JPS6246516Y2 - - Google Patents

Info

Publication number
JPS6246516Y2
JPS6246516Y2 JP17637782U JP17637782U JPS6246516Y2 JP S6246516 Y2 JPS6246516 Y2 JP S6246516Y2 JP 17637782 U JP17637782 U JP 17637782U JP 17637782 U JP17637782 U JP 17637782U JP S6246516 Y2 JPS6246516 Y2 JP S6246516Y2
Authority
JP
Japan
Prior art keywords
valve
pressure receiving
receiving chamber
chamber
plug
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17637782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5982634U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17637782U priority Critical patent/JPS5982634U/ja
Publication of JPS5982634U publication Critical patent/JPS5982634U/ja
Application granted granted Critical
Publication of JPS6246516Y2 publication Critical patent/JPS6246516Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP17637782U 1982-11-19 1982-11-19 工作機械の可動枠位置決め固定装置 Granted JPS5982634U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17637782U JPS5982634U (ja) 1982-11-19 1982-11-19 工作機械の可動枠位置決め固定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17637782U JPS5982634U (ja) 1982-11-19 1982-11-19 工作機械の可動枠位置決め固定装置

Publications (2)

Publication Number Publication Date
JPS5982634U JPS5982634U (ja) 1984-06-04
JPS6246516Y2 true JPS6246516Y2 (enEXAMPLES) 1987-12-16

Family

ID=30383485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17637782U Granted JPS5982634U (ja) 1982-11-19 1982-11-19 工作機械の可動枠位置決め固定装置

Country Status (1)

Country Link
JP (1) JPS5982634U (enEXAMPLES)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7608802B2 (en) 1999-01-06 2009-10-27 Mattson Technology, Inc. Heating device for heating semiconductor wafers in thermal processing chambers

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0410990Y2 (enEXAMPLES) * 1986-09-30 1992-03-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7608802B2 (en) 1999-01-06 2009-10-27 Mattson Technology, Inc. Heating device for heating semiconductor wafers in thermal processing chambers

Also Published As

Publication number Publication date
JPS5982634U (ja) 1984-06-04

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