JPS6230713B2 - - Google Patents

Info

Publication number
JPS6230713B2
JPS6230713B2 JP56064486A JP6448681A JPS6230713B2 JP S6230713 B2 JPS6230713 B2 JP S6230713B2 JP 56064486 A JP56064486 A JP 56064486A JP 6448681 A JP6448681 A JP 6448681A JP S6230713 B2 JPS6230713 B2 JP S6230713B2
Authority
JP
Japan
Prior art keywords
film
silicon nitride
electrode
nitride film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56064486A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57178381A (en
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP56064486A priority Critical patent/JPS57178381A/ja
Publication of JPS57178381A publication Critical patent/JPS57178381A/ja
Publication of JPS6230713B2 publication Critical patent/JPS6230713B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H10F77/311—Coatings for devices having potential barriers for photovoltaic cells
    • H10F77/315—Coatings for devices having potential barriers for photovoltaic cells the coatings being antireflective or having enhancing optical properties
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP56064486A 1981-04-27 1981-04-27 Manufacture of mis type photo-electric converter Granted JPS57178381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56064486A JPS57178381A (en) 1981-04-27 1981-04-27 Manufacture of mis type photo-electric converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56064486A JPS57178381A (en) 1981-04-27 1981-04-27 Manufacture of mis type photo-electric converter

Publications (2)

Publication Number Publication Date
JPS57178381A JPS57178381A (en) 1982-11-02
JPS6230713B2 true JPS6230713B2 (enrdf_load_stackoverflow) 1987-07-03

Family

ID=13259587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56064486A Granted JPS57178381A (en) 1981-04-27 1981-04-27 Manufacture of mis type photo-electric converter

Country Status (1)

Country Link
JP (1) JPS57178381A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5078415B2 (ja) * 2006-04-14 2012-11-21 シャープ株式会社 太陽電池の製造方法、及び太陽電池モジュールの製造方法

Also Published As

Publication number Publication date
JPS57178381A (en) 1982-11-02

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