JPS6245382U - - Google Patents

Info

Publication number
JPS6245382U
JPS6245382U JP13766785U JP13766785U JPS6245382U JP S6245382 U JPS6245382 U JP S6245382U JP 13766785 U JP13766785 U JP 13766785U JP 13766785 U JP13766785 U JP 13766785U JP S6245382 U JPS6245382 U JP S6245382U
Authority
JP
Japan
Prior art keywords
pipe
cryopump
pump case
expansion head
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13766785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037587Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985137667U priority Critical patent/JPH037587Y2/ja
Publication of JPS6245382U publication Critical patent/JPS6245382U/ja
Application granted granted Critical
Publication of JPH037587Y2 publication Critical patent/JPH037587Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1985137667U 1985-09-09 1985-09-09 Expired JPH037587Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985137667U JPH037587Y2 (enExample) 1985-09-09 1985-09-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985137667U JPH037587Y2 (enExample) 1985-09-09 1985-09-09

Publications (2)

Publication Number Publication Date
JPS6245382U true JPS6245382U (enExample) 1987-03-19
JPH037587Y2 JPH037587Y2 (enExample) 1991-02-25

Family

ID=31041935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985137667U Expired JPH037587Y2 (enExample) 1985-09-09 1985-09-09

Country Status (1)

Country Link
JP (1) JPH037587Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582379U (ja) * 1981-06-30 1983-01-08 日本真空技術株式会社 クライオポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582379U (ja) * 1981-06-30 1983-01-08 日本真空技術株式会社 クライオポンプ

Also Published As

Publication number Publication date
JPH037587Y2 (enExample) 1991-02-25

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