JPS6234427U - - Google Patents

Info

Publication number
JPS6234427U
JPS6234427U JP1985125538U JP12553885U JPS6234427U JP S6234427 U JPS6234427 U JP S6234427U JP 1985125538 U JP1985125538 U JP 1985125538U JP 12553885 U JP12553885 U JP 12553885U JP S6234427 U JPS6234427 U JP S6234427U
Authority
JP
Japan
Prior art keywords
depth
semiconductor substrate
wet etching
pattern
alignment mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985125538U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322903Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985125538U priority Critical patent/JPH0322903Y2/ja
Publication of JPS6234427U publication Critical patent/JPS6234427U/ja
Application granted granted Critical
Publication of JPH0322903Y2 publication Critical patent/JPH0322903Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP1985125538U 1985-08-15 1985-08-15 Expired JPH0322903Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985125538U JPH0322903Y2 (enrdf_load_stackoverflow) 1985-08-15 1985-08-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985125538U JPH0322903Y2 (enrdf_load_stackoverflow) 1985-08-15 1985-08-15

Publications (2)

Publication Number Publication Date
JPS6234427U true JPS6234427U (enrdf_load_stackoverflow) 1987-02-28
JPH0322903Y2 JPH0322903Y2 (enrdf_load_stackoverflow) 1991-05-20

Family

ID=31018519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985125538U Expired JPH0322903Y2 (enrdf_load_stackoverflow) 1985-08-15 1985-08-15

Country Status (1)

Country Link
JP (1) JPH0322903Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109817605A (zh) * 2018-05-29 2019-05-28 苏州能讯高能半导体有限公司 半导体器件及其制备方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109817605A (zh) * 2018-05-29 2019-05-28 苏州能讯高能半导体有限公司 半导体器件及其制备方法
CN109817605B (zh) * 2018-05-29 2025-02-28 苏州能讯高能半导体有限公司 半导体器件及其制备方法

Also Published As

Publication number Publication date
JPH0322903Y2 (enrdf_load_stackoverflow) 1991-05-20

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