JPS6236240Y2 - - Google Patents

Info

Publication number
JPS6236240Y2
JPS6236240Y2 JP1982120729U JP12072982U JPS6236240Y2 JP S6236240 Y2 JPS6236240 Y2 JP S6236240Y2 JP 1982120729 U JP1982120729 U JP 1982120729U JP 12072982 U JP12072982 U JP 12072982U JP S6236240 Y2 JPS6236240 Y2 JP S6236240Y2
Authority
JP
Japan
Prior art keywords
plasma
microwave
plasma generation
gas
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982120729U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5924132U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12072982U priority Critical patent/JPS5924132U/ja
Publication of JPS5924132U publication Critical patent/JPS5924132U/ja
Application granted granted Critical
Publication of JPS6236240Y2 publication Critical patent/JPS6236240Y2/ja
Granted legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)
JP12072982U 1982-08-09 1982-08-09 マイクロ波プラズマ処理装置 Granted JPS5924132U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12072982U JPS5924132U (ja) 1982-08-09 1982-08-09 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12072982U JPS5924132U (ja) 1982-08-09 1982-08-09 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS5924132U JPS5924132U (ja) 1984-02-15
JPS6236240Y2 true JPS6236240Y2 (cs) 1987-09-14

Family

ID=30276581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12072982U Granted JPS5924132U (ja) 1982-08-09 1982-08-09 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS5924132U (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59226027A (ja) * 1983-06-07 1984-12-19 Toyota Motor Corp プラズマ処理方法
JPH0831417B2 (ja) * 1988-12-02 1996-03-27 工業技術院長 プラズマ加工堆積装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221332U (cs) * 1975-08-01 1977-02-15

Also Published As

Publication number Publication date
JPS5924132U (ja) 1984-02-15

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