JPS6254285U - - Google Patents
Info
- Publication number
- JPS6254285U JPS6254285U JP14525985U JP14525985U JPS6254285U JP S6254285 U JPS6254285 U JP S6254285U JP 14525985 U JP14525985 U JP 14525985U JP 14525985 U JP14525985 U JP 14525985U JP S6254285 U JPS6254285 U JP S6254285U
- Authority
- JP
- Japan
- Prior art keywords
- cryopanel
- panel
- cryopump
- pump case
- adsorbent layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003463 adsorbent Substances 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 239000011230 binding agent Substances 0.000 claims 1
- 230000008014 freezing Effects 0.000 claims 1
- 238000007710 freezing Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14525985U JPS6254285U (enExample) | 1985-09-24 | 1985-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14525985U JPS6254285U (enExample) | 1985-09-24 | 1985-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6254285U true JPS6254285U (enExample) | 1987-04-03 |
Family
ID=31056631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14525985U Pending JPS6254285U (enExample) | 1985-09-24 | 1985-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6254285U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5825873A (ja) * | 1981-08-10 | 1983-02-16 | Mitsubishi Heavy Ind Ltd | 溶接電極位置検出方法 |
-
1985
- 1985-09-24 JP JP14525985U patent/JPS6254285U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5825873A (ja) * | 1981-08-10 | 1983-02-16 | Mitsubishi Heavy Ind Ltd | 溶接電極位置検出方法 |
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