JPS6238035B2 - - Google Patents
Info
- Publication number
- JPS6238035B2 JPS6238035B2 JP16702783A JP16702783A JPS6238035B2 JP S6238035 B2 JPS6238035 B2 JP S6238035B2 JP 16702783 A JP16702783 A JP 16702783A JP 16702783 A JP16702783 A JP 16702783A JP S6238035 B2 JPS6238035 B2 JP S6238035B2
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- gear
- plate
- circular
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 239000011280 coal tar Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000003973 paint Substances 0.000 description 4
- 230000002265 prevention Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000013011 mating Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
Landscapes
- Gripping On Spindles (AREA)
- Manipulator (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16702783A JPS6062491A (ja) | 1983-09-09 | 1983-09-09 | 自転及び公転可能な回転式チヤツク |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16702783A JPS6062491A (ja) | 1983-09-09 | 1983-09-09 | 自転及び公転可能な回転式チヤツク |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6062491A JPS6062491A (ja) | 1985-04-10 |
JPS6238035B2 true JPS6238035B2 (fr) | 1987-08-15 |
Family
ID=15842029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16702783A Granted JPS6062491A (ja) | 1983-09-09 | 1983-09-09 | 自転及び公転可能な回転式チヤツク |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6062491A (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62101045A (ja) * | 1985-10-28 | 1987-05-11 | Toshiba Corp | ウエ−ハの中心合せ装置 |
JPH0680721B2 (ja) * | 1988-05-13 | 1994-10-12 | 富士通株式会社 | ウェハ位置決め機構 |
JP5529722B2 (ja) * | 2010-12-24 | 2014-06-25 | 株式会社フジクラ | 取り外し工具及び取り外し方法 |
JP2021133442A (ja) * | 2020-02-25 | 2021-09-13 | 富士精工株式会社 | ワーク保持装置 |
-
1983
- 1983-09-09 JP JP16702783A patent/JPS6062491A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6062491A (ja) | 1985-04-10 |
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