JPS6236388B2 - - Google Patents
Info
- Publication number
- JPS6236388B2 JPS6236388B2 JP16818882A JP16818882A JPS6236388B2 JP S6236388 B2 JPS6236388 B2 JP S6236388B2 JP 16818882 A JP16818882 A JP 16818882A JP 16818882 A JP16818882 A JP 16818882A JP S6236388 B2 JPS6236388 B2 JP S6236388B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- probe
- sample holding
- case
- stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 claims description 82
- 239000004065 semiconductor Substances 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 43
- 239000002184 metal Substances 0.000 claims description 7
- 238000009434 installation Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 239000000110 cooling liquid Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 2
- 102100031920 Dihydrolipoyllysine-residue succinyltransferase component of 2-oxoglutarate dehydrogenase complex, mitochondrial Human genes 0.000 description 1
- 101000992065 Homo sapiens Dihydrolipoyllysine-residue succinyltransferase component of 2-oxoglutarate dehydrogenase complex, mitochondrial Proteins 0.000 description 1
- 238000001773 deep-level transient spectroscopy Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16818882A JPS5957444A (ja) | 1982-09-27 | 1982-09-27 | 半導体基板測定用カセツト式ユニツト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16818882A JPS5957444A (ja) | 1982-09-27 | 1982-09-27 | 半導体基板測定用カセツト式ユニツト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5957444A JPS5957444A (ja) | 1984-04-03 |
| JPS6236388B2 true JPS6236388B2 (enrdf_load_stackoverflow) | 1987-08-06 |
Family
ID=15863409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16818882A Granted JPS5957444A (ja) | 1982-09-27 | 1982-09-27 | 半導体基板測定用カセツト式ユニツト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5957444A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS639945A (ja) * | 1986-07-01 | 1988-01-16 | Fujitsu Ltd | 真空中の電気特性測定方法 |
| US5084671A (en) * | 1987-09-02 | 1992-01-28 | Tokyo Electron Limited | Electric probing-test machine having a cooling system |
-
1982
- 1982-09-27 JP JP16818882A patent/JPS5957444A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5957444A (ja) | 1984-04-03 |
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