CN208880547U - A kind of vacuum suction jig - Google Patents

A kind of vacuum suction jig Download PDF

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Publication number
CN208880547U
CN208880547U CN201821265617.6U CN201821265617U CN208880547U CN 208880547 U CN208880547 U CN 208880547U CN 201821265617 U CN201821265617 U CN 201821265617U CN 208880547 U CN208880547 U CN 208880547U
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China
Prior art keywords
orifice plate
groove
hole
vacuum suction
substrate
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CN201821265617.6U
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Chinese (zh)
Inventor
张炯飞
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Zhejiang Sunny Optics Co Ltd
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Zhejiang Sunny Optics Co Ltd
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Priority to CN201821265617.6U priority Critical patent/CN208880547U/en
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Abstract

The utility model relates to a kind of vacuum suction jigs, comprising: orifice plate and substrate;The hole plate array is provided with through-hole, fluted, the orifice plate and substrate interconnection is arranged on the substrate, and the through-hole and the groove are interconnected;The suction hole for being evacuated to the groove, and the transfer port for supplying gas the groove are additionally provided on the substrate.Suction hole and external air extractor are connected with each other, can be extracted out the gas of groove by air extractor, to enable groove to constitute a vacuum environment, so that the through-hole being connected with groove be made to be adsorbed the material for being located at orifice plate upper surface.It ensure that each position of material can be born against on orifice plate upper surface, ensure that the flatness of material.Transfer port and compressed air source unit are connected with each other, gas can be sent into groove by compressed air source unit, to enable the material in adsorbed state to be rapidly separated with orifice plate, consequently facilitating material is removed.

Description

A kind of vacuum suction jig
Technical field
The utility model relates to a kind of jig more particularly to a kind of vacuum suction jigs.
Background technique
In Shot Detection production process, the performance of camera lens is very high to the required precision cooperated between detection pallet, the two Between gap it is very small, therefore the required precision of jig is critically important.By optical design test request, need on test pallet Smooth one block of glass of attaching bears against tested screen test, its technique and glass planar during test pallet attaches glass Degree requirement is very high, should guarantee that the depth of parallelism of glass will also guarantee that glass is attached to pallet while guaranteeing the pallet depth of parallelism The depth of parallelism after upper.Therefore, before attaching glass on test pallet, need to guarantee the glass in transportational process on jig Flatness, and attach after the completion of, glass can be rapidly separated.In traditional technology, the suction nozzle that can be arranged by array is transported Glass, but since suction nozzle is mutually indepedent, deformation is generated when glass being easy to cause to be adsorbed, and influences flatness, or can also pass through Vacuum suction jig is transported, but usually glass is from jig when being detached from, due to needing the vacuum environment disappearance glass in jig Glass could be detached from from jig, influence working efficiency.
Utility model content
The purpose of this utility model is to provide a kind of vacuum suction jigs, and the material on jig is enable to be rapidly separated.
To realize above-mentioned purpose of utility model, the utility model provides a kind of vacuum suction jig, comprising: orifice plate and base Plate;
The hole plate array is provided with through-hole, is arranged fluted on the substrate, and the orifice plate is mutually interconnected with the substrate It connects, and the through-hole and the groove are interconnected;
It is additionally provided with the suction hole for being evacuated to the groove on the substrate, and for supplying gas the groove Transfer port.
One aspect according to the present utility model, the suction hole and the transfer port are respectively by the lateral surface of the substrate It originates and the medial surface for extending to the groove terminates, and the suction hole and the transfer port are oppositely arranged.
One aspect according to the present utility model, the orifice plate upper surface of the orifice plate are provided with gasket groove and detachable The gasket being mounted in the gasket groove;
The thickness of the gasket is greater than the thickness of the depth of the gasket groove and the material of orifice plate upper surface carrying The sum of.
One aspect according to the present utility model, the gasket groove is at least three, and the gasket groove is in a ring Arrangement.
The orifice plate upper surface of one aspect according to the present utility model, the orifice plate is additionally provided with positioning column;
The positioning column at least two, and it is spaced apart from each other setting.
One aspect according to the present utility model, the groove are the linear grooves of detour type, and the suction hole and institute State the head and the tail both ends that transfer port is located at the groove.
One aspect according to the present utility model, the suction hole and the transfer port are respectively by the lateral surface of the substrate It originates and the medial surface for extending to the groove terminates;
The transfer port at least two, and the mutually equally spaced setting of the transfer port.
One aspect according to the present utility model is looped around the groove vicinity at least provided with one on the substrate First annular seal arrangement is provided with the second annular seal knot to match with first annular seal arrangement on the orifice plate Structure.
One aspect according to the present utility model, the first annular seal arrangement annular boss or annular recess, it is described Second annular seal arrangement is annular recess or annular boss.
The company for installing handle is additionally provided on one aspect according to the present utility model, the orifice plate or the substrate Binding structure.
One aspect according to the present utility model, the through-hole are that rectangular array is arranged or annular array is arranged;
If the through-hole is rectangular array setting, the through-hole is transversely evenly spaced on longitudinal respectively.And along vertical It is equal to the interval with transverse direction;
If the through-hole is annular array setting, along the circumferential direction angularly uniform intervals arrange the through-hole.
The aperture of one aspect according to the present utility model, the through-hole is less than 2mm.
One aspect according to the present utility model, the flatness tolerance of the orifice plate upper surface is less than 2 μm.
A kind of scheme according to the present utility model mutually interconnects suction hole and external air extractor (such as vacuum pump) It connects, can be extracted out the gas of groove by air extractor, to enable groove to constitute a vacuum environment, to make to be connected with groove The material for being located at orifice plate upper surface is adsorbed by logical through-hole.In the present embodiment, the through-hole of rectangular array setting, along longitudinal direction It is equal with lateral interval, so that the stress on the surface for making the material (such as glass substrate) of absorption be in contact with orifice plate is equal It is even, it ensure that each position of material can be born against on orifice plate upper surface, ensure that the flatness of material, and then ensure that object Expect precision during completed knocked down products, improves the assembly precision of product.Transfer port and compressed air source unit are connected with each other, can be led to It crosses compressed air source unit and is sent into gas into groove, to enable the material in adsorbed state to be rapidly separated with orifice plate, thus just It is removed in material.It is sent into the intake of gas by control, can also material be made to lift up, so that material be enable to be more easier Remove.
A kind of scheme according to the present utility model, by being arranged in the aperture of through-hole in 2mm hereinafter, so as to avoid orifice plate For the material (such as glass substrate) of upper carrying when by vacuum suction, the aperture of through-hole is excessive to cause material to be sent out in the position of through-hole The deformations such as raw recess.Therefore, by the way that the aperture setting of through-hole within the above range, ensure that material is smooth when being adsorbed Degree, ensure that the quality of product in follow-up producing process.By being arranged the flatness tolerance of orifice plate upper surface at 2 μm, thus Flatness of the material (such as glass substrate) carried on orifice plate when by vacuum suction is further ensured, orifice plate is avoided The case where surface irregularity causes material to deform, further to the quality for guaranteeing product in follow-up producing process.
A kind of scheme according to the present utility model, by the suction hole and transfer port being oppositely arranged, by transfer port to During being passed through gas in groove, be conducive to the flowing velocity of gas in a groove, allow gas to uniformly divide in a short time Cloth in a groove, improves material and is detached from efficiency.Meanwhile the gas overflowed in each position through-hole when being detached from the material on orifice plate Amount uniformly, makes the uniform force of material each position, avoids situations such as generating bending when material is detached from orifice plate.
A kind of scheme according to the present utility model, by the way that multiple transfer ports and mutually equally spaced setting is arranged, thus Be conducive to be passed through gas into groove simultaneously from different directions, improve the efficiency for being passed through gas, and by being spacedly distributed Transfer port, be uniformly distributed the gas being passed through in a groove, not only increase material be detached from efficiency.Meanwhile making on orifice plate The gas flow overflowed in the through-hole of each position when material is detached from is uniform, makes the uniform force of material each position, and it is de- to avoid material Situations such as bending is generated when from orifice plate.
A kind of scheme according to the present utility model, the material adsorbed on orifice plate in an assembling process, by setting gasket from And other jigs or component is made directly to be in contact with gasket, the material for directly bearing against and being adsorbed on orifice plate is avoided, and then keep away Deformation or the scuffing etc. for having exempted from material, ensure that material flatness and surface quality, and then the quality of the product to assembling.
A kind of scheme according to the present utility model, the material adsorbed on orifice plate in an assembling process, pass through setting positioning column To make other jigs or component by being cooperatively connected with positioning column, that is, it can guarantee that the material on orifice plate is opposite with other materials Position is accurate, ensure that the accurate of material assembled position, and then the quality of the product to assembling.
A kind of scheme according to the present utility model, by setting linear grooves for groove, by suction hole pumping or When transfer port is supplied gas, the flowing of gas in groove is flowed in the same direction, is avoided when carrying out pumping or gas transmission to groove, groove The disorder of middle air-flow, it is advantageous to the stable absorption or disengaging that guarantee material on orifice plate.
Detailed description of the invention
Fig. 1 schematically shows a kind of structure chart of the orifice plate of embodiment according to the present utility model;
Fig. 2 schematically shows a kind of structure chart of the substrate of embodiment according to the present utility model;
Fig. 3 schematically shows a kind of structure chart of the gasket of embodiment according to the present utility model.
Specific embodiment
It, below will be to implementation in order to illustrate more clearly of the utility model embodiment or technical solution in the prior art Attached drawing needed in mode is briefly described.It should be evident that the accompanying drawings in the following description is only that this is practical new Some embodiments of type for those of ordinary skills without creative efforts, can be with It obtains other drawings based on these drawings.
When being described for the embodiments of the present invention, term " longitudinal direction ", " transverse direction ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", orientation or positional relationship is expressed by "outside" Based on orientation or positional relationship shown in relevant drawings, it is merely for convenience of describing the present invention and simplifying the description, without It is that the device of indication or suggestion meaning or element must have a particular orientation, be constructed and operated in a specific orientation, therefore on Stating term should not be understood as limiting the present invention.
The utility model is described in detail with reference to the accompanying drawings and detailed description, embodiment cannot herein one One repeats, but therefore the embodiments of the present invention is not defined in following implementation.
Referring to figs. 1 and 2, a kind of vacuum of a kind of embodiment according to the present utility model, the utility model is inhaled Attached jig, including orifice plate 1 and substrate 2.In the present embodiment, array is provided with through-hole 11 on orifice plate 1, and orifice plate 1 is plate body, Through-hole 11 runs through the orifice plate upper surface 12 and orifice plate lower surface of orifice plate 1.It can also be to the object carried on orifice plate 1 by setting through-hole 11 Expect that (such as glass substrate) carries out light passing, to have exposure function, for the glue solidifies on product in follow-up producing process Beneficial, the efficiency that improves that the glue solidifies improves production efficiency.In the present embodiment, the aperture of through-hole 11 is less than 2mm.By the way that 2mm is arranged in the aperture of through-hole 11 hereinafter, so as to avoid the material (such as glass substrate) carried on orifice plate 1 When by vacuum suction, the aperture of through-hole 11 is excessive to cause material that the deformation such as recess occurs in the position of through-hole 11.Therefore, pass through Within the above range by the aperture setting of through-hole 11, it ensure that flatness of the material when being adsorbed, ensure that subsequent production work The quality of product in sequence.In the present embodiment, the flatness tolerance of the orifice plate upper surface 12 of orifice plate 1 is less than 2 microns.Passing through will The flatness tolerance of orifice plate upper surface 12 is arranged at 2 microns, to further ensure material (such as the glass carried on orifice plate 1 Glass substrate) flatness when by vacuum suction, avoid the feelings that the surface irregularity of orifice plate 1 causes material to deform Condition, further to the quality for guaranteeing product in follow-up producing process.In the present embodiment, it is arranged on substrate 2 fluted 21, groove 21, which is originated from the upper surface of base plate 2a of substrate 2 to the direction of base lower surface, to be extended.In the present embodiment, groove 21 be opening in polygon (such as rectangle, diamond shape, regular polygon etc.) or circular groove.Orifice plate 1 and substrate 2 are connected with each other. In the present embodiment, on a substrate 2, orifice plate lower surface abuts each other the lid of orifice plate 1 with upper surface of base plate 2a, orifice plate 1 and substrate 2 Between the mode that can be connected through a screw thread, orifice plate 1 and substrate 2 are fixed to each other.In the present embodiment, 2 phase of orifice plate 1 and substrate After connecting, the position of through-hole 11 is corresponded to each other with groove 21, so that through-hole 11 and groove 21 be made to be interconnected.In this embodiment party In formula, through-hole 11 is rectangular array setting, and through-hole 11 is transversely evenly spaced on longitudinal respectively.Or through-hole 11 is Annular array setting, and along the circumferential direction angularly uniform intervals arrange through-hole 11.In the present embodiment, orifice plate 1 is selected Corrosion resistance, wearability and the good material of mechanical machinability, thus advantageously ensure that the flatness of orifice plate upper surface 12, thus The precision for ensuring orifice plate upper surface 12 is also beneficial in use, after orifice plate upper surface 12 scratches, carries out secondary grind Mill, and avoid in use using corrosion when solvent wiping orifice plate upper surface 12 to orifice plate upper surface 12, in turn It is advantageous to the flatness for guaranteeing orifice plate upper surface 12.
Another embodiment according to the present utility model, groove 21 are the linear grooves of detour type, and 22 He of suction hole Transfer port 23 is located at the head and the tail both ends of groove 21.By setting linear grooves for groove 21, taken out by suction hole 22 When gas or transfer port 23 are supplied gas, the flowing of gas in groove 21 is flowed in the same direction, avoid to groove 21 carry out pumping or When gas transmission, the disorder of air-flow in groove 21 is advantageous to the stable absorption or disengaging that guarantee material on orifice plate 1.
Referring to figs. 1 and 2, a kind of embodiment according to the present utility model is additionally provided with suction hole 22 on substrate 2 With transfer port 23.In the present embodiment, suction hole 22 and transfer port 23 are originated by the lateral surface of substrate 2 respectively and are extended to recessed The medial surface of slot 21 terminates.Suction hole 22 and external air extractor (such as vacuum pump) are connected with each other, can be filled by pumping It sets and extracts the gas of groove 21 out, to enable groove 21 to constitute a vacuum environment, to make the through-hole being connected with groove 21 11 are adsorbed the material for being located at orifice plate upper surface 12.In the present embodiment, rectangular array setting through-hole 11, along longitudinal direction and Lateral interval is equal, so that the stress on the surface for making the material (such as glass substrate) of absorption be in contact with orifice plate 1 is equal It is even, it ensure that each position of material can be born against on orifice plate upper surface 12, ensure that the flatness of material, and then ensure that Precision of material during completed knocked down products, improves the assembly precision of product.Transfer port 23 and compressed air source unit are connected with each other, It can be sent into gas into groove 21 by compressed air source unit, so that the material in adsorbed state is enable to be rapidly separated with orifice plate 1, Consequently facilitating material is removed.It is sent into the intake of gas by control, can also material be made to lift up, to enable material more Add and readily removes.
Referring to figs. 1 and 2, a kind of embodiment according to the present utility model, suction hole 22 and transfer port 23 are distinguished It is one.In the present embodiment, the suction hole 22 and transfer port 23 are oppositely arranged.Pass through 22 He of suction hole being oppositely arranged Transfer port 23 is conducive to flowing of the gas in groove 21 during being passed through gas into groove 21 by transfer port 23 Speed allows gas to be evenly distributed in a short time in groove 21, improves material and is detached from efficiency.Meanwhile making on orifice plate 1 The gas flow overflowed in each position through-hole 11 when material is detached from is uniform, makes the uniform force of material each position, and it is de- to avoid material Situations such as bending is generated when from orifice plate 1.
Another embodiment according to the present utility model, suction hole 22 are one, transfer port 23 at least two.At this In embodiment, suction hole 22 and transfer port 23 are originated by the lateral surface of substrate 2 respectively and extend to the medial surface end of groove 21 Only.Multiple (two, three or more) transfer port 23 mutually equally spaced settings.By the way that multiple transfer ports 23 and phase is arranged Mutual equally spaced setting improves the effect for being passed through gas to be conducive to be passed through gas into groove 21 simultaneously from different directions Rate, and the transfer port 23 by being spacedly distributed, are uniformly distributed the gas being passed through in groove 21, not only increase material It is detached from efficiency.Meanwhile the gas flow overflowed in the through-hole 11 of each position when being detached from the material on orifice plate 1 is uniform, keeps material each The uniform force of position avoids situations such as generating bending when material is detached from orifice plate 1.
In conjunction with shown in Fig. 1 and Fig. 3, the orifice plate upper surface 12 of a kind of embodiment according to the present utility model, orifice plate 1 is arranged There are gasket groove 13 and gasket 14.In the present embodiment, gasket 14 is detachably arranged in gasket groove 13.In this implementation In mode, the sum of the thickness of material that the thickness of gasket 14 is greater than the depth of gasket groove 13 and orifice plate upper surface 12 carries, i.e., When being adsorbed with material (such as glass substrate) on orifice plate 1, the one end of gasket 14 far from orifice plate upper surface 12 will be more than material Surface.In the present embodiment, gasket groove 13 is at least three, and gasket groove 13 is arranged in a ring.In present embodiment In, the mutually equally spaced setting of gasket groove 13.The material adsorbed on orifice plate 1 in an assembling process, by setting gasket 14 from And other jigs or component is made directly to be in contact with gasket 14, the material for directly bearing against and being adsorbed on orifice plate 1 is avoided, in turn Deformation or the scuffing etc. for avoiding material ensure that material flatness and surface quality, and then have to the quality of the product of assembling Benefit.
As shown in Figure 1, a kind of embodiment according to the present utility model, the orifice plate upper surface 12 of orifice plate 1 is additionally provided with fixed Position column 15.In the present embodiment, positioning column 15 at least two, and it is spaced apart from each other setting.In the present embodiment, positioning column 15 be two, and the side of the through-hole 11 of rectangular array is arranged in.The material adsorbed on orifice plate 1 in an assembling process, by setting Set positioning column 15 to make other jigs or component by with positioning column 15 be cooperatively connected, that is, can guarantee orifice plate 1 on material with The relative position of other materials is accurate, ensure that the accurate of material assembled position, and then the quality of the product to assembling.
A kind of embodiment according to the present utility model is provided with the first annular seal arrangement on substrate 2, sets on orifice plate 1 It is equipped with the second annular seal arrangement to match with the first annular seal arrangement.In the present embodiment, the first annular seal knot Structure is circumferentially positioned at 21 ambient of groove at least provided with one.In the present embodiment, the first annular seal arrangement Annular boss or annular recess, then corresponding second annular seal arrangement is annular recess or annular boss.Pass through the first ring-type Sealing structure is connected with the mutual cooperation of the second annular seal arrangement, to ensure that the sealing of 2 link position of orifice plate 1 and substrate Property, avoids at 2 link position of orifice plate 1 and substrate that there is a situation where gas leakage, to ensure that the material on orifice plate 1 is stablized Absorption, and then ensure that the uniform force of surface of material, it is beneficial to the flatness for guaranteeing material.
As shown in Figure 1, being additionally provided on a kind of embodiment according to the present utility model, orifice plate 1 or substrate 2 for installing The connection structure 3 of handle.In the present embodiment, connection structure 3 can be threaded hole or hinged seat.In present embodiment In, connection structure 3 is threaded hole, and it is separately positioned on the opposite two sides of orifice plate 1.It can be square by setting connection structure 3 Just detachably connected with handle, to facilitate the carrying of the jig of the utility model.
Above content is only the example of the concrete scheme of the utility model, for the equipment and knot of wherein not detailed description Structure, it should be understood that the existing common apparatus in this field and universal method is taken to be practiced.
The foregoing is merely a schemes of the utility model, are not intended to limit the utility model, for ability For the technical staff in domain, various modifications and changes may be made to the present invention.It is all the spirit and principles of the utility model it Interior, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.

Claims (13)

1. a kind of vacuum suction jig characterized by comprising orifice plate (1) and substrate (2);
Orifice plate (1) array is provided with through-hole (11), is arranged fluted (21) on the substrate (2), the orifice plate (1) and institute Substrate (2) interconnection is stated, and the through-hole (11) and the groove (21) are interconnected;
The suction hole (22) for being evacuated to the groove (21) is additionally provided on the substrate (2), and for described recessed The transfer port (23) that slot (21) is supplied gas.
2. vacuum suction jig according to claim 1, which is characterized in that the suction hole (22) and the transfer port (23) it is originated respectively by the lateral surface of the substrate (2) and the medial surface for extending to the groove (21) terminates, and the air-breathing Hole (22) and the transfer port (23) are oppositely arranged.
3. vacuum suction jig according to claim 1, which is characterized in that the orifice plate upper surface (12) of the orifice plate (1) The gasket (14) for being provided with gasket groove (13) and being detachably arranged in the gasket groove (13);
The thickness of the gasket (14) is greater than the depth of the gasket groove (13) and the object of the orifice plate upper surface (12) carrying The sum of thickness of material.
4. vacuum suction jig according to claim 3, which is characterized in that the gasket groove (13) is at least three, And the gasket groove (13) is arranged in a ring.
5. according to claim 1 to vacuum suction jig described in one of 4, which is characterized in that table on the orifice plate of the orifice plate (1) Face (12) is additionally provided with positioning column (15);
The positioning column (15) at least two, and it is spaced apart from each other setting.
6. vacuum suction jig according to claim 1, which is characterized in that the groove (21) is the linear recessed of detour type Slot, and the suction hole (22) and the transfer port (23) are located at the head and the tail both ends of the groove (21).
7. vacuum suction jig according to claim 1, which is characterized in that the suction hole (22) and the transfer port (23) it is originated respectively by the lateral surface of the substrate (2) and the medial surface for extending to the groove (21) terminates;
The transfer port (23) at least two, and the transfer port (23) mutually equally spaced setting.
8. vacuum suction jig according to claim 1, which is characterized in that at least provided with one on the substrate (2) It is looped around the first annular seal arrangement of the groove (21) surrounding, is provided on the orifice plate (1) close with first ring-type The second annular seal arrangement that seal structure matches.
9. vacuum suction jig according to claim 8, which is characterized in that the first annular seal arrangement annular boss Or annular recess, second annular seal arrangement are annular recess or annular boss.
10. vacuum suction jig according to claim 1, which is characterized in that on the orifice plate (1) or the substrate (2) It is additionally provided with the connection structure (3) for installing handle.
11. vacuum suction jig according to claim 1, which is characterized in that the through-hole (11) is rectangular array setting Or annular array setting;
If the through-hole (11) is rectangular array setting, the through-hole (11) is transversely evenly spaced on longitudinal respectively, and It is along longitudinal direction equal with lateral interval;
If the through-hole (11) is annular array setting, along the circumferential direction angularly uniform intervals arrange the through-hole (11).
12. vacuum suction jig according to claim 1, which is characterized in that the aperture of the through-hole (11) is less than 2mm.
13. vacuum suction jig according to claim 1, which is characterized in that the orifice plate upper surface (12) of the orifice plate (1) Flatness tolerance less than 2 μm.
CN201821265617.6U 2018-08-07 2018-08-07 A kind of vacuum suction jig Active CN208880547U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821265617.6U CN208880547U (en) 2018-08-07 2018-08-07 A kind of vacuum suction jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821265617.6U CN208880547U (en) 2018-08-07 2018-08-07 A kind of vacuum suction jig

Publications (1)

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CN208880547U true CN208880547U (en) 2019-05-21

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CN201821265617.6U Active CN208880547U (en) 2018-08-07 2018-08-07 A kind of vacuum suction jig

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108789226A (en) * 2018-08-07 2018-11-13 浙江舜宇光学有限公司 A kind of vacuum suction jig
CN114236667A (en) * 2021-11-30 2022-03-25 歌尔股份有限公司 Manufacturing method of multilayer light guide piece, performance management and control system and electronic equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108789226A (en) * 2018-08-07 2018-11-13 浙江舜宇光学有限公司 A kind of vacuum suction jig
CN114236667A (en) * 2021-11-30 2022-03-25 歌尔股份有限公司 Manufacturing method of multilayer light guide piece, performance management and control system and electronic equipment

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