JPS6246143Y2 - - Google Patents
Info
- Publication number
- JPS6246143Y2 JPS6246143Y2 JP153386U JP153386U JPS6246143Y2 JP S6246143 Y2 JPS6246143 Y2 JP S6246143Y2 JP 153386 U JP153386 U JP 153386U JP 153386 U JP153386 U JP 153386U JP S6246143 Y2 JPS6246143 Y2 JP S6246143Y2
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- core tube
- resistor
- protrusions
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 18
- 229910052799 carbon Inorganic materials 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- 241001417523 Plesiopidae Species 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP153386U JPS6246143Y2 (enrdf_load_stackoverflow) | 1986-01-09 | 1986-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP153386U JPS6246143Y2 (enrdf_load_stackoverflow) | 1986-01-09 | 1986-01-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62115095U JPS62115095U (enrdf_load_stackoverflow) | 1987-07-22 |
| JPS6246143Y2 true JPS6246143Y2 (enrdf_load_stackoverflow) | 1987-12-11 |
Family
ID=30779529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP153386U Expired JPS6246143Y2 (enrdf_load_stackoverflow) | 1986-01-09 | 1986-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6246143Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-01-09 JP JP153386U patent/JPS6246143Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62115095U (enrdf_load_stackoverflow) | 1987-07-22 |
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