JPS6253945B2 - - Google Patents
Info
- Publication number
- JPS6253945B2 JPS6253945B2 JP61111569A JP11156986A JPS6253945B2 JP S6253945 B2 JPS6253945 B2 JP S6253945B2 JP 61111569 A JP61111569 A JP 61111569A JP 11156986 A JP11156986 A JP 11156986A JP S6253945 B2 JPS6253945 B2 JP S6253945B2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafers
- pitch
- boat
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 92
- 239000004065 semiconductor Substances 0.000 claims description 28
- 238000006243 chemical reaction Methods 0.000 claims description 13
- 238000003860 storage Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 description 21
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 210000000078 claw Anatomy 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 238000000137 annealing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
- 238000011328 necessary treatment Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11156986A JPS6242431A (ja) | 1986-05-15 | 1986-05-15 | 半導体ウエハ処理間隔交換装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11156986A JPS6242431A (ja) | 1986-05-15 | 1986-05-15 | 半導体ウエハ処理間隔交換装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6809880A Division JPS56164522A (en) | 1980-05-22 | 1980-05-22 | Transferring and distributing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6242431A JPS6242431A (ja) | 1987-02-24 |
JPS6253945B2 true JPS6253945B2 (xx) | 1987-11-12 |
Family
ID=14564699
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11156986A Granted JPS6242431A (ja) | 1986-05-15 | 1986-05-15 | 半導体ウエハ処理間隔交換装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6242431A (xx) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0347756U (xx) * | 1989-09-13 | 1991-05-07 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2972542B2 (ja) * | 1995-03-15 | 1999-11-08 | 日本電気株式会社 | 色信号処理回路 |
CN104534882B (zh) * | 2014-12-29 | 2016-04-27 | 常熟市伟恒模具铸造有限公司 | 智能化金属工件加热炉 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52139378A (en) * | 1976-05-17 | 1977-11-21 | Hitachi Ltd | Integrated treatment apparatus for semiconductor wafers |
JPS52147071A (en) * | 1976-06-01 | 1977-12-07 | Mitsubishi Electric Corp | Basket for etching |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5594041U (xx) * | 1978-12-25 | 1980-06-30 |
-
1986
- 1986-05-15 JP JP11156986A patent/JPS6242431A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52139378A (en) * | 1976-05-17 | 1977-11-21 | Hitachi Ltd | Integrated treatment apparatus for semiconductor wafers |
JPS52147071A (en) * | 1976-06-01 | 1977-12-07 | Mitsubishi Electric Corp | Basket for etching |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0347756U (xx) * | 1989-09-13 | 1991-05-07 |
Also Published As
Publication number | Publication date |
---|---|
JPS6242431A (ja) | 1987-02-24 |
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