JPS6234444Y2 - - Google Patents
Info
- Publication number
- JPS6234444Y2 JPS6234444Y2 JP1983016685U JP1668583U JPS6234444Y2 JP S6234444 Y2 JPS6234444 Y2 JP S6234444Y2 JP 1983016685 U JP1983016685 U JP 1983016685U JP 1668583 U JP1668583 U JP 1668583U JP S6234444 Y2 JPS6234444 Y2 JP S6234444Y2
- Authority
- JP
- Japan
- Prior art keywords
- chuck stage
- stage
- cutting
- base sheet
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005520 cutting process Methods 0.000 claims description 21
- 238000009423 ventilation Methods 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 22
- 239000004065 semiconductor Substances 0.000 description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Photographic Processing Devices Using Wet Methods (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1668583U JPS59123340U (ja) | 1983-02-09 | 1983-02-09 | 断裁用チヤツクステ−ジ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1668583U JPS59123340U (ja) | 1983-02-09 | 1983-02-09 | 断裁用チヤツクステ−ジ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59123340U JPS59123340U (ja) | 1984-08-20 |
| JPS6234444Y2 true JPS6234444Y2 (US06168776-20010102-C00028.png) | 1987-09-02 |
Family
ID=30147955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1668583U Granted JPS59123340U (ja) | 1983-02-09 | 1983-02-09 | 断裁用チヤツクステ−ジ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59123340U (US06168776-20010102-C00028.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI689376B (zh) * | 2015-04-14 | 2020-04-01 | 日商迪思科股份有限公司 | 切割盤 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003007650A (ja) * | 2001-06-19 | 2003-01-10 | Tokyo Seimitsu Co Ltd | ダイシングマシン |
| JP5025282B2 (ja) * | 2007-02-21 | 2012-09-12 | 株式会社ディスコ | フレームクランプ装置および切削装置 |
| JP6625397B2 (ja) * | 2015-10-26 | 2019-12-25 | 株式会社ディスコ | バイト切削装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5927941A (ja) * | 1982-07-16 | 1984-02-14 | ヘキスト・アクチエンゲゼルシヤフト | ポリビニルエステル水性分散物、その製造方法及びその用途 |
-
1983
- 1983-02-09 JP JP1668583U patent/JPS59123340U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5927941A (ja) * | 1982-07-16 | 1984-02-14 | ヘキスト・アクチエンゲゼルシヤフト | ポリビニルエステル水性分散物、その製造方法及びその用途 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI689376B (zh) * | 2015-04-14 | 2020-04-01 | 日商迪思科股份有限公司 | 切割盤 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59123340U (ja) | 1984-08-20 |
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