JPS6245663B2 - - Google Patents

Info

Publication number
JPS6245663B2
JPS6245663B2 JP56056758A JP5675881A JPS6245663B2 JP S6245663 B2 JPS6245663 B2 JP S6245663B2 JP 56056758 A JP56056758 A JP 56056758A JP 5675881 A JP5675881 A JP 5675881A JP S6245663 B2 JPS6245663 B2 JP S6245663B2
Authority
JP
Japan
Prior art keywords
electrode elements
deflection
electrodes
potential
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56056758A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57172642A (en
Inventor
Hidekazu Goto
Takashi Soma
Masanori Idesawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP56056758A priority Critical patent/JPS57172642A/ja
Publication of JPS57172642A publication Critical patent/JPS57172642A/ja
Publication of JPS6245663B2 publication Critical patent/JPS6245663B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56056758A 1981-04-15 1981-04-15 Deflector for charged particles Granted JPS57172642A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56056758A JPS57172642A (en) 1981-04-15 1981-04-15 Deflector for charged particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56056758A JPS57172642A (en) 1981-04-15 1981-04-15 Deflector for charged particles

Publications (2)

Publication Number Publication Date
JPS57172642A JPS57172642A (en) 1982-10-23
JPS6245663B2 true JPS6245663B2 (enrdf_load_stackoverflow) 1987-09-28

Family

ID=13036398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56056758A Granted JPS57172642A (en) 1981-04-15 1981-04-15 Deflector for charged particles

Country Status (1)

Country Link
JP (1) JPS57172642A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS57172642A (en) 1982-10-23

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