JPS6245661B2 - - Google Patents
Info
- Publication number
- JPS6245661B2 JPS6245661B2 JP3849783A JP3849783A JPS6245661B2 JP S6245661 B2 JPS6245661 B2 JP S6245661B2 JP 3849783 A JP3849783 A JP 3849783A JP 3849783 A JP3849783 A JP 3849783A JP S6245661 B2 JPS6245661 B2 JP S6245661B2
- Authority
- JP
- Japan
- Prior art keywords
- shadow mask
- electron beam
- etching
- alloy
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 27
- 238000005530 etching Methods 0.000 claims description 13
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 239000013078 crystal Substances 0.000 description 7
- 229910000640 Fe alloy Inorganic materials 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229960002089 ferrous chloride Drugs 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- NMCUIPGRVMDVDB-UHFFFAOYSA-L iron dichloride Chemical compound Cl[Fe]Cl NMCUIPGRVMDVDB-UHFFFAOYSA-L 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/06—Screens for shielding; Masks interposed in the electron stream
- H01J29/07—Shadow masks for colour television tubes
Landscapes
- ing And Chemical Polishing (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3849783A JPS59165340A (ja) | 1983-03-09 | 1983-03-09 | シャドウマスク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3849783A JPS59165340A (ja) | 1983-03-09 | 1983-03-09 | シャドウマスク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59165340A JPS59165340A (ja) | 1984-09-18 |
| JPS6245661B2 true JPS6245661B2 (enrdf_load_stackoverflow) | 1987-09-28 |
Family
ID=12526895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3849783A Granted JPS59165340A (ja) | 1983-03-09 | 1983-03-09 | シャドウマスク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59165340A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6419879U (enrdf_load_stackoverflow) * | 1987-07-24 | 1989-01-31 |
-
1983
- 1983-03-09 JP JP3849783A patent/JPS59165340A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6419879U (enrdf_load_stackoverflow) * | 1987-07-24 | 1989-01-31 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59165340A (ja) | 1984-09-18 |
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