JPS6250460A - 蒸発方法 - Google Patents
蒸発方法Info
- Publication number
- JPS6250460A JPS6250460A JP18978885A JP18978885A JPS6250460A JP S6250460 A JPS6250460 A JP S6250460A JP 18978885 A JP18978885 A JP 18978885A JP 18978885 A JP18978885 A JP 18978885A JP S6250460 A JPS6250460 A JP S6250460A
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- vaporization
- bath
- evaporation material
- mixed bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008016 vaporization Effects 0.000 title abstract 10
- 238000000034 method Methods 0.000 title description 10
- 239000000463 material Substances 0.000 claims abstract description 69
- 238000001704 evaporation Methods 0.000 claims description 87
- 230000008020 evaporation Effects 0.000 claims description 78
- 239000000126 substance Substances 0.000 claims description 12
- 230000001914 calming effect Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 abstract description 14
- 239000000654 additive Substances 0.000 abstract description 9
- 239000000203 mixture Substances 0.000 abstract description 9
- 230000000996 additive effect Effects 0.000 abstract description 7
- 238000010894 electron beam technology Methods 0.000 abstract description 6
- 238000009834 vaporization Methods 0.000 abstract 8
- 239000000155 melt Substances 0.000 abstract 2
- 230000000116 mitigating effect Effects 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
- 230000007423 decrease Effects 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 229910052745 lead Inorganic materials 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 229910052789 astatine Inorganic materials 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052776 Thorium Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18978885A JPS6250460A (ja) | 1985-08-30 | 1985-08-30 | 蒸発方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18978885A JPS6250460A (ja) | 1985-08-30 | 1985-08-30 | 蒸発方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6250460A true JPS6250460A (ja) | 1987-03-05 |
| JPH0548297B2 JPH0548297B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-21 |
Family
ID=16247213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18978885A Granted JPS6250460A (ja) | 1985-08-30 | 1985-08-30 | 蒸発方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6250460A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0318162U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1989-06-29 | 1991-02-22 | ||
| WO2017199873A1 (ja) * | 2016-05-18 | 2017-11-23 | 株式会社アルバック | 金属蒸発材料 |
| WO2024209755A1 (ja) * | 2023-04-05 | 2024-10-10 | 株式会社アルバック | 真空蒸着装置用の蒸着源及び真空蒸着方法 |
-
1985
- 1985-08-30 JP JP18978885A patent/JPS6250460A/ja active Granted
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0318162U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1989-06-29 | 1991-02-22 | ||
| WO2017199873A1 (ja) * | 2016-05-18 | 2017-11-23 | 株式会社アルバック | 金属蒸発材料 |
| KR20180130546A (ko) * | 2016-05-18 | 2018-12-07 | 울박, 인크 | 금속 증발 재료 |
| CN109072413A (zh) * | 2016-05-18 | 2018-12-21 | 株式会社爱发科 | 金属蒸发材料 |
| TWI673373B (zh) * | 2016-05-18 | 2019-10-01 | 日商愛發科股份有限公司 | 金屬蒸發材料 |
| CN109072413B (zh) * | 2016-05-18 | 2020-07-14 | 株式会社爱发科 | 金属蒸发材料 |
| WO2024209755A1 (ja) * | 2023-04-05 | 2024-10-10 | 株式会社アルバック | 真空蒸着装置用の蒸着源及び真空蒸着方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0548297B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-21 |
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