JPS6241417B2 - - Google Patents

Info

Publication number
JPS6241417B2
JPS6241417B2 JP55010050A JP1005080A JPS6241417B2 JP S6241417 B2 JPS6241417 B2 JP S6241417B2 JP 55010050 A JP55010050 A JP 55010050A JP 1005080 A JP1005080 A JP 1005080A JP S6241417 B2 JPS6241417 B2 JP S6241417B2
Authority
JP
Japan
Prior art keywords
electron beam
scanning
area
minute
drawn
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55010050A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56108233A (en
Inventor
Shigemasa Shimura
Soichiro Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1005080A priority Critical patent/JPS56108233A/ja
Publication of JPS56108233A publication Critical patent/JPS56108233A/ja
Publication of JPS6241417B2 publication Critical patent/JPS6241417B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Electron Beam Exposure (AREA)
JP1005080A 1980-02-01 1980-02-01 Electron-beam lithography apparatus Granted JPS56108233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1005080A JPS56108233A (en) 1980-02-01 1980-02-01 Electron-beam lithography apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1005080A JPS56108233A (en) 1980-02-01 1980-02-01 Electron-beam lithography apparatus

Publications (2)

Publication Number Publication Date
JPS56108233A JPS56108233A (en) 1981-08-27
JPS6241417B2 true JPS6241417B2 (enExample) 1987-09-02

Family

ID=11739563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1005080A Granted JPS56108233A (en) 1980-02-01 1980-02-01 Electron-beam lithography apparatus

Country Status (1)

Country Link
JP (1) JPS56108233A (enExample)

Also Published As

Publication number Publication date
JPS56108233A (en) 1981-08-27

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