JPH0352641B2 - - Google Patents

Info

Publication number
JPH0352641B2
JPH0352641B2 JP58133032A JP13303283A JPH0352641B2 JP H0352641 B2 JPH0352641 B2 JP H0352641B2 JP 58133032 A JP58133032 A JP 58133032A JP 13303283 A JP13303283 A JP 13303283A JP H0352641 B2 JPH0352641 B2 JP H0352641B2
Authority
JP
Japan
Prior art keywords
magnetic
film
magnetic recording
phase
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58133032A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6025012A (ja
Inventor
Masahiko Naoe
Shozo Ishibashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP13303283A priority Critical patent/JPS6025012A/ja
Priority to US06/630,514 priority patent/US4690744A/en
Priority to DE8484304963T priority patent/DE3480039D1/de
Priority to EP84304963A priority patent/EP0132398B1/en
Publication of JPS6025012A publication Critical patent/JPS6025012A/ja
Publication of JPH0352641B2 publication Critical patent/JPH0352641B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Magnetic Heads (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)
JP13303283A 1983-07-20 1983-07-20 垂直磁気記録用磁気ヘッド Granted JPS6025012A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP13303283A JPS6025012A (ja) 1983-07-20 1983-07-20 垂直磁気記録用磁気ヘッド
US06/630,514 US4690744A (en) 1983-07-20 1984-07-13 Method of ion beam generation and an apparatus based on such method
DE8484304963T DE3480039D1 (en) 1983-07-20 1984-07-20 A method and apparatus for ion beam generation
EP84304963A EP0132398B1 (en) 1983-07-20 1984-07-20 A method and apparatus for ion beam generation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13303283A JPS6025012A (ja) 1983-07-20 1983-07-20 垂直磁気記録用磁気ヘッド

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP23116490A Division JPH0648526B2 (ja) 1990-08-31 1990-08-31 磁気ヘッドの製造方法

Publications (2)

Publication Number Publication Date
JPS6025012A JPS6025012A (ja) 1985-02-07
JPH0352641B2 true JPH0352641B2 (enrdf_load_stackoverflow) 1991-08-12

Family

ID=15095210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13303283A Granted JPS6025012A (ja) 1983-07-20 1983-07-20 垂直磁気記録用磁気ヘッド

Country Status (1)

Country Link
JP (1) JPS6025012A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4969962A (en) * 1988-08-20 1990-11-13 Victor Company Of Japan, Ltd. Magnetic alloys for magnetic head

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102723A (en) * 1977-02-21 1978-09-07 Hitachi Ltd Magnetic head
JPS5836908A (ja) * 1981-08-24 1983-03-04 Sumitomo Special Metals Co Ltd 窒化物薄膜軟質磁性体の製造法
JPS58180008A (ja) * 1982-04-15 1983-10-21 Sony Corp 磁気記録媒体

Also Published As

Publication number Publication date
JPS6025012A (ja) 1985-02-07

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