JPS6256654B2 - - Google Patents

Info

Publication number
JPS6256654B2
JPS6256654B2 JP53112593A JP11259378A JPS6256654B2 JP S6256654 B2 JPS6256654 B2 JP S6256654B2 JP 53112593 A JP53112593 A JP 53112593A JP 11259378 A JP11259378 A JP 11259378A JP S6256654 B2 JPS6256654 B2 JP S6256654B2
Authority
JP
Japan
Prior art keywords
film
psg film
psg
sio
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53112593A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5539634A (en
Inventor
Yukio Takizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP11259378A priority Critical patent/JPS5539634A/ja
Publication of JPS5539634A publication Critical patent/JPS5539634A/ja
Publication of JPS6256654B2 publication Critical patent/JPS6256654B2/ja
Granted legal-status Critical Current

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  • Weting (AREA)
JP11259378A 1978-09-12 1978-09-12 Manufacture of semiconductor Granted JPS5539634A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11259378A JPS5539634A (en) 1978-09-12 1978-09-12 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11259378A JPS5539634A (en) 1978-09-12 1978-09-12 Manufacture of semiconductor

Publications (2)

Publication Number Publication Date
JPS5539634A JPS5539634A (en) 1980-03-19
JPS6256654B2 true JPS6256654B2 (cs) 1987-11-26

Family

ID=14590613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11259378A Granted JPS5539634A (en) 1978-09-12 1978-09-12 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS5539634A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2820065B2 (ja) * 1995-04-27 1998-11-05 日本電気株式会社 半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135395B2 (cs) * 1972-09-25 1976-10-01

Also Published As

Publication number Publication date
JPS5539634A (en) 1980-03-19

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