JPS6237503B2 - - Google Patents
Info
- Publication number
- JPS6237503B2 JPS6237503B2 JP55183575A JP18357580A JPS6237503B2 JP S6237503 B2 JPS6237503 B2 JP S6237503B2 JP 55183575 A JP55183575 A JP 55183575A JP 18357580 A JP18357580 A JP 18357580A JP S6237503 B2 JPS6237503 B2 JP S6237503B2
- Authority
- JP
- Japan
- Prior art keywords
- image
- energy
- electron
- electron beam
- energy analyzer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 17
- 238000003384 imaging method Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 239000000523 sample Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000001000 micrograph Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18357580A JPS57107549A (en) | 1980-12-24 | 1980-12-24 | Electron microscope having energy analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18357580A JPS57107549A (en) | 1980-12-24 | 1980-12-24 | Electron microscope having energy analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57107549A JPS57107549A (en) | 1982-07-05 |
| JPS6237503B2 true JPS6237503B2 (US08124630-20120228-C00102.png) | 1987-08-12 |
Family
ID=16138204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18357580A Granted JPS57107549A (en) | 1980-12-24 | 1980-12-24 | Electron microscope having energy analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57107549A (US08124630-20120228-C00102.png) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50104983A (US08124630-20120228-C00102.png) * | 1974-01-22 | 1975-08-19 | ||
| JPS52117691A (en) * | 1976-03-29 | 1977-10-03 | Hitachi Ltd | Charged particle detector |
| JPS55144577A (en) * | 1979-04-28 | 1980-11-11 | Hitachi Ltd | Energy analyzer for electron ray |
-
1980
- 1980-12-24 JP JP18357580A patent/JPS57107549A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50104983A (US08124630-20120228-C00102.png) * | 1974-01-22 | 1975-08-19 | ||
| JPS52117691A (en) * | 1976-03-29 | 1977-10-03 | Hitachi Ltd | Charged particle detector |
| JPS55144577A (en) * | 1979-04-28 | 1980-11-11 | Hitachi Ltd | Energy analyzer for electron ray |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57107549A (en) | 1982-07-05 |
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