JPS6246432Y2 - - Google Patents

Info

Publication number
JPS6246432Y2
JPS6246432Y2 JP15795984U JP15795984U JPS6246432Y2 JP S6246432 Y2 JPS6246432 Y2 JP S6246432Y2 JP 15795984 U JP15795984 U JP 15795984U JP 15795984 U JP15795984 U JP 15795984U JP S6246432 Y2 JPS6246432 Y2 JP S6246432Y2
Authority
JP
Japan
Prior art keywords
gas
leak valve
flow meter
vacuum container
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15795984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6175832U (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15795984U priority Critical patent/JPS6246432Y2/ja
Publication of JPS6175832U publication Critical patent/JPS6175832U/ja
Application granted granted Critical
Publication of JPS6246432Y2 publication Critical patent/JPS6246432Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
  • Pipeline Systems (AREA)
JP15795984U 1984-10-19 1984-10-19 Expired JPS6246432Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15795984U JPS6246432Y2 (cg-RX-API-DMAC10.html) 1984-10-19 1984-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15795984U JPS6246432Y2 (cg-RX-API-DMAC10.html) 1984-10-19 1984-10-19

Publications (2)

Publication Number Publication Date
JPS6175832U JPS6175832U (cg-RX-API-DMAC10.html) 1986-05-22
JPS6246432Y2 true JPS6246432Y2 (cg-RX-API-DMAC10.html) 1987-12-15

Family

ID=30715946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15795984U Expired JPS6246432Y2 (cg-RX-API-DMAC10.html) 1984-10-19 1984-10-19

Country Status (1)

Country Link
JP (1) JPS6246432Y2 (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPS6175832U (cg-RX-API-DMAC10.html) 1986-05-22

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