JPS6248344B2 - - Google Patents

Info

Publication number
JPS6248344B2
JPS6248344B2 JP55105022A JP10502280A JPS6248344B2 JP S6248344 B2 JPS6248344 B2 JP S6248344B2 JP 55105022 A JP55105022 A JP 55105022A JP 10502280 A JP10502280 A JP 10502280A JP S6248344 B2 JPS6248344 B2 JP S6248344B2
Authority
JP
Japan
Prior art keywords
scanning
electron beam
electron
image
filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55105022A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5732557A (en
Inventor
Minoru Saito
Naotake Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10502280A priority Critical patent/JPS5732557A/ja
Publication of JPS5732557A publication Critical patent/JPS5732557A/ja
Publication of JPS6248344B2 publication Critical patent/JPS6248344B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP10502280A 1980-08-01 1980-08-01 Scan electron microscope Granted JPS5732557A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10502280A JPS5732557A (en) 1980-08-01 1980-08-01 Scan electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10502280A JPS5732557A (en) 1980-08-01 1980-08-01 Scan electron microscope

Publications (2)

Publication Number Publication Date
JPS5732557A JPS5732557A (en) 1982-02-22
JPS6248344B2 true JPS6248344B2 (ro) 1987-10-13

Family

ID=14396422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10502280A Granted JPS5732557A (en) 1980-08-01 1980-08-01 Scan electron microscope

Country Status (1)

Country Link
JP (1) JPS5732557A (ro)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0437431U (ro) * 1990-07-26 1992-03-30

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5314804A (en) * 1992-03-24 1994-05-24 Serim Research Corporation Test for Helicobacter pylori

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979454A (ro) * 1972-12-06 1974-07-31
JPS5025169A (ro) * 1973-07-05 1975-03-17
JPS5220819A (en) * 1976-08-16 1977-02-17 Matsushita Electric Ind Co Ltd Attaching method of parts
JPS5581455A (en) * 1978-12-15 1980-06-19 Jeol Ltd Observing method for crossover image of electron gun

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979454A (ro) * 1972-12-06 1974-07-31
JPS5025169A (ro) * 1973-07-05 1975-03-17
JPS5220819A (en) * 1976-08-16 1977-02-17 Matsushita Electric Ind Co Ltd Attaching method of parts
JPS5581455A (en) * 1978-12-15 1980-06-19 Jeol Ltd Observing method for crossover image of electron gun

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0437431U (ro) * 1990-07-26 1992-03-30

Also Published As

Publication number Publication date
JPS5732557A (en) 1982-02-22

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