JPS6237541B2 - - Google Patents

Info

Publication number
JPS6237541B2
JPS6237541B2 JP51070572A JP7057276A JPS6237541B2 JP S6237541 B2 JPS6237541 B2 JP S6237541B2 JP 51070572 A JP51070572 A JP 51070572A JP 7057276 A JP7057276 A JP 7057276A JP S6237541 B2 JPS6237541 B2 JP S6237541B2
Authority
JP
Japan
Prior art keywords
film
polycrystalline silicon
forming
silicon film
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51070572A
Other languages
English (en)
Japanese (ja)
Other versions
JPS52153383A (en
Inventor
Kazuhiko Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7057276A priority Critical patent/JPS52153383A/ja
Publication of JPS52153383A publication Critical patent/JPS52153383A/ja
Publication of JPS6237541B2 publication Critical patent/JPS6237541B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP7057276A 1976-06-15 1976-06-15 Preparation of semiconductor device Granted JPS52153383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7057276A JPS52153383A (en) 1976-06-15 1976-06-15 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7057276A JPS52153383A (en) 1976-06-15 1976-06-15 Preparation of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52153383A JPS52153383A (en) 1977-12-20
JPS6237541B2 true JPS6237541B2 (oth) 1987-08-13

Family

ID=13435392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7057276A Granted JPS52153383A (en) 1976-06-15 1976-06-15 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52153383A (oth)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03296018A (ja) * 1990-04-16 1991-12-26 Matsushita Electric Ind Co Ltd 液晶ディスプレイ装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4231051A (en) * 1978-06-06 1980-10-28 Rockwell International Corporation Process for producing minimal geometry devices for VSLI applications utilizing self-aligned gates and self-aligned contacts, and resultant structures
JPS5561037A (en) * 1978-10-31 1980-05-08 Toshiba Corp Preparation of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03296018A (ja) * 1990-04-16 1991-12-26 Matsushita Electric Ind Co Ltd 液晶ディスプレイ装置

Also Published As

Publication number Publication date
JPS52153383A (en) 1977-12-20

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