JPS6255293B2 - - Google Patents
Info
- Publication number
- JPS6255293B2 JPS6255293B2 JP57010004A JP1000482A JPS6255293B2 JP S6255293 B2 JPS6255293 B2 JP S6255293B2 JP 57010004 A JP57010004 A JP 57010004A JP 1000482 A JP1000482 A JP 1000482A JP S6255293 B2 JPS6255293 B2 JP S6255293B2
- Authority
- JP
- Japan
- Prior art keywords
- rotation
- wafer
- stage
- coarse
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 18
- 238000012937 correction Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 230000008602 contraction Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 53
- 238000010586 diagram Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 4
- 241000282472 Canis lupus familiaris Species 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57010004A JPS58128734A (ja) | 1982-01-27 | 1982-01-27 | 粗微動回転ステ−ジとこれを使用したアライメント方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57010004A JPS58128734A (ja) | 1982-01-27 | 1982-01-27 | 粗微動回転ステ−ジとこれを使用したアライメント方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58128734A JPS58128734A (ja) | 1983-08-01 |
| JPS6255293B2 true JPS6255293B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-19 |
Family
ID=11738264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57010004A Granted JPS58128734A (ja) | 1982-01-27 | 1982-01-27 | 粗微動回転ステ−ジとこれを使用したアライメント方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58128734A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1982
- 1982-01-27 JP JP57010004A patent/JPS58128734A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58128734A (ja) | 1983-08-01 |