JPS6253945B2 - - Google Patents

Info

Publication number
JPS6253945B2
JPS6253945B2 JP61111569A JP11156986A JPS6253945B2 JP S6253945 B2 JPS6253945 B2 JP S6253945B2 JP 61111569 A JP61111569 A JP 61111569A JP 11156986 A JP11156986 A JP 11156986A JP S6253945 B2 JPS6253945 B2 JP S6253945B2
Authority
JP
Japan
Prior art keywords
cassette
wafers
pitch
boat
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61111569A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6242431A (ja
Inventor
Kazuhiro Sugita
Kiichi Saito
Haruhiko Makino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP11156986A priority Critical patent/JPS6242431A/ja
Publication of JPS6242431A publication Critical patent/JPS6242431A/ja
Publication of JPS6253945B2 publication Critical patent/JPS6253945B2/ja
Granted legal-status Critical Current

Links

JP11156986A 1986-05-15 1986-05-15 半導体ウエハ処理間隔交換装置 Granted JPS6242431A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11156986A JPS6242431A (ja) 1986-05-15 1986-05-15 半導体ウエハ処理間隔交換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11156986A JPS6242431A (ja) 1986-05-15 1986-05-15 半導体ウエハ処理間隔交換装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP6809880A Division JPS56164522A (en) 1980-05-22 1980-05-22 Transferring and distributing method

Publications (2)

Publication Number Publication Date
JPS6242431A JPS6242431A (ja) 1987-02-24
JPS6253945B2 true JPS6253945B2 (enrdf_load_html_response) 1987-11-12

Family

ID=14564699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11156986A Granted JPS6242431A (ja) 1986-05-15 1986-05-15 半導体ウエハ処理間隔交換装置

Country Status (1)

Country Link
JP (1) JPS6242431A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0347756U (enrdf_load_html_response) * 1989-09-13 1991-05-07

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2972542B2 (ja) * 1995-03-15 1999-11-08 日本電気株式会社 色信号処理回路
CN104534882B (zh) * 2014-12-29 2016-04-27 常熟市伟恒模具铸造有限公司 智能化金属工件加热炉

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945219B2 (ja) * 1976-05-17 1984-11-05 株式会社日立製作所 ウェハ処理装置
JPS52147071A (en) * 1976-06-01 1977-12-07 Mitsubishi Electric Corp Basket for etching
JPS5594041U (enrdf_load_html_response) * 1978-12-25 1980-06-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0347756U (enrdf_load_html_response) * 1989-09-13 1991-05-07

Also Published As

Publication number Publication date
JPS6242431A (ja) 1987-02-24

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