JPS6234336U - - Google Patents

Info

Publication number
JPS6234336U
JPS6234336U JP12457385U JP12457385U JPS6234336U JP S6234336 U JPS6234336 U JP S6234336U JP 12457385 U JP12457385 U JP 12457385U JP 12457385 U JP12457385 U JP 12457385U JP S6234336 U JPS6234336 U JP S6234336U
Authority
JP
Japan
Prior art keywords
metal diaphragm
semiconductor film
pressure
detection device
deformed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12457385U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12457385U priority Critical patent/JPS6234336U/ja
Publication of JPS6234336U publication Critical patent/JPS6234336U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例に係る圧力検出装置
の縦断面図、第２図は第１図の装置のダイアフラ
ムの要部拡大断面図である。 符号の説明、２……金属製ダイアフラム、８…
…絶縁被膜、９……電極部、１０……半導体被膜
。

Claims (1)

    【実用新案登録請求の範囲】
  1. 絶縁被膜を介して、金属製ダイアフラム表面に
    半導体被膜を設け、上記金属製ダイアフラムの変
    形時の歪量を半導体被膜のピエゾ抵抗効果による
    抵抗値変化に変換して流体の圧力を検出すること
    を特徴とする圧力検出装置。
JP12457385U 1985-08-15 1985-08-15 Pending JPS6234336U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12457385U JPS6234336U (ja) 1985-08-15 1985-08-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12457385U JPS6234336U (ja) 1985-08-15 1985-08-15

Publications (1)

Publication Number Publication Date
JPS6234336U true JPS6234336U (ja) 1987-02-28

Family

ID=31016712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12457385U Pending JPS6234336U (ja) 1985-08-15 1985-08-15

Country Status (1)

Country Link
JP (1) JPS6234336U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59132327A (ja) * 1983-01-18 1984-07-30 Aisin Seiki Co Ltd 圧力センサ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59132327A (ja) * 1983-01-18 1984-07-30 Aisin Seiki Co Ltd 圧力センサ

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