JPS6239812B2 - - Google Patents
Info
- Publication number
- JPS6239812B2 JPS6239812B2 JP56091801A JP9180181A JPS6239812B2 JP S6239812 B2 JPS6239812 B2 JP S6239812B2 JP 56091801 A JP56091801 A JP 56091801A JP 9180181 A JP9180181 A JP 9180181A JP S6239812 B2 JPS6239812 B2 JP S6239812B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- inspection
- chip
- information
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9180181A JPS57207335A (en) | 1981-06-15 | 1981-06-15 | Pattern checking system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9180181A JPS57207335A (en) | 1981-06-15 | 1981-06-15 | Pattern checking system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57207335A JPS57207335A (en) | 1982-12-20 |
| JPS6239812B2 true JPS6239812B2 (enrdf_load_stackoverflow) | 1987-08-25 |
Family
ID=14036714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9180181A Granted JPS57207335A (en) | 1981-06-15 | 1981-06-15 | Pattern checking system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57207335A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5827323A (ja) * | 1981-08-12 | 1983-02-18 | Hitachi Ltd | マスク検査方法および装置 |
| JPS596536A (ja) * | 1982-07-05 | 1984-01-13 | Hitachi Ltd | 欠陥検査装置 |
| JPS63260147A (ja) * | 1987-04-17 | 1988-10-27 | Nec Corp | パタ−ン検証方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53117978A (en) * | 1977-03-25 | 1978-10-14 | Hitachi Ltd | Automatic mask appearance inspection apparatus |
| JPS54102837A (en) * | 1978-01-28 | 1979-08-13 | Nippon Telegr & Teleph Corp <Ntt> | Pattern check system |
| JPS54113262A (en) * | 1978-02-24 | 1979-09-04 | Hitachi Ltd | Mask inspection unit |
-
1981
- 1981-06-15 JP JP9180181A patent/JPS57207335A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57207335A (en) | 1982-12-20 |
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