN
- China
- Prior art keywords
- orifice plate
- hole
- groove
- vacuum suction
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
- G01M11/0214—Details of devices holding the object to be tested
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B43/00—Testing correct operation of photographic apparatus or parts thereof
Abstract
The present invention relates to a kind of vacuum suction jigs, including：Orifice plate and substrate；The hole plate array is provided with through-hole, fluted, the orifice plate and substrate interconnection is arranged on the substrate, and the through-hole is interconnected with the groove；The suction hole for being evacuated to the groove, and the transfer port for supplying gas the groove are additionally provided on the substrate.Suction hole and external air extractor are connected with each other, can be extracted out the gas of groove by air extractor, to enable groove to constitute a vacuum environment, to make the through-hole being connected with groove that will be adsorbed positioned at the material of orifice plate upper surface.It ensure that each position of material can be born against on orifice plate upper surface, ensure that the flatness of material.Transfer port and compressed air source unit are connected with each other, gas can be sent into groove by compressed air source unit, to enable the material in adsorbed state to be rapidly separated with orifice plate, consequently facilitating material is removed.
Description
Technical field
The present invention relates to a kind of jig more particularly to a kind of vacuum suction jigs.
Background technology
In Shot Detection production process, the required precision that the performance of camera lens coordinates between detection pallet is very high, the two
Between gap it is very small, therefore the required precision of jig is critically important.By optical design test request, need on test pallet
Smooth one block of glass of attaching bears against tested screen test, its technique and glass planar during test pallet attaches glass
Degree requires very high, should ensure that the depth of parallelism of glass will also ensure that glass is attached to pallet while ensureing the pallet depth of parallelism
The depth of parallelism after upper.Therefore, before attaching glass on test pallet, need to ensure the glass in transportational process on jig
Flatness, and attach after the completion of, glass can be rapidly separated.In traditional technology, the suction nozzle that can be arranged by array transports
Glass, but since suction nozzle is mutual indepedent, is easy to cause when glass is adsorbed and generates deformation, flatness is influenced, or can also pass through
Vacuum suction jig is transported, but usually glass is from jig when being detached from, due to needing the vacuum environment disappearance glass in jig
Glass could be detached from from jig, influence working efficiency.
Invention content
The purpose of the present invention is to provide a kind of vacuum suction jigs, and the material on jig is enable to be rapidly separated.
For achieving the above object, the present invention provides a kind of vacuum suction jig, including：Orifice plate and substrate；
The hole plate array is provided with through-hole, is arranged fluted on the substrate, and the orifice plate is mutually interconnected with the substrate
It connects, and the through-hole is interconnected with the groove；
It is additionally provided with the suction hole for being evacuated to the groove on the substrate, and for supplying gas the groove
Transfer port.
According to an aspect of the present invention, the suction hole and the transfer port are originated by the lateral surface of the substrate respectively
And the medial surface for extending to the groove terminates, and the suction hole and the transfer port are oppositely arranged.
According to an aspect of the present invention, the orifice plate upper surface of the orifice plate is provided with gasket groove and dismountable peace
Gasket in the gasket groove；
The thickness of the gasket is more than the thickness of the depth of the gasket groove and the material of orifice plate upper surface carrying
The sum of.
According to an aspect of the present invention, the gasket groove is at least three, and the gasket groove is arranged in a ring.
According to an aspect of the present invention, the orifice plate upper surface of the orifice plate is additionally provided with positioning column；
The positioning column at least two, and spaced setting.
According to an aspect of the present invention, the groove is the linear grooves of detour type, and the suction hole and described defeated
Stomata is located at the head and the tail both ends of the groove.
According to an aspect of the present invention, the suction hole and the transfer port are originated by the lateral surface of the substrate respectively
And the medial surface for extending to the groove terminates；
The transfer port at least two, and the mutually equally spaced setting of the transfer port.
According to an aspect of the present invention, on the substrate the first of the groove vicinity is looped around at least provided with one
Annular seal arrangement is provided with the second annular seal arrangement to match with first annular seal arrangement on the orifice plate.
According to an aspect of the present invention, the first annular seal arrangement annular boss or annular recess, described second
Annular seal arrangement is annular recess or annular boss.
According to an aspect of the present invention, the connection knot for installing handle is additionally provided on the orifice plate or the substrate
Structure.
According to an aspect of the present invention, the through-hole is that rectangular array is arranged or annular array is arranged；
If the through-hole is arranged for rectangular array, the through-hole is transversely evenly spaced on longitudinal respectively.And along vertical
It is equal to the interval with transverse direction；
If the through-hole is arranged for annular array, along the circumferential direction angularly uniform intervals arrange the through-hole.
According to an aspect of the present invention, the aperture of the through-hole is less than 2mm.
According to an aspect of the present invention, the flatness tolerance of the orifice plate upper surface is less than 2 μm.
Suction hole and external air extractor (such as vacuum pump) are connected with each other by a kind of scheme according to the present invention, can
The gas of groove is extracted out by air extractor, to enable groove to constitute a vacuum environment, to make to be connected with groove
Through-hole will be adsorbed positioned at the material of orifice plate upper surface.In the present embodiment, the through-hole of rectangular array setting, it is along longitudinal direction and horizontal
To interval be equal, to make the uniform force on surface that the material (such as glass substrate) of absorption is in contact with orifice plate,
It ensure that each position of material can be born against on orifice plate upper surface, ensure that the flatness of material, and then ensure that material
Precision during completed knocked down products improves the assembly precision of product.Transfer port and compressed air source unit are connected with each other, can be passed through
Compressed air source unit is sent into gas into groove, to enable the material in adsorbed state to be rapidly separated with orifice plate, consequently facilitating
Material is removed.It is sent into the intake of gas by control, can also material be made to lift up, to enable material to be more prone to
It removes.
A kind of scheme according to the present invention, by being arranged in the aperture of through-hole in 2mm hereinafter, so as to avoid being held on orifice plate
For the material (such as glass substrate) of load when by vacuum suction, the aperture of through-hole is excessive to cause material recessed in the generation of the position of through-hole
It falls into and waits deformation.Therefore, by the way that the aperture setting of through-hole within the above range, ensure that flatness of the material when being adsorbed,
It ensure that the quality of product in follow-up producing process.By being arranged the flatness tolerance of orifice plate upper surface at 2 μm, thus into one
Step ensure that flatness of the material (such as glass substrate) carried on orifice plate when by vacuum suction, avoid the surface of orifice plate
Uneven the case where causing material to deform, further to the quality of product in guarantee follow-up producing process.
A kind of scheme according to the present invention, by the suction hole and transfer port being oppositely arranged, by transfer port to groove
In be passed through gas during, be conducive to the flowing velocity of gas in a groove, allow gas to be evenly distributed in a short time
In groove, improves material and be detached from efficiency.Meanwhile the gas flow overflowed in each position through-hole when the material on orifice plate being made to be detached from is equal
It is even, make the uniform force of material each position, avoids situations such as generating bending when material is detached from orifice plate.
A kind of scheme according to the present invention, by the way that multiple transfer ports and mutually equally spaced setting is arranged, to advantageous
It is passed through gas into groove simultaneously in from different directions, improves the efficiency for being passed through gas, and defeated by what is be spacedly distributed
Stomata makes the gas being passed through be uniformly distributed in a groove, not only increases material and is detached from efficiency.Meanwhile making material on orifice plate
The gas flow overflowed in the through-hole of each position when disengaging is uniform, makes the uniform force of material each position, avoids material and is detached from hole
Situations such as bending is generated when plate.
A kind of scheme according to the present invention, the material adsorbed on orifice plate in an assembling process, by the way that gasket is arranged to make
Other jigs or component are directly in contact with gasket, avoid the material for directly bearing against and being adsorbed on orifice plate, and then avoid
Deformation or scuffing of material etc. ensure that material flatness and surface quality, and then the quality of the product to assembling.
A kind of scheme according to the present invention, the material adsorbed on orifice plate in an assembling process, by be arranged positioning column to
Make other jigs or component pass through to be connected with positioning column, you can ensure the relative position of the material and other materials on orifice plate
Accurately, the accurate of material assembling position, and then the quality of the product to assembling be ensure that.
A kind of scheme according to the present invention is passing through suction hole pumping or gas transmission by setting groove to linear grooves
When hole is supplied gas, the flowing of gas in groove is flowed in the same direction, is avoided when carrying out pumping or gas transmission to groove, gas in groove
The disorder of stream, to ensureing that stablizing for material is adsorbed or be detached from favorably on orifice plate.
Description of the drawings
Fig. 1 schematically shows a kind of structure chart of the orifice plate of embodiment according to the present invention；
Fig. 2 schematically shows a kind of structure chart of the substrate of embodiment according to the present invention；
Fig. 3 schematically shows a kind of structure chart of the gasket of embodiment according to the present invention.
Specific implementation mode
It, below will be to embodiment in order to illustrate more clearly of embodiment of the present invention or technical solution in the prior art
Needed in attached drawing be briefly described.It should be evident that the accompanying drawings in the following description is only some of the present invention
Embodiment for those of ordinary skills without creative efforts, can also be according to these
Attached drawing obtains other attached drawings.
When being described for embodiments of the present invention, term " longitudinal direction ", " transverse direction ", "upper", "lower", " preceding ",
" rear ", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", the orientation or positional relationship expressed by "outside" are to be based on phase
Orientation or positional relationship shown in the drawings is closed, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark
Show that signified device or element must have a particular orientation, with specific azimuth configuration and operation, therefore above-mentioned term cannot
It is interpreted as limitation of the present invention.
The present invention is described in detail with reference to the accompanying drawings and detailed description, embodiment cannot go to live in the household of one's in-laws on getting married one by one herein
It states, but therefore embodiments of the present invention are not defined in following implementation.
In conjunction with shown in Fig. 1 and Fig. 2, a kind of embodiment according to the present invention, a kind of vacuum suction jig of the invention, packet
Include orifice plate 1 and substrate 2.In the present embodiment, array is provided with through-hole 11 on orifice plate 1, and orifice plate 1 is plate body, and through-hole 11 passes through
The orifice plate upper surface 12 and orifice plate lower surface of perforated plate 1.By be arranged through-hole 11 can also to carried on orifice plate 1 material (such as
Glass substrate) thang-kng is carried out, it is beneficial for the glue solidifies on product in follow-up producing process to have exposure function, it carries
High the glue solidifies efficiency, improves production efficiency.In the present embodiment, the aperture of through-hole 11 is less than 2mm.Passing through will
The aperture of through-hole 11 is arranged in 2mm hereinafter, being inhaled by vacuum so as to avoid the material (such as glass substrate) carried on orifice plate 1
When attached, the aperture of through-hole 11 is excessive to cause material that the deformations such as recess occur in the position of through-hole 11.Therefore, by by through-hole 11
Aperture is arranged within the above range, ensure that flatness of the material when being adsorbed, ensure that product in follow-up producing process
Quality.In the present embodiment, the flatness tolerance of the orifice plate upper surface 12 of orifice plate 1 is less than 2 microns.By by orifice plate upper surface
12 flatness tolerance is arranged at 2 microns, to further ensure the material carried on orifice plate 1 (such as glass substrate) in quilt
The case where flatness when vacuum suction, avoiding the surface irregularity of orifice plate 1 causes material to deform, further to protecting
Demonstrate,prove the quality of product in follow-up producing process.In the present embodiment, fluted 21 are arranged on substrate 2, groove 21 is by base
The upper surface of base plate 2a of plate 2 is originated to be extended to the direction of base lower surface.In the present embodiment, groove 21 is opening in polygon
Shape (such as rectangle, diamond shape, regular polygon etc.) or circular groove.Orifice plate 1 is connected with each other with substrate 2.In present embodiment
In, orifice plate 1 covers on a substrate 2, and orifice plate lower surface is abutted with upper surface of base plate 2a, can pass through spiral shell between orifice plate 1 and substrate 2
The mode of line connection, orifice plate 1 and substrate 2 are fixed to each other.In the present embodiment, after orifice plate 1 and substrate 2 are connected with each other, lead to
The position in hole 11 is corresponded with groove 21, to make through-hole 11 be interconnected with groove 21.In the present embodiment, through-hole 11
It is arranged for rectangular array, and through-hole 11 is transversely evenly spaced on longitudinal respectively.Or through-hole 11 sets for annular array
It sets, and along the circumferential direction angularly uniform intervals arrange through-hole 11.In the present embodiment, orifice plate 1 selects corrosion resistance, resistance to
The mill property material good with mechanical machinability ensures that orifice plate to advantageously ensure that the flatness of orifice plate upper surface 12
The precision of upper surface 12 is also beneficial in use, after orifice plate upper surface 12 scratches, carries out secondary grinding, and avoid
Corrosion when using solvent wiping orifice plate upper surface 12 in use to orifice plate upper surface 12, and then to ensureing on orifice plate
The flatness on surface 12 is advantageous.
Another embodiment according to the present invention, groove 21 are the linear grooves of detour type, and suction hole 22 and gas transmission
Hole 23 is located at the head and the tail both ends of groove 21.By setting groove 21 to linear grooves, being evacuated by suction hole 22 or
When transfer port 23 is supplied gas, the gas flowing in groove 21 is flowed in the same direction, is avoided and is carried out pumping or gas transmission to groove 21
When, the disorder of air-flow in groove 21, to ensure material on orifice plate 1 stablize adsorb or be detached from it is advantageous.
In conjunction with shown in Fig. 1 and Fig. 2, a kind of embodiment according to the present invention is additionally provided with suction hole 22 and defeated on substrate 2
Stomata 23.In the present embodiment, suction hole 22 and transfer port 23 are originated by the lateral surface of substrate 2 and extend to groove 21 respectively
Medial surface terminate.Suction hole 22 and external air extractor (such as vacuum pump) are connected with each other, can be incited somebody to action by air extractor
The gas of groove 21 is extracted out, to enable groove 21 to constitute a vacuum environment, to make the through-hole being connected with groove 21 11 will
Material positioned at orifice plate upper surface 12 is adsorbed.In the present embodiment, the through-hole 11 of rectangular array setting, along longitudinal direction and laterally
Interval be equal, to make the uniform force on surface that the material (such as glass substrate) of absorption is in contact with orifice plate 1, protect
Having demonstrate,proved each position of material can bear against on orifice plate upper surface 12, ensure that the flatness of material, and then ensure that material
Precision during completed knocked down products improves the assembly precision of product.Transfer port 23 and compressed air source unit are connected with each other, can be led to
It crosses compressed air source unit and is sent into gas into groove 21, to enable the material in adsorbed state to be rapidly separated with orifice plate 1, to
It is removed convenient for material.It is sent into the intake of gas by control, can also material be made to lift up, to enable material more to hold
Easy removes.
In conjunction with shown in Fig. 1 and Fig. 2, a kind of embodiment according to the present invention, suction hole 22 and transfer port 23 are respectively one
It is a.In the present embodiment, the suction hole 22 and transfer port 23 are oppositely arranged.Pass through the suction hole 22 being oppositely arranged and gas transmission
Hole 23 is conducive to flowing velocity of the gas in groove 21 during being passed through gas into groove 21 by transfer port 23,
It allows gas to be evenly distributed in a short time in groove 21, improves material and be detached from efficiency.Meanwhile making material on orifice plate 1
The gas flow overflowed in each position through-hole 11 when disengaging is uniform, makes the uniform force of material each position, avoids material and is detached from hole
Situations such as bending is generated when plate 1.
Another embodiment according to the present invention, suction hole 22 are one, transfer port 23 at least two.In this implementation
In mode, suction hole 22 and transfer port 23 are originated by the lateral surface of substrate 2 and extend to the medial surface termination of groove 21 respectively.It is more
A (two, three or more) transfer port 23 mutually equally spaced setting.By the way that multiple transfer ports 23 and mutually etc. are arranged
The setting at interval improves the efficiency for being passed through gas to be conducive to be passed through gas into groove 21 simultaneously from different directions, and
And the transfer port 23 by being spacedly distributed, so that the gas being passed through is uniformly distributed in groove 21, not only increases material disengaging
Efficiency.Meanwhile the gas flow overflowed in the through-hole 11 of each position when the material on orifice plate 1 being made to be detached from is uniform, makes material each position
Uniform force, avoid material be detached from orifice plate 1 when generate bending situations such as.
In conjunction with shown in Fig. 1 and Fig. 3, the orifice plate upper surface 12 of a kind of embodiment according to the present invention, orifice plate 1 is provided with pad
Piece groove 13 and gasket 14.In the present embodiment, gasket 14 is detachably arranged in gasket groove 13.In present embodiment
In, the sum of the thickness of material that the thickness of gasket 14 is more than the depth of gasket groove 13 and orifice plate upper surface 12 carries works as hole
When being adsorbed with material (such as glass substrate) on plate 1, the one end of gasket 14 far from orifice plate upper surface 12 will be more than the surface of material.
In the present embodiment, gasket groove 13 is at least three, and gasket groove 13 is arranged in a ring.In the present embodiment, it pads
The mutually equally spaced setting of piece groove 13.The material adsorbed on orifice plate 1 in an assembling process, by be arranged gasket 14 to make it
Its jig or component are directly in contact with gasket 14, avoid the material for directly bearing against and being adsorbed on orifice plate 1, and then avoid
Deformation or scuffing of material etc. ensure that material flatness and surface quality, and then the quality of the product to assembling.
As shown in Figure 1, a kind of embodiment according to the present invention, the orifice plate upper surface 12 of orifice plate 1 is additionally provided with positioning column
15.In the present embodiment, positioning column 15 at least two, and spaced setting.In the present embodiment, positioning column 15 is
Two, and be arranged in the side of the through-hole 11 of rectangular array.The material adsorbed on orifice plate 1 is in an assembling process, fixed by being arranged
Position column 15 to make other jigs or component pass through and positioning column 15 be connected, you can ensure orifice plate 1 on material with it is other
The relative position of material is accurate, ensure that the accurate of material assembling position, and then the quality of the product to assembling.
A kind of embodiment according to the present invention is provided with the first annular seal arrangement on substrate 2, is provided on orifice plate 1
The second annular seal arrangement to match with the first annular seal arrangement.In the present embodiment, the first annular seal arrangement is extremely
It is provided with one less, and is circumferentially positioned at 21 ambient of groove.In the present embodiment, the first annular seal arrangement is cyclic annular
Boss or annular recess, then corresponding second annular seal arrangement is annular recess or annular boss.Pass through the first annular seal
Structure is connected with the mutual cooperation of the second annular seal arrangement, to ensure that the leakproofness of 2 link position of orifice plate 1 and substrate,
Avoid at 2 link position of orifice plate 1 and substrate that there is a situation where gas leakage, to ensure that the material on orifice plate 1 is stablized suction
It is attached, and then ensure that the uniform force of surface of material, the flatness to ensureing material is beneficial.
As shown in Figure 1, being additionally provided on a kind of embodiment according to the present invention, orifice plate 1 or substrate 2 for installing handle
Connection structure 3.In the present embodiment, connection structure 3 can be threaded hole or hinged seat.In the present embodiment, even
Binding structure 3 is threaded hole, and it is separately positioned on the opposite both sides of orifice plate 1.By be arranged connection structure 3 can easily with
Handle is detachably connected, to facilitate the carrying of jig of the invention.
The above is only that the example of the concrete scheme of the present invention answers the equipment and structure of wherein not detailed description
When being interpreted as that the existing common apparatus in this field and universal method is taken to be practiced.
The foregoing is merely the schemes of the present invention, are not intended to restrict the invention, for the technology of this field
For personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, any made by repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (13)
1. a kind of vacuum suction jig, which is characterized in that including：Orifice plate (1) and substrate (2)；
Orifice plate (1) array is provided with through-hole (11), is arranged fluted (21) on the substrate (2), the orifice plate (1) and institute
Substrate (2) interconnection is stated, and the through-hole (11) is interconnected with the groove (21)；
The suction hole (22) for being evacuated to the groove (21) is additionally provided on the substrate (2), and for described recessed
The transfer port (23) that slot (21) is supplied gas.
2. vacuum suction jig according to claim 1, which is characterized in that the suction hole (22) and the transfer port
(23) it is originated respectively by the lateral surface of the substrate (2) and the medial surface for extending to the groove (21) terminates, and the air-breathing
Hole (22) and the transfer port (23) are oppositely arranged.
3. vacuum suction jig according to claim 1, which is characterized in that the orifice plate upper surface (12) of the orifice plate (1)
The gasket (14) for being provided with gasket groove (13) and being detachably arranged in the gasket groove (13)；
The thickness of the gasket (14) is more than the object of the depth and the orifice plate upper surface (12) carrying of the gasket groove (13)
The sum of thickness of material.
4. vacuum suction jig according to claim 3, which is characterized in that the gasket groove (13) is at least three,
And the gasket groove (13) is arranged in a ring.
5. the vacuum suction jig according to one of Claims 1-4, which is characterized in that the orifice plate upper table of the orifice plate (1)
Face (12) is additionally provided with positioning column (15)；
The positioning column (15) at least two, and spaced setting.
6. vacuum suction jig according to claim 1, which is characterized in that the groove (21) is the linear recessed of detour type
Slot, and the suction hole (22) and the transfer port (23) are located at the head and the tail both ends of the groove (21).
7. vacuum suction jig according to claim 1, which is characterized in that the suction hole (22) and the transfer port
(23) it is originated respectively by the lateral surface of the substrate (2) and the medial surface for extending to the groove (21) terminates；
The transfer port (23) at least two, and the transfer port (23) mutually equally spaced setting.
8. vacuum suction jig according to claim 1, which is characterized in that at least provided with one on the substrate (2)
It is looped around the first annular seal arrangement of the groove (21) surrounding, is provided on the orifice plate (1) close with first ring-type
The second annular seal arrangement that seal structure matches.
9. vacuum suction jig according to claim 1, which is characterized in that the first annular seal arrangement annular boss
Or annular recess, second annular seal arrangement are annular recess or annular boss.
10. vacuum suction jig according to claim 1, which is characterized in that on the orifice plate (1) or the substrate (2)
It is additionally provided with the connection structure (3) for installing handle.
11. vacuum suction jig according to claim 1, which is characterized in that the through-hole (11) is arranged for rectangular array
Or annular array setting；
If the through-hole (11) is arranged for rectangular array, the through-hole (11) is transversely evenly spaced on longitudinal respectively.And
It is along longitudinal direction equal with lateral interval；
If the through-hole (11) is arranged for annular array, along the circumferential direction angularly uniform intervals arrange the through-hole (11).
12. vacuum suction jig according to claim 1, which is characterized in that the aperture of the through-hole (11) is less than 2mm.
13. vacuum suction jig according to claim 1, which is characterized in that the orifice plate upper surface (12) of the orifice plate (1)
Flatness tolerance be less than 2 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810890878.5A CN108789226A (en) | 2018-08-07 | 2018-08-07 | A kind of vacuum suction jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810890878.5A CN108789226A (en) | 2018-08-07 | 2018-08-07 | A kind of vacuum suction jig |
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| Publication Number | Publication Date |
|---|---|
| CN108789226A true CN108789226A (en) | 2018-11-13 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810890878.5A Pending CN108789226A (en) | 2018-08-07 | 2018-08-07 | A kind of vacuum suction jig |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109465558A (en) * | 2018-12-24 | 2019-03-15 | 江苏弘信华印电路科技有限公司 | A kind of inclined jig of laser anti-cutting |
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| CN208880547U (en) * | 2018-08-07 | 2019-05-21 | 浙江舜宇光学有限公司 | A kind of vacuum suction jig |
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