Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co LtdfiledCriticalRohm Co Ltd
Priority to JP60179091ApriorityCriticalpatent/JPS6239020A/ja
Publication of JPS6239020ApublicationCriticalpatent/JPS6239020A/ja
Publication of JPH0528496B2publicationCriticalpatent/JPH0528496B2/ja
Opto-lithographische vorrichtung mit einem verstellbaren linsensystem und kontrollverfahren fuer die abbildungseigenschaften eines linsensystems in einer solchen vorrichtung.