JPH0458898B2 - - Google Patents

Info

Publication number
JPH0458898B2
JPH0458898B2 JP60172785A JP17278585A JPH0458898B2 JP H0458898 B2 JPH0458898 B2 JP H0458898B2 JP 60172785 A JP60172785 A JP 60172785A JP 17278585 A JP17278585 A JP 17278585A JP H0458898 B2 JPH0458898 B2 JP H0458898B2
Authority
JP
Japan
Prior art keywords
pressure
detection element
wafer
calibration
verification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60172785A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6232332A (ja
Inventor
Masaru Inagaki
Atsushi Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP60172785A priority Critical patent/JPS6232332A/ja
Publication of JPS6232332A publication Critical patent/JPS6232332A/ja
Publication of JPH0458898B2 publication Critical patent/JPH0458898B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B05B12/082—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to a condition of the discharged jet or spray, e.g. to jet shape, spray pattern or droplet size

Landscapes

  • Measuring Fluid Pressure (AREA)
JP60172785A 1985-08-05 1985-08-05 圧力検出素子の検定方法及び装置 Granted JPS6232332A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60172785A JPS6232332A (ja) 1985-08-05 1985-08-05 圧力検出素子の検定方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60172785A JPS6232332A (ja) 1985-08-05 1985-08-05 圧力検出素子の検定方法及び装置

Publications (2)

Publication Number Publication Date
JPS6232332A JPS6232332A (ja) 1987-02-12
JPH0458898B2 true JPH0458898B2 (enExample) 1992-09-18

Family

ID=15948305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60172785A Granted JPS6232332A (ja) 1985-08-05 1985-08-05 圧力検出素子の検定方法及び装置

Country Status (1)

Country Link
JP (1) JPS6232332A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100350777B1 (ko) * 2000-08-18 2002-08-28 한국생산기술연구원 분사노즐의 압력측정장치 및 그 방법
WO2006008337A1 (en) * 2004-07-21 2006-01-26 Afore Oy Pressure testing apparatus and method for pressure testing
US20090039908A1 (en) * 2006-04-26 2009-02-12 Tokyo Electron Limited Microstructure inspecting apparatus and microstructure inspecting method
US8916113B2 (en) 2009-02-27 2014-12-23 Hitachi High-Technologies Corporation Chemical analyzer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5456378A (en) * 1977-10-14 1979-05-07 Hitachi Ltd Wafer prober apparatus
JPS55125639A (en) * 1979-03-23 1980-09-27 Hitachi Ltd Inspection apparatus
JPS56107142A (en) * 1980-01-31 1981-08-25 Toshiba Corp Property evaluation device for semiconductor pressure detection element
JPS57122546U (enExample) * 1981-01-23 1982-07-30

Also Published As

Publication number Publication date
JPS6232332A (ja) 1987-02-12

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