JPS6232332A - 圧力検出素子の検定方法及び装置 - Google Patents
圧力検出素子の検定方法及び装置Info
- Publication number
- JPS6232332A JPS6232332A JP60172785A JP17278585A JPS6232332A JP S6232332 A JPS6232332 A JP S6232332A JP 60172785 A JP60172785 A JP 60172785A JP 17278585 A JP17278585 A JP 17278585A JP S6232332 A JPS6232332 A JP S6232332A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- detection element
- wafer
- calibration
- verification
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 52
- 238000001514 detection method Methods 0.000 title claims description 158
- 238000012795 verification Methods 0.000 title claims description 63
- 239000004065 semiconductor Substances 0.000 claims abstract description 48
- 238000012360 testing method Methods 0.000 claims abstract description 37
- 239000013078 crystal Substances 0.000 claims abstract description 34
- 238000002347 injection Methods 0.000 claims description 49
- 239000007924 injection Substances 0.000 claims description 49
- 241001422033 Thestylus Species 0.000 claims description 24
- 230000008569 process Effects 0.000 abstract description 30
- 239000000523 sample Substances 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 81
- 238000005259 measurement Methods 0.000 description 24
- 238000010586 diagram Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- MMOXZBCLCQITDF-UHFFFAOYSA-N N,N-diethyl-m-toluamide Chemical group CCN(CC)C(=O)C1=CC=CC(C)=C1 MMOXZBCLCQITDF-UHFFFAOYSA-N 0.000 description 1
- 241000287127 Passeridae Species 0.000 description 1
- 206010040007 Sense of oppression Diseases 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 206010036596 premature ejaculation Diseases 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 210000004243 sweat Anatomy 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/082—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to a condition of the discharged jet or spray, e.g. to jet shape, spray pattern or droplet size
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60172785A JPS6232332A (ja) | 1985-08-05 | 1985-08-05 | 圧力検出素子の検定方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60172785A JPS6232332A (ja) | 1985-08-05 | 1985-08-05 | 圧力検出素子の検定方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6232332A true JPS6232332A (ja) | 1987-02-12 |
| JPH0458898B2 JPH0458898B2 (enExample) | 1992-09-18 |
Family
ID=15948305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60172785A Granted JPS6232332A (ja) | 1985-08-05 | 1985-08-05 | 圧力検出素子の検定方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6232332A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100350777B1 (ko) * | 2000-08-18 | 2002-08-28 | 한국생산기술연구원 | 분사노즐의 압력측정장치 및 그 방법 |
| JP2008507688A (ja) * | 2004-07-21 | 2008-03-13 | アフォレ オサケユイチア | 圧力試験のための圧力試験装置および方法 |
| JPWO2007125756A1 (ja) * | 2006-04-26 | 2009-09-10 | 東京エレクトロン株式会社 | 微小構造体の検査装置、及び微小構造体の検査方法 |
| WO2010098053A1 (ja) * | 2009-02-27 | 2010-09-02 | 株式会社 日立ハイテクノロジーズ | 化学分析装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5456378A (en) * | 1977-10-14 | 1979-05-07 | Hitachi Ltd | Wafer prober apparatus |
| JPS55125639A (en) * | 1979-03-23 | 1980-09-27 | Hitachi Ltd | Inspection apparatus |
| JPS56107142A (en) * | 1980-01-31 | 1981-08-25 | Toshiba Corp | Property evaluation device for semiconductor pressure detection element |
| JPS57122546U (enExample) * | 1981-01-23 | 1982-07-30 |
-
1985
- 1985-08-05 JP JP60172785A patent/JPS6232332A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5456378A (en) * | 1977-10-14 | 1979-05-07 | Hitachi Ltd | Wafer prober apparatus |
| JPS55125639A (en) * | 1979-03-23 | 1980-09-27 | Hitachi Ltd | Inspection apparatus |
| JPS56107142A (en) * | 1980-01-31 | 1981-08-25 | Toshiba Corp | Property evaluation device for semiconductor pressure detection element |
| JPS57122546U (enExample) * | 1981-01-23 | 1982-07-30 |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100350777B1 (ko) * | 2000-08-18 | 2002-08-28 | 한국생산기술연구원 | 분사노즐의 압력측정장치 및 그 방법 |
| JP2008507688A (ja) * | 2004-07-21 | 2008-03-13 | アフォレ オサケユイチア | 圧力試験のための圧力試験装置および方法 |
| JPWO2007125756A1 (ja) * | 2006-04-26 | 2009-09-10 | 東京エレクトロン株式会社 | 微小構造体の検査装置、及び微小構造体の検査方法 |
| WO2010098053A1 (ja) * | 2009-02-27 | 2010-09-02 | 株式会社 日立ハイテクノロジーズ | 化学分析装置 |
| JP2013064754A (ja) * | 2009-02-27 | 2013-04-11 | Hitachi High-Technologies Corp | 化学分析装置 |
| DE112010000927B4 (de) * | 2009-02-27 | 2013-11-14 | Hitachi High-Technologies Corporation | Chemischer Analysator |
| DE112010005273B4 (de) * | 2009-02-27 | 2014-01-16 | Hitachi High-Technologies Corporation | Chemischer Analysator |
| US8747744B2 (en) | 2009-02-27 | 2014-06-10 | Hitachi High-Technologies Corporation | Chemical analyzer |
| US8916113B2 (en) | 2009-02-27 | 2014-12-23 | Hitachi High-Technologies Corporation | Chemical analyzer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0458898B2 (enExample) | 1992-09-18 |
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