JPS6255562U - - Google Patents
Info
- Publication number
- JPS6255562U JPS6255562U JP14617385U JP14617385U JPS6255562U JP S6255562 U JPS6255562 U JP S6255562U JP 14617385 U JP14617385 U JP 14617385U JP 14617385 U JP14617385 U JP 14617385U JP S6255562 U JPS6255562 U JP S6255562U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- disk
- electrodes
- disc
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985146173U JPS641959Y2 (en, 2012) | 1985-09-24 | 1985-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985146173U JPS641959Y2 (en, 2012) | 1985-09-24 | 1985-09-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6255562U true JPS6255562U (en, 2012) | 1987-04-06 |
| JPS641959Y2 JPS641959Y2 (en, 2012) | 1989-01-18 |
Family
ID=31058398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985146173U Expired JPS641959Y2 (en, 2012) | 1985-09-24 | 1985-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS641959Y2 (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014135464A (ja) * | 2012-06-15 | 2014-07-24 | Tokyo Electron Ltd | 成膜装置、基板処理装置及び成膜方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS583635A (ja) * | 1981-06-29 | 1983-01-10 | Fujitsu Ltd | プラズマ中化学気相成長装置 |
-
1985
- 1985-09-24 JP JP1985146173U patent/JPS641959Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS583635A (ja) * | 1981-06-29 | 1983-01-10 | Fujitsu Ltd | プラズマ中化学気相成長装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014135464A (ja) * | 2012-06-15 | 2014-07-24 | Tokyo Electron Ltd | 成膜装置、基板処理装置及び成膜方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS641959Y2 (en, 2012) | 1989-01-18 |
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