JPS6257886A - 自動作業装置 - Google Patents

自動作業装置

Info

Publication number
JPS6257886A
JPS6257886A JP18001986A JP18001986A JPS6257886A JP S6257886 A JPS6257886 A JP S6257886A JP 18001986 A JP18001986 A JP 18001986A JP 18001986 A JP18001986 A JP 18001986A JP S6257886 A JPS6257886 A JP S6257886A
Authority
JP
Japan
Prior art keywords
dust
arm
movable section
movable part
hollow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18001986A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6361156B2 (enrdf_load_stackoverflow
Inventor
増岡　昇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP18001986A priority Critical patent/JPS6257886A/ja
Publication of JPS6257886A publication Critical patent/JPS6257886A/ja
Publication of JPS6361156B2 publication Critical patent/JPS6361156B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Sealing Devices (AREA)
  • Transmission Devices (AREA)
JP18001986A 1986-08-01 1986-08-01 自動作業装置 Granted JPS6257886A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18001986A JPS6257886A (ja) 1986-08-01 1986-08-01 自動作業装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18001986A JPS6257886A (ja) 1986-08-01 1986-08-01 自動作業装置

Publications (2)

Publication Number Publication Date
JPS6257886A true JPS6257886A (ja) 1987-03-13
JPS6361156B2 JPS6361156B2 (enrdf_load_stackoverflow) 1988-11-28

Family

ID=16076038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18001986A Granted JPS6257886A (ja) 1986-08-01 1986-08-01 自動作業装置

Country Status (1)

Country Link
JP (1) JPS6257886A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0367389U (enrdf_load_stackoverflow) * 1989-11-02 1991-07-01

Also Published As

Publication number Publication date
JPS6361156B2 (enrdf_load_stackoverflow) 1988-11-28

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