JPS6237811B2 - - Google Patents

Info

Publication number
JPS6237811B2
JPS6237811B2 JP53134298A JP13429878A JPS6237811B2 JP S6237811 B2 JPS6237811 B2 JP S6237811B2 JP 53134298 A JP53134298 A JP 53134298A JP 13429878 A JP13429878 A JP 13429878A JP S6237811 B2 JPS6237811 B2 JP S6237811B2
Authority
JP
Japan
Prior art keywords
film
semiconductor film
insulating substrate
semiconductor
silicon dioxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53134298A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5561055A (en
Inventor
Takashi Okuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP13429878A priority Critical patent/JPS5561055A/ja
Publication of JPS5561055A publication Critical patent/JPS5561055A/ja
Publication of JPS6237811B2 publication Critical patent/JPS6237811B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP13429878A 1978-10-31 1978-10-31 Semiconductor device Granted JPS5561055A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13429878A JPS5561055A (en) 1978-10-31 1978-10-31 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13429878A JPS5561055A (en) 1978-10-31 1978-10-31 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5561055A JPS5561055A (en) 1980-05-08
JPS6237811B2 true JPS6237811B2 (enrdf_load_stackoverflow) 1987-08-14

Family

ID=15125006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13429878A Granted JPS5561055A (en) 1978-10-31 1978-10-31 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5561055A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5289478A (en) * 1976-01-22 1977-07-27 Agency Of Ind Science & Technol Mos integrated circuit

Also Published As

Publication number Publication date
JPS5561055A (en) 1980-05-08

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