JPS6237927U - - Google Patents
Info
- Publication number
- JPS6237927U JPS6237927U JP12953785U JP12953785U JPS6237927U JP S6237927 U JPS6237927 U JP S6237927U JP 12953785 U JP12953785 U JP 12953785U JP 12953785 U JP12953785 U JP 12953785U JP S6237927 U JPS6237927 U JP S6237927U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- quartz
- supported
- heat treatment
- treatment apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12953785U JPS6237927U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-08-27 | 1985-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12953785U JPS6237927U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-08-27 | 1985-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237927U true JPS6237927U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-03-06 |
Family
ID=31026192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12953785U Pending JPS6237927U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-08-27 | 1985-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237927U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007519232A (ja) * | 2003-12-19 | 2007-07-12 | マトソン テクノロジー カナダ インコーポレイテッド | 工作物の熱誘起運動を抑制する機器及び装置 |
| JP2013030772A (ja) * | 2003-12-19 | 2013-02-07 | Mattson Technology Canada Inc | 工作物の熱誘起運動を抑制する機器及び装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61129834A (ja) * | 1984-11-28 | 1986-06-17 | Dainippon Screen Mfg Co Ltd | 光照射型熱処理装置 |
-
1985
- 1985-08-27 JP JP12953785U patent/JPS6237927U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61129834A (ja) * | 1984-11-28 | 1986-06-17 | Dainippon Screen Mfg Co Ltd | 光照射型熱処理装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007519232A (ja) * | 2003-12-19 | 2007-07-12 | マトソン テクノロジー カナダ インコーポレイテッド | 工作物の熱誘起運動を抑制する機器及び装置 |
| JP2013030772A (ja) * | 2003-12-19 | 2013-02-07 | Mattson Technology Canada Inc | 工作物の熱誘起運動を抑制する機器及び装置 |