JPS6230692A - 液相エピタキシヤル成長装置 - Google Patents
液相エピタキシヤル成長装置Info
- Publication number
- JPS6230692A JPS6230692A JP16681285A JP16681285A JPS6230692A JP S6230692 A JPS6230692 A JP S6230692A JP 16681285 A JP16681285 A JP 16681285A JP 16681285 A JP16681285 A JP 16681285A JP S6230692 A JPS6230692 A JP S6230692A
- Authority
- JP
- Japan
- Prior art keywords
- melt
- holding device
- substrate holding
- reservoir
- liquid phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000012010 growth Effects 0.000 title claims description 38
- 239000007791 liquid phase Substances 0.000 title claims description 19
- 239000000758 substrate Substances 0.000 claims description 78
- 239000000155 melt Substances 0.000 claims description 58
- 238000005192 partition Methods 0.000 claims description 39
- 238000003860 storage Methods 0.000 claims description 15
- 238000004891 communication Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 description 23
- 230000005484 gravity Effects 0.000 description 10
- 239000013078 crystal Substances 0.000 description 9
- 239000007788 liquid Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 238000004943 liquid phase epitaxy Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000010261 cell growth Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16681285A JPS6230692A (ja) | 1985-07-30 | 1985-07-30 | 液相エピタキシヤル成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16681285A JPS6230692A (ja) | 1985-07-30 | 1985-07-30 | 液相エピタキシヤル成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6230692A true JPS6230692A (ja) | 1987-02-09 |
| JPH0310594B2 JPH0310594B2 (enrdf_load_stackoverflow) | 1991-02-14 |
Family
ID=15838121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16681285A Granted JPS6230692A (ja) | 1985-07-30 | 1985-07-30 | 液相エピタキシヤル成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6230692A (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5518996U (enrdf_load_stackoverflow) * | 1978-07-26 | 1980-02-06 |
-
1985
- 1985-07-30 JP JP16681285A patent/JPS6230692A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5518996U (enrdf_load_stackoverflow) * | 1978-07-26 | 1980-02-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0310594B2 (enrdf_load_stackoverflow) | 1991-02-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |