JPS6231023A - Plating device for magnetic disk substrate - Google Patents

Abstract

PURPOSE:To enable electroless plating which has no bit defect over the entire external surfaces of numbers of magnetic disk substrates by providing gears successively at end parts of respective substrate holding shafts and engaging the gears with a sun gear provided coaxially with the center shaft of a rotary disk. CONSTITUTION:Magnetic disk substrates 50 are supported in many grooves 17 recessed in substrate holding shafts 13 and a grip part 14 is gripped to fit the substrate holding shafts 13 between rotary disks 6 and 7; and a carrier body 3 is dipped in treating liquid and a motor 8 is driven to rotate the rotary disks 6 and 7 in vertical planes respectively. Consequently, the substrate holding shafts 13 revolve around a center shaft 5 and each substrate holding shaft 13 rotates on its axis at a relatively high speed while a gear 21 engages the sun gear 22 provided coaxially with the center shaft 5. Hydrogen gas produced on the surface of each magnetic disk substrate 50 is removed by a liquid flow and a straightening plate 15 prevents the treating liquid from being disordered, so none of the magnetic disk substrates 50 vibrates to right and left and electroless plated layers which have no bit defect are formed over the entire surfaces.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetic disk substrate plating apparatus used for applying defect-free electroless plating to the entire outer surface of a magnetic disk substrate.

(Prior Art) A magnetic disk used in a storage device for an information processing system is made by forming a nickel plating layer with a thickness of about 10 μm as an underlayer on the upper surface of a magnetic disk substrate made of an aluminum alloy, and then a magnetic recording layer. The nickel plating layer is formed by covering the upper surface with a protective layer, and electroless nickel plating is widely used to form this nickel plating layer. However, during this electroless nickel plating process, hydrogen gas bubbles are generated on the surface of the magnetic disk substrate due to a chemical reaction, and if left untreated, uneven plating will occur. A plating device was used that applied vibrations to remove air bubbles.

However, in the conventional magnetic disk substrate plating equipment as described above, the magnetic disk substrate cannot be moved reliably and minute air bubbles cannot be completely removed. There is a problem that concave defects occur, and there is also a problem that plating cannot be performed on the contact portion between the magnetic disk substrate and its support jig. Furthermore, many of the conventional plating apparatuses for magnetic disk substrates are small, and there is a problem in that they cannot perform a large amount of plating.

(Problems to be Solved by the Invention) The present invention solves these conventional problems and provides a magnetic plate that can perform electroless plating without defects such as bits on the entire outer surface of a large number of magnetic disk substrates. It was completed for the purpose of plating vias on disk substrates.

(Means for Solving the Problems) The present invention has a handle portion and a rectifying plate in the center between a pair of rotating disks that are immersed inside a processing tank and rotates in a vertical plane, and a shaft that extends on both sides. A plurality of board holding shafts each having a number of grooves for supporting a magnetic disk board are removably attached to the part, and a gear is connected to the end of each board holding shaft to connect the gear to a rotating disk. It is characterized by meshing with a sun gear provided coaxially with the center axis of.

(Example) Next, the present invention will be explained in detail with reference to the illustrated example.
(1) has a polyfluoroethylene lining layer (2) on the inner surface.
), (3) is a carrier body that can be set on the top of the treatment tank (1), and (4) is the carrier body (3).
A pair of vertical support plates on the left and right are installed vertically on the lower surface of both ends. A horizontal central axis (5) is installed between these support plates (4), (4), and the support plate (
A pair of rotating disks (6), (
7) is installed. One rotating disk (63) has gears carved on its outer circumferential surface, and is supported by a beher gear (10) at the lower end of a vertical shaft (9) driven by a motor (8) built into the carrier body (3). The drive gear (11) supported by the plate (4) is rotated, and this drive gear (11) meshes with the gear on the outer circumferential surface of the rotating disk (6), so when the motor (8) rotates, it rotates. The disk (6) is the central axis (5)
The other rotary disk (7), which rotates around the rotor and is connected to it by the support shaft (12), also rotates in the same manner.

(13) is a plurality of substrate holding shafts detachably attached between the pair of rotating disks (6) and (7). Each board holding shaft (13) has a handle part (14) and a disk-shaped rectifying plate (15) in the center, and a magnetic disk as shown in FIG. 3 in the shaft part (16) extending on both sides thereof. A large number of recesses a (17) for supporting the substrate (50) are provided at a constant pitch. Naturally, the outer diameter of the shaft portion (16) is made smaller than the inner diameter of the center hole of the magnetic disk substrate (50). Each of these substrate holding shafts (13) has one end connected to a short shaft (13) rotatably pivoted to the rotating disk (6).
18) into the square hole (19), and the other end is pivotally connected to the rotating disk (7) with a removable lug l-(20), so that it can be attached to the rotating disks (6) and (7). It is rotatably mounted. A gear (21) is provided at the tip of each short shaft (18).
1) is meshed with a sun gear (22) fixed to the support plate (4) so as to be coaxial with the central axis (5) of the rotating disks (6) and (7). Therefore, each gear (2I) is connected to the center shaft (51
Each gear (21) rotates around the sun gear (22
), it rotates due to engagement with the square hole (
The substrate holding shaft (13), which is connected via the short shaft (18) with 19), also rotates at the same time.

(Function) In this structure, the magnetic disk substrate (50) is supported by a large number of grooves (17) recessed in the shaft portion (16) of the substrate holding shaft (13), and the central portion of the magnetic disk substrate (50) is Grip the handle (14) of the board holding shaft (13) to rotate the rotating disk (6).
), (7), and then set the carrier body (3) on the top of the processing tank (1) and rotate the rotating disks (6), (7).
The entire part including the parts is immersed in the processing liquid and the motor (8) is rotated to rotate the rotating disks (6), (7) in a vertical plane as described above. As a result, the substrate holding shaft (13) revolves around the central axis (5) and each substrate holding shaft (
13) has a gear (21) connected to its end that is connected to the central shaft (
5) and rotates at a relatively high speed in the same direction as the revolution direction, and each magnetic disk substrate (50) also has an inner diameter of the center hole a (17).
Since it is larger than the outer diameter of the substrate holding shaft (13), it rotates with respect to the substrate holding shaft (13) and constantly moves its contact point. In this way, each magnetic disk substrate (50) is subjected to electroless nickel plating, etc. while moving through the processing solution, and at this time, the hydrogen gas generated on the surface of the magnetic disk substrate (50) coats each magnetic disk. The processing liquid is removed by the liquid flow generated between the substrates (50), and the rectifying plate (15) prevents the processing liquid from being disturbed, so that the entire magnetic disk substrate (50) is removed without the magnetic disk substrate (50) vibrating from side to side. An electroless plating layer without defects such as pits is formed on the surface. Incidentally, if an ultrasonic vibrator is provided on the outer surface of the processing tank [1] to apply ultrasonic vibration to the processing liquid, the occurrence of focusing can be more reliably prevented.

(Effects of the Invention) As is clear from the above description, the present invention enables uniform electroless plating without defects such as bits to be applied to the entire outer surface of a magnetic disk substrate. Since the substrate holding shaft supported by the disk is provided with a large number of grooves to hold the magnetic disk substrates, several hundred magnetic disk substrates can be processed at the same time. Furthermore, the board holding shaft has a handle in the center, making it easy to handle and has excellent workability.This system has helped the industry develop by solving the problems of conventional magnetic disk board plating equipment. The contribution made is extremely large.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway front view showing an embodiment of the present invention, FIG. 2 is a partially cutaway side view thereof, and FIG. 3 is an enlarged sectional view of a substrate holding shaft. (1): Processing tank, (5): Center shaft, (6), (7) Bi-rotating disk, (13): Substrate holding shaft, (14): Handle, (15): Current plate, (16) ): Shaft, (17):
*, (21): Gear, (22): Sun gear, (50):
magnetic disk board. Patent applicant: Chuo Seisakusho Co., Ltd. Representative: Akira Shima Immediate question
Tatsu Watanuki
Yama Rei Bunfu No. 3 Figure fq 22

Claims (1)

[Claims] A handle part (14) is located in the center between a pair of rotating discs (6) and (7) that are immersed in the processing tank (1) and rotate in a vertical plane.
) and a rectifier plate (15), and extends on both sides thereof.
A plurality of board holding shafts (13) each having a number of grooves (17) for supporting the magnetic disk board (50) are removably attached to 6), and the ends of each board holding shaft (13) are A gear (21) is connected to the rotary disk (6), (7), and the gear (21) meshes with a sun gear (22) coaxially provided with the central axis (5) of the rotating disks (6), (7). Plating equipment for magnetic disk substrates.