JPH03106185U - - Google Patents
Info
- Publication number
- JPH03106185U JPH03106185U JP1431490U JP1431490U JPH03106185U JP H03106185 U JPH03106185 U JP H03106185U JP 1431490 U JP1431490 U JP 1431490U JP 1431490 U JP1431490 U JP 1431490U JP H03106185 U JPH03106185 U JP H03106185U
- Authority
- JP
- Japan
- Prior art keywords
- stage cryopanel
- fins
- refrigerator
- compressor
- cryopump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 239000003463 adsorbent Substances 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1431490U JPH03106185U (enExample) | 1990-02-16 | 1990-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1431490U JPH03106185U (enExample) | 1990-02-16 | 1990-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106185U true JPH03106185U (enExample) | 1991-11-01 |
Family
ID=31517683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1431490U Pending JPH03106185U (enExample) | 1990-02-16 | 1990-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106185U (enExample) |
-
1990
- 1990-02-16 JP JP1431490U patent/JPH03106185U/ja active Pending