JPS6237915A - 溝構造磁性基板の製造方法 - Google Patents
溝構造磁性基板の製造方法Info
- Publication number
- JPS6237915A JPS6237915A JP17743085A JP17743085A JPS6237915A JP S6237915 A JPS6237915 A JP S6237915A JP 17743085 A JP17743085 A JP 17743085A JP 17743085 A JP17743085 A JP 17743085A JP S6237915 A JPS6237915 A JP S6237915A
- Authority
- JP
- Japan
- Prior art keywords
- alumina
- groove
- magnetic substrate
- magnetic
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 75
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 64
- 239000000463 material Substances 0.000 claims abstract description 9
- 239000002245 particle Substances 0.000 claims abstract description 6
- 230000005684 electric field Effects 0.000 claims abstract description 4
- 238000004544 sputter deposition Methods 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000010408 film Substances 0.000 abstract description 47
- 239000010409 thin film Substances 0.000 abstract description 26
- 239000006185 dispersion Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 27
- 229910000859 α-Fe Inorganic materials 0.000 description 22
- 239000007789 gas Substances 0.000 description 9
- 239000013077 target material Substances 0.000 description 6
- 229910001035 Soft ferrite Inorganic materials 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910003962 NiZn Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17743085A JPS6237915A (ja) | 1985-08-12 | 1985-08-12 | 溝構造磁性基板の製造方法 |
| US06/888,873 US4777074A (en) | 1985-08-12 | 1986-07-24 | Grooved magnetic substrates and method for producing the same |
| US07/213,234 US4875987A (en) | 1985-08-12 | 1988-06-29 | Grooved magnetic substrates and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17743085A JPS6237915A (ja) | 1985-08-12 | 1985-08-12 | 溝構造磁性基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6237915A true JPS6237915A (ja) | 1987-02-18 |
| JPH0518447B2 JPH0518447B2 (enrdf_load_stackoverflow) | 1993-03-12 |
Family
ID=16030799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17743085A Granted JPS6237915A (ja) | 1985-08-12 | 1985-08-12 | 溝構造磁性基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237915A (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58121118A (ja) * | 1982-01-12 | 1983-07-19 | Hitachi Ltd | 薄膜磁気ヘツド |
| JPS59203213A (ja) * | 1983-05-04 | 1984-11-17 | Sumitomo Special Metals Co Ltd | 溝構造磁性基板の製造方法 |
-
1985
- 1985-08-12 JP JP17743085A patent/JPS6237915A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58121118A (ja) * | 1982-01-12 | 1983-07-19 | Hitachi Ltd | 薄膜磁気ヘツド |
| JPS59203213A (ja) * | 1983-05-04 | 1984-11-17 | Sumitomo Special Metals Co Ltd | 溝構造磁性基板の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518447B2 (enrdf_load_stackoverflow) | 1993-03-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4875987A (en) | Grooved magnetic substrates and method for producing the same | |
| US6033532A (en) | Oxide film fabrication method and electronic device | |
| JPH0466366B2 (enrdf_load_stackoverflow) | ||
| US5284539A (en) | Method of making segmented pyrolytic graphite sputtering targets | |
| JPS6237915A (ja) | 溝構造磁性基板の製造方法 | |
| JPS59203213A (ja) | 溝構造磁性基板の製造方法 | |
| CN102051497A (zh) | 金银镶嵌靶材及其薄膜的制备方法 | |
| Matsuoka et al. | rf and dc discharge characteristics for opposed‐targets sputtering | |
| US4752344A (en) | Magnetic layer and method of manufacture | |
| US6007685A (en) | Deposition of highly doped silicon dioxide films | |
| JPH07110912A (ja) | 磁気ヘッド及びその製造方法 | |
| JP2000212738A (ja) | マグネトロンスパッタ法および磁気記録媒体の製造方法 | |
| JPS6247815A (ja) | 溝構造磁性基板の製造方法 | |
| US5322595A (en) | Manufacture of carbon substrate for magnetic disk | |
| JPH035644B2 (enrdf_load_stackoverflow) | ||
| KR20120074562A (ko) | 초고장력 코팅막을 갖는 방향성 전기 강판 및 그 제조 방법 | |
| JPS61127862A (ja) | 薄膜形成方法及びその形成装置 | |
| JPS6024369A (ja) | イオンビ−ム発生方法及びその装置 | |
| JPH06325312A (ja) | 誘導磁気ヘッド用ＦｅＲｈＧａＳｉ軟磁性材料 | |
| JPH06264218A (ja) | スパッタリングターゲット | |
| Nishimura et al. | Thin‐film formation using single‐grid ion‐beam sputtering | |
| Hoshi et al. | High‐rate, low‐temperature sputtering method of facing‐targets type and its application for deposition of magnetic films | |
| JPH0352641B2 (enrdf_load_stackoverflow) | ||
| JPH03150709A (ja) | 磁気ヘッドの製造方法 | |
| JPH04304367A (ja) | 薄膜形成方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |