JPS6240856B2 - - Google Patents

Info

Publication number
JPS6240856B2
JPS6240856B2 JP57158955A JP15895582A JPS6240856B2 JP S6240856 B2 JPS6240856 B2 JP S6240856B2 JP 57158955 A JP57158955 A JP 57158955A JP 15895582 A JP15895582 A JP 15895582A JP S6240856 B2 JPS6240856 B2 JP S6240856B2
Authority
JP
Japan
Prior art keywords
substrate
spring
substrate holder
holder
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57158955A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5948936A (ja
Inventor
Ryoji Tsunoda
Fumio Muramatsu
Genichi Kanazawa
Makoto Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP57158955A priority Critical patent/JPS5948936A/ja
Publication of JPS5948936A publication Critical patent/JPS5948936A/ja
Publication of JPS6240856B2 publication Critical patent/JPS6240856B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/3308—

Landscapes

  • Manipulator (AREA)
  • Drying Of Semiconductors (AREA)
JP57158955A 1982-09-14 1982-09-14 垂直形半導体基板表面処理装置の基板搬送保持装置 Granted JPS5948936A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57158955A JPS5948936A (ja) 1982-09-14 1982-09-14 垂直形半導体基板表面処理装置の基板搬送保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57158955A JPS5948936A (ja) 1982-09-14 1982-09-14 垂直形半導体基板表面処理装置の基板搬送保持装置

Publications (2)

Publication Number Publication Date
JPS5948936A JPS5948936A (ja) 1984-03-21
JPS6240856B2 true JPS6240856B2 (cg-RX-API-DMAC10.html) 1987-08-31

Family

ID=15682990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57158955A Granted JPS5948936A (ja) 1982-09-14 1982-09-14 垂直形半導体基板表面処理装置の基板搬送保持装置

Country Status (1)

Country Link
JP (1) JPS5948936A (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2654982B2 (ja) * 1988-11-08 1997-09-17 山陽特殊製鋼株式会社 Ｆｅ−Ａ▲ｌ▼−Ｓｉ系合金及びその製造方法
CN116100391B (zh) * 2023-02-22 2023-10-10 苏州希瑞格机器人科技有限公司 一种智能夹取定位的法兰表面多角度打磨装置

Also Published As

Publication number Publication date
JPS5948936A (ja) 1984-03-21

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